公开(公告)号：US11295953B2

公开(公告)日：2022-04-05

申请号：US17257328

申请日：2019-02-28

Applicant: JIANGSU UNIVERSITY

Inventor： Hao Zhu ,  Zhi Zhang ,  Senshan Mao ,  Shuaijie Zhu ,  Zhaoyang Zhang ,  Kun Xu ,  Anbin Wang ,  Douyan Zhao

IPC: H01L21/268 ,  C23C18/12 ,  C23C14/08

Abstract: An apparatus for micromachining a semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry includes an optical path system, a stable low-pressure jet generation system, and an electrolytic machining system. The optical path system includes a laser generator, a beam expander, a reflector, a galvanometer, and a lens. The electrolytic machining system includes a direct-current pulsed power supply, an adjustable cathode fixture, an electrolyte tank, a current probe, and an oscilloscope. The stable low-pressure jet generation system provides an electrolyte flow into a metal needle. The electrolyte flow forms an electrolyte layer between a semiconductor material and a cathode copper plate, such that the cathode and the anode are in electrical contact with each other. In a method employing the apparatus, a laser beam is irradiated onto the semiconductor material to form a local high-temperature region, which leads to a localized increase in electrical conductivity.

公开(公告)号：US11306408B2

公开(公告)日：2022-04-19

申请号：US17296552

申请日：2020-01-19

Applicant: Jiangsu University

Inventor： Zhaoyang Zhang ,  Yucheng Wu ,  Kun Xu ,  Xueren Dai ,  Anbin Wang ,  Qinming Gu ,  Hong Wang

IPC: C25D5/02 ,  C25D5/04 ,  C25D5/18 ,  C25D21/06 ,  C25D21/10

Abstract: Disclosed are a device and a method for microelectrodeposition through a laser assisted flexible following tool electrode. Localization of electrodeposition and dimensional precision of members are enhanced by using the flexible following tool electrode to restrict a dispersion region of an electric field and a reaction region of electrodeposition, and a complex-shaped member can be deposited by controlling a motion path of the flexible following tool electrode. Since a laser has a high power density, introducing laser irradiation changes an electrode state in a radiated region, accelerates ion diffusion and electron transfer speeds, and increases a deposition rate, thus reducing defects such as pitting and cracking in a deposit, enhancing deposition quality, and achieving fabrication of a micro-part by a synergistic action of both electrochemical energy and laser energy.