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公开(公告)号：US07649173B2
公开(公告)日：2010-01-19
申请号：US11618728
申请日：2006-12-29
申请人： Jianqiang Hu , Zhixian Rui , Yanli Zhao , Yanjun Wang , Ming Li , Min Pan
发明人： Jianqiang Hu , Zhixian Rui , Yanli Zhao , Yanjun Wang , Ming Li , Min Pan
CPC分类号： G01N1/32
摘要： A method for preparing TEM sample, comprising the following steps: providing a sample with two pits and a failure region between the two pits, the failure region comprising a semiconductor device; milling the first surface of the failure region, till the cross section of the semiconductor device is exposed; etching the first surface of the failure region; cleaning the sample; milling the second surface of the failure region, till the failure region can be passed by electron beam. A sample can be prepared for a high resolution TEM through above steps. When the sample is observed, it is easy to distinguish the lightly doped drain, source/drain regions from the silicon substrate and observe the pattern and defects in the lightly doped drain, source/drain regions clearly; in addition, it is easy to distinguish the BPSG from the non-doped silicon dioxide in the failure region.
摘要翻译： 一种制备TEM样品的方法，包括以下步骤：提供具有两个凹坑的样品和两个凹坑之间的失效区域，所述失效区域包括半导体器件; 铣削故障区域的第一表面，直到半导体器件的横截面露出; 蚀刻失效区域的第一表面; 清洗样品; 铣削失效区域的第二表面，直到失效区域可以通过电子束。 可以通过上述步骤制备用于高分辨率TEM的样品。 当观察样品时，很容易区分轻掺杂漏极，源极/漏极区域与硅衬底，并清楚地观察到轻掺杂漏极，源极/漏极区域中的图案和缺陷; 此外，在故障区域中容易区分BPSG和非掺杂二氧化硅。
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公开(公告)号：US20080078742A1
公开(公告)日：2008-04-03
申请号：US11618728
申请日：2006-12-29
申请人： Jianqiang HU , Zhixian Rui , Yanli Zhao , Yanjun Wang , Ming Li , Min Pan
发明人： Jianqiang HU , Zhixian Rui , Yanli Zhao , Yanjun Wang , Ming Li , Min Pan
CPC分类号： G01N1/32
摘要： A method for preparing TEM sample, comprising the following steps: providing a sample with two pits and a failure region between the two pits, the failure region comprising a semiconductor device; milling the first surface of the failure region, till the cross section of the semiconductor device is exposed; etching the first surface of the failure region; cleaning the sample; milling the second surface of the failure region, till the failure region can be passed by electron beam. A sample can be prepared for a high resolution TEM through above steps. When the sample is observed, it is easy to distinguish the lightly doped drain, source/drain regions from the silicon substrate and observe the pattern and defects in the lightly doped drain, source/drain regions clearly; in addition, it is easy to distinguish the BPSG from the non-doped silicon dioxide in the failure region.
摘要翻译： 一种制备TEM样品的方法，包括以下步骤：提供具有两个凹坑的样品和两个凹坑之间的失效区域，所述失效区域包括半导体器件; 铣削故障区域的第一表面，直到半导体器件的横截面露出; 蚀刻失效区域的第一表面; 清洗样品; 铣削失效区域的第二表面，直到失效区域可以通过电子束。 可以通过上述步骤制备用于高分辨率TEM的样品。 当观察样品时，很容易区分轻掺杂漏极，源极/漏极区域与硅衬底，并清楚地观察到轻掺杂漏极，源极/漏极区域中的图案和缺陷; 此外，在故障区域中容易区分BPSG和非掺杂二氧化硅。
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公开(公告)号：US20110186108A1
公开(公告)日：2011-08-04
申请号：US13064771
申请日：2011-04-14
申请人： Wen Liu , Jing Shao , Lei Wang , Yiwen Gong , Jingjuan Li , Zhimou Xu , Yanli Zhao , Yi Wang , Shuang Bao Wang , Jing Nie
发明人： Wen Liu , Jing Shao , Lei Wang , Yiwen Gong , Jingjuan Li , Zhimou Xu , Yanli Zhao , Yi Wang , Shuang Bao Wang , Jing Nie
IPC分类号： H01L31/052
CPC分类号： H01L31/035281 , H01L31/0547 , H01L31/0549 , H01L31/056 , Y02E10/52
摘要： A high efficiency multiring solar cell (MRSC) system, including a number of single-junction solar cells and utilizing a novel multiring architecture is disclosed. Sunlight from the solar concentrator illuminates a double cone prism to create spatially separated spectral bands. Projection of the spectral bands on working surfaces of solar cells creates a sequence of spatially separated spectral rings, where rings corresponding to the spectral bands with longer wavelengths are enclosed by the rings corresponding to shorter wavelengths. The number of solar cells and their shape corresponds to the number and the shape of the respective spectral rings. Each solar cell is optimized for efficiently converting the sunlight from the corresponding spectral band. A corresponding method of forming solar cells and converting sunlight into electricity are also provided.
摘要翻译： 公开了一种高效率多层太阳能电池（MRSC）系统，其中包括多个单结太阳能电池并利用了一种新型的多结构架构。 来自太阳能集中器的阳光照亮双锥形棱镜以产生空间上分离的光谱带。 在太阳能电池工作表面上的光谱带的投影产生了一系列空间分离的光谱环，其中对应于具有较长波长的光谱带的环被对应于较短波长的环包围。 太阳能电池的数量及其形状对应于各个光谱环的数量和形状。 每个太阳能电池都被优化，以有效地转换相应光谱带的太阳光。 还提供了形成太阳能电池并将阳光转化为电的相应方法。
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