公开(公告)号：US20130064918A1

公开(公告)日：2013-03-14

申请号：US13621204

申请日：2012-09-15

申请人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

发明人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC分类号： B29C59/00

CPC分类号： G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

摘要： A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

公开(公告)号：US08523555B2

公开(公告)日：2013-09-03

申请号：US13621204

申请日：2012-09-15

申请人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

发明人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC分类号： B29C59/00

CPC分类号： G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

摘要： A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

摘要翻译： 提供了纳米压印母版及其制造方法。 该方法包括：将导电金属离子注入包括石英的衬底中，以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂，以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

公开(公告)号：US20060066990A1

公开(公告)日：2006-03-30

申请号：US11270591

申请日：2005-11-10

申请人： Jin-seung Sohn ,  Sung-hoon Choa

发明人： Jin-seung Sohn ,  Sung-hoon Choa

IPC分类号： G11B17/00

CPC分类号： G11B25/043 ,  G11B33/08

摘要： A hard disk drive having a vibration reducing damper is disclosed. The hard disk drive is provided with a damper which is interposed between a through hole provided at a cover plate and a screw joined to the upper end of the shaft of a spindle motor, and includes at least one viscoelastic material layer. It is preferable that the damper has a multi-layered structure in which at least one high stiffness layer has relatively higher stiffness and at least one low stiffness layer made of a viscoelastic material has relatively lower stiffness. With the above configuration, the damper restrains vibrations generated by the spindle from being transferred to the cover plate, noises generated by the hard disk drive are reduced, and, in addition, since vibrations generated by the spindle motor are damped, disk fluttering is reduced.

公开(公告)号：US20110223279A1

公开(公告)日：2011-09-15

申请号：US13113534

申请日：2011-05-23

申请人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

发明人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC分类号： B29C59/02

CPC分类号： G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

摘要： A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

摘要翻译： 提供了纳米压印母版及其制造方法。 该方法包括：将导电金属离子注入包括石英的衬底中，以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂，以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

公开(公告)号：US07968253B2

公开(公告)日：2011-06-28

申请号：US11745609

申请日：2007-05-08

申请人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

发明人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC分类号： G03F1/00

CPC分类号： G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

摘要： A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

摘要翻译： 提供了纳米压印母版及其制造方法。 该方法包括：将导电金属离子注入包括石英的衬底中，以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂，以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

公开(公告)号：US07286320B2

公开(公告)日：2007-10-23

申请号：US11270591

申请日：2005-11-10

申请人： Jin-seung Sohn ,  Sung-hoon Choa

发明人： Jin-seung Sohn ,  Sung-hoon Choa

IPC分类号： G11B17/02

CPC分类号： G11B25/043 ,  G11B33/08

摘要： A hard disk drive having a vibration reducing damper is disclosed. The hard disk drive is provided with a damper which is interposed between a through hole provided at a cover plate and a screw joined to the upper end of the shaft of a spindle motor, and includes at least one viscoelastic material layer. It is preferable that the damper has a multi-layered structure in which at least one high stiffness layer has relatively higher stiffness and at least one low stiffness layer made of a viscoelastic material has relatively lower stiffness. With the above configuration, the damper restrains vibrations generated by the spindle from being transferred to the cover plate, noises generated by the hard disk drive are reduced, and, in addition, since vibrations generated by the spindle motor are damped, disk fluttering is reduced.

摘要翻译： 公开了一种具有减振阻尼器的硬盘驱动器。 硬盘驱动器设置有阻尼器，其设置在设置在盖板上的通孔和与主轴电机的轴的上端接合的螺钉之间，并且包括至少一个粘弹性材料层。 优选地，阻尼器具有多层结构，其中至少一个高刚度层具有相对较高的刚度，并且由粘弹性材料制成的至少一个低刚度层具有相对较低的刚度。 通过上述结构，阻尼器抑制由主轴产生的振动传递到盖板，由硬盘驱动器产生的噪声减小，此外，由于主轴电动机产生的振动被阻尼，所以盘振动减小 。

公开(公告)号：US08349527B2

公开(公告)日：2013-01-08

申请号：US13113534

申请日：2011-05-23

申请人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

发明人： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC分类号： G03F1/00

CPC分类号： G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

摘要： A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

摘要翻译： 提供了纳米压印母版及其制造方法。 该方法包括：将导电金属离子注入包括石英的衬底中，以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂，以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

公开(公告)号：US07858010B2

公开(公告)日：2010-12-28

申请号：US11945400

申请日：2007-11-27

申请人： Eun-hyoung Cho ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Du-hyun Lee ,  Hae-sung Kim

发明人： Eun-hyoung Cho ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Du-hyun Lee ,  Hae-sung Kim

IPC分类号： G03F1/00

CPC分类号： G03F9/7084 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/7076 ,  G03F9/708 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pattern template includes a flexible substrate, a template mold formed on the flexible substrate to include a pattern, and an alignment mark, the alignment mark has a greater refractive index than that of the template mold. The template is manufactured by providing a master template including a pattern area, coating resin for mold in the pattern area, forming a template mold by installing a flexible plate on the resin for mold and curing the resin for mold by radiating UV rays, separating the template mold and the master template, coating a metal thin film on the template mold, and forming an alignment mark at both sides of the template mold.

摘要翻译： 图案模板包括柔性基板，形成在柔性基板上以包括图案的模板模具和对准标记，对准标记具有比模板模具更大的折射率。 该模板通过在图案区域中提供包括图案区域，模具用涂料树脂，模塑模板，通过在模具树脂上安装柔性板并通过辐射紫外线固化模具来分离模板来制造模板 模板模具和主模板，在模板模具上涂覆金属薄膜，并在模板模具的两面形成对准标记。

公开(公告)号：US20080232225A1

公开(公告)日：2008-09-25

申请号：US11923976

申请日：2007-10-25

申请人： Eun-hyoung CHO ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Sung-dong Suh

发明人： Eun-hyoung CHO ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Sung-dong Suh

IPC分类号： G11B7/135

CPC分类号： G11B5/314 ,  G11B2005/0021

摘要： A metallic wave guide and a light delivery module are provided. The metallic waveguide includes a metal body formed of a conductive metal and having an aperture formed therethrough, the aperture having input and output ends. The aperture has a bent portion for changing a light traveling direction between the input and output ends, and a tapered portion between the bent portion and the output end. The tapered portion has a width that is gradually reduced toward the output end, and the aperture is formed in a C-shape by a ridge formed on an inner surface of the metal body.

摘要翻译： 提供金属波导和光输送模块。 金属波导包括由导电金属形成并具有穿过其形成的孔的金属体，该孔具有输入和输出端。 孔具有用于改变输入和输出端之间的光行进方向的弯曲部分，以及弯曲部分和输出端之间的锥形部分。 锥形部分的宽度朝向输出端逐渐减小，并且通过形成在金属体的内表面上的脊形成为C形。

公开(公告)号：US20080131791A1

公开(公告)日：2008-06-05

申请号：US11945400

申请日：2007-11-27

申请人： Eun-hyoung Cho ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Du-hyun Lee ,  Hae-sung Kim

发明人： Eun-hyoung Cho ,  Sung-hoon Choa ,  Jin-seung Sohn ,  Du-hyun Lee ,  Hae-sung Kim

IPC分类号： G03F1/00

CPC分类号： G03F9/7084 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/7076 ,  G03F9/708 ,  H01L2924/0002 ,  H01L2924/00

摘要： A pattern template includes a flexible substrate, a template mold formed on the flexible substrate to include a pattern, and an alignment mark, the alignment mark has a greater refractive index than that of the template mold. The template is manufactured by providing a master template including a pattern area, coating resin for mold in the pattern area, forming a template mold by installing a flexible plate on the resin for mold and curing the resin for mold by radiating UV rays, separating the template mold and the master template, coating a metal thin film on the template mold, and forming an alignment mark at both sides of the template mold.

摘要翻译： 图案模板包括柔性基板，形成在柔性基板上以包括图案的模板模具和对准标记，对准标记具有比模板模具更大的折射率。 该模板通过在图案区域中提供包括图案区域，模具用涂料树脂，模塑模板，通过在模具树脂上安装柔性板并通过辐射紫外线固化模具来分离模板来制造模板 模板模具和主模板，在模板模具上涂覆金属薄膜，并在模板模具的两面形成对准标记。