公开(公告)号：US20100219920A1

公开(公告)日：2010-09-02

申请号：US12394339

申请日：2009-02-27

Applicant: Jingbin Feng ,  Aaron LaBrie ,  Kousik Ganesan

Inventor： Jingbin Feng ,  Aaron LaBrie ,  Kousik Ganesan

IPC: H01F7/02

CPC classification number: H01L21/68728 ,  Y10S414/141 ,  Y10T279/18

Abstract: Provided are magnetically actuated wafer chucks that permit a wafer to be clamped or undamped at any time during a process and at any rotational speed, as desired. Such wafer chucks may include constraining members that are movable between open and closed positions. In a closed position, a constraining member aligns the wafer after wafer handoff and/or clamps the wafer during rotation to prevent it from flying off the chuck. In an open position, the constraining member moves away from the wafer to allow liquid etchant to flow from the wafer edge without obstruction. The constraining members may be, for example, cams, attached to arms or links of the chuck. The cams or other constraining members move between open and closed positions by self-balancing forces including a first force, such as a spring force, that acts to move a cam in a first direction, and a non-contact actuate-able force, such as a magnetic force, that acts to move the cam in the opposite direction. The resulting cam motion is smooth and continuous.

Abstract translation: 提供了磁力驱动的晶片卡盘，其允许晶片在工艺期间的任何时间以及根据需要以任何转速进行夹紧或无阻尼。 这种晶片卡盘可以包括可在打开位置和闭合位置之间移动的约束构件。 在关闭位置，限制构件在晶片切换之后对准晶片和/或在旋转期间夹紧晶片以防止其从卡盘飞出。 在打开位置，约束构件远离晶片移动，以允许液体蚀刻剂从晶片边缘流动而无障碍。 约束构件可以是例如凸轮，附接到卡盘的臂或连杆。 凸轮或其他约束构件通过自平衡力在打开和关闭位置之间移动，包括用于沿第一方向移动凸轮的第一力（例如弹簧力）和非接触致动力 作为磁力，其作用是使凸轮沿相反方向移动。 所得到的凸轮运动是平滑和连续的。

公开(公告)号：US08172646B2

公开(公告)日：2012-05-08

申请号：US12394339

申请日：2009-02-27

Applicant: Jingbin Feng ,  Aaron LaBrie ,  Kousik Ganesan

Inventor： Jingbin Feng ,  Aaron LaBrie ,  Kousik Ganesan

IPC: B24B1/00

CPC classification number: H01L21/68728 ,  Y10S414/141 ,  Y10T279/18

Abstract: Provided are magnetically actuated wafer chucks that permit a wafer to be clamped or unclamped at any time during a process and at any rotational speed, as desired. Such wafer chucks may include constraining members that are movable between open and closed positions. In a closed position, a constraining member aligns the wafer after wafer handoff and/or clamps the wafer during rotation to prevent it from flying off the chuck. In an open position, the constraining member moves away from the wafer to allow liquid etchant to flow from the wafer edge without obstruction. The constraining members may be, for example, cams, attached to arms or links of the chuck. The cams or other constraining members move between open and closed positions by self-balancing forces including a first force, such as a spring force, that acts to move a cam in a first direction, and a non-contact actuate-able force, such as a magnetic force, that acts to move the cam in the opposite direction. The resulting cam motion is smooth and continuous.

Abstract translation: 提供了磁力驱动的晶片卡盘，其允许晶片在工艺期间的任何时间被夹紧或松开，并且根据需要以任何转速。 这种晶片卡盘可以包括可在打开位置和闭合位置之间移动的约束构件。 在关闭位置，限制构件在晶片切换之后对准晶片和/或在旋转期间夹紧晶片以防止其从卡盘飞出。 在打开位置，约束构件远离晶片移动，以允许液体蚀刻剂从晶片边缘流动而无障碍。 约束构件可以是例如凸轮，附接到卡盘的臂或连杆。 凸轮或其他约束构件通过自平衡力在打开和关闭位置之间移动，包括用于沿第一方向移动凸轮的第一力（例如弹簧力）和非接触致动力 作为磁力，其作用是使凸轮沿相反方向移动。 所得到的凸轮运动是平滑和连续的。

公开(公告)号：US6030451A

公开(公告)日：2000-02-29

申请号：US5773

申请日：1998-01-12

Applicant: Aaron LaBrie ,  Masahiko Baba

Inventor： Aaron LaBrie ,  Masahiko Baba

IPC: C30B15/26 ,  C30B15/22

CPC classification number: C30B15/26 ,  Y10T117/1004 ,  Y10T117/1008

Abstract: A method and apparatus for measuring and controlling the diameter of a silicon single crystal ingot grown by the Czochralski technique using dual optical cameras focused on diametrically opposed edges of the meniscus of the growing crystal to measure the actual crystal diameter. The crystal growth parameters can be adjusted in response to the measured diameter to maintain a constant, desired diameter. The method and apparatus of the invention provide a continuous accurate measurement of the crystal diameter and avoid unnecessary adjustments to the crystal growth conditions resulting from diameter measurement errors due to the effects of crystal orbit, melt level changes and camera angle variations.

Abstract translation: 一种用于测量和控制通过使用双光学照相机通过切克劳斯基技术生长的硅单晶锭的直径的方法和装置，其聚焦在生长晶体的弯月面的直径相对的边缘上以测量实际晶体直径。 可以响应于测量的直径来调节晶体生长参数以保持恒定的期望直径。 本发明的方法和装置提供了晶体直径的连续精确测量，并且避免了由于晶体轨道，熔体水平变化和相机角度变化的影响而导致的直径测量误差对晶体生长条件的不必要的调整。

公开(公告)号：US09732416B1

公开(公告)日：2017-08-15

申请号：US11737045

申请日：2007-04-18

Applicant: Craig P. Stephens ,  Matt Kanetomi ,  Joseph Richardson ,  Chris Veazey ,  Aaron LaBrie

Inventor： Craig P. Stephens ,  Matt Kanetomi ,  Joseph Richardson ,  Chris Veazey ,  Aaron LaBrie

IPC: H01L21/683 ,  H01L21/687 ,  C23C14/50 ,  C23C16/458

CPC classification number: C23C14/505 ,  C23C16/4584 ,  C23C16/4588 ,  H01L21/6708 ,  H01L21/68728 ,  H01L21/68764

Abstract: A rotatable wafer chuck includes chuck arms and wafer holders that are aerodynamically shaped to reduce turbulence during rotation. A wafer holder may include a friction support and an independently rotatable vertical alignment member and clamping member that is shaped to reduce drag. The shape reduces turbulence during edge bevel etching to improve the uniformity of the edge exclusion and during high-speed rotation to improve particle performance.