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公开(公告)号：US08387559B2
公开(公告)日：2013-03-05
申请号：US12278407
申请日：2007-02-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC分类号： C23C16/455 , C23C16/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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公开(公告)号：US20100064969A1
公开(公告)日：2010-03-18
申请号：US12278407
申请日：2007-02-07
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC分类号： H01L21/46
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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公开(公告)号：US20050132882A1
公开(公告)日：2005-06-23
申请号：US11003867
申请日：2004-12-06
IPC分类号： C25B9/00 , C25B1/24 , C25B15/02 , C25B15/08 , F25B27/00 , B01D53/02 , B01D59/26 , F25B15/00 , F25B17/00
摘要： A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要翻译： 提供了一种气体发生器，其中过滤器寿命延长，并且压力调节阀由此被长时间保护。 气体发生器用于电解电解池中的电解液以产生气体或气体，并且包括至少一个用于吸收由气体发生器产生的不必要副产物的吸收器，用于去除由吸收器产生的雾的过滤器，以及 用于调节电解槽中的压力的至少一个压力调节阀，其中过滤器被从吸收器的下游插入，此外，压力调节阀设置在过滤器的下游。
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公开(公告)号：US07556678B2
公开(公告)日：2009-07-07
申请号：US11003867
申请日：2004-12-06
摘要： A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要翻译： 提供了一种气体发生器，其中过滤器寿命延长，并且压力调节阀由此被长时间保护。 气体发生器用于电解电解池中的电解液以产生气体或气体，并且包括至少一个用于吸收由气体发生器产生的不必要副产物的吸收器，用于去除由吸收器产生的雾的过滤器，以及 用于调节电解槽中的压力的至少一个压力调节阀，其中过滤器被从吸收器的下游插入，此外，压力调节阀设置在过滤器的下游。
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公开(公告)号：US08366886B2
公开(公告)日：2013-02-05
申请号：US12064704
申请日：2006-06-28
摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给源 电解原料，到达电解槽中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。
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公开(公告)号：US20090260981A1
公开(公告)日：2009-10-22
申请号：US12064704
申请日：2006-06-28
IPC分类号： C25B9/00
摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给源 电解原料，到达电解槽中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。
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公开(公告)号：US20080128270A1
公开(公告)日：2008-06-05
申请号：US11972103
申请日：2008-01-10
申请人： Jiro HIRAIWA , Osamu Yoshimoto , Tetsuro Tojo
发明人： Jiro HIRAIWA , Osamu Yoshimoto , Tetsuro Tojo
IPC分类号： C25B9/00
摘要： An electrolytic apparatus for molten salt disposed on an electrolytic cell to electrolyze an electrolytic bath consisting of the mixed molten salt. The apparatus including a first heat exchanging means to heat and/or cool an electrolytic cell body. The apparatus including a support member comprising one of a flange part and an upper lid. The apparatus including a cover member. The apparatus including an electric insulating material and a gas sealing material disposed between the support member and the cover member for simultaneous electric insulation and gas sealing.
摘要翻译： 一种用于熔融盐的电解设备，其设置在电解槽上，以电解由所述混合熔融盐组成的电解槽。 该装置包括用于加热和/或冷却电解槽体的第一热交换装置。 该装置包括包括凸缘部分和上盖中的一个的支撑构件。 该装置包括盖构件。 该装置包括电绝缘材料和设置在支撑构件和盖构件之间的气体密封材料，用于同时电绝缘和气体密封。
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公开(公告)号：US20050011766A1
公开(公告)日：2005-01-20
申请号：US10879135
申请日：2004-06-30
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
摘要： An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.
摘要翻译： 一种用于控制熔盐电解器的装置，其中包含在电解槽中的固体电解液熔化，以自动获得允许电解的状态，该装置包括用于通过检测器检测电解槽状态变化的检测装置 以及调节装置，用于在使用检测装置之后将液体电解槽液位调整到允许电解的状态。
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公开(公告)号：US08128792B2
公开(公告)日：2012-03-06
申请号：US10661638
申请日：2003-09-15
申请人： Jiro Hiraiwa , Osamu Yoshimoto , Tetsuro Tojo
发明人： Jiro Hiraiwa , Osamu Yoshimoto , Tetsuro Tojo
摘要： A fluorine gas generator is provided with which the gases used and/or generated, in case of leakage thereof, can be prevented from mixing together as far as possible and, even in case of gas leakage into the outside of the generator system, the leakage gas can be treated safely and in which the maintenance, exchange and other operations are easy to carry out. The generator comprises a box-shaped body containing an electrolyzer for fluorine gas generation, and the box-shaped body is divided into two or more compartments, including a compartment containing the electrolyzer.
摘要翻译： 提供氟气发生器，可以防止在其泄漏的情况下使用和/或产生的气体尽可能地混合在一起，并且即使在气体泄漏到发电机系统的外部的情况下，泄漏 气体可以安全处理，维护，交换和其他操作容易进行。 发电机包括一个包含用于产生氟气的电解器的盒形体，并且盒形主体被分成两个或更多个隔间，包括一个包含电解槽的隔间。
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10.发明授权System for supplying halogen gas or halogen containing gas and method thereof 有权用于提供卤素气体或含卤素气体的系统及其方法公开(公告)号：US07343924B2
公开(公告)日：2008-03-18
申请号：US11033117
申请日：2005-01-12
申请人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
发明人： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
IPC分类号： F04F1/00
CPC分类号： F17C9/00 , F17C2201/056 , F17C2201/058 , F17C2203/0643 , F17C2205/0323 , F17C2205/0338 , F17C2205/0391 , F17C2223/0123 , F17C2223/033 , F17C2227/0157 , F17C2227/044 , F17C2250/0626 , F17C2260/024 , F17C2260/036 , F17C2270/0518 , Y10T137/0318 , Y10T137/0329 , Y10T137/3115 , Y10T137/4673
摘要： Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.
摘要翻译： 由于用于供给气体的系统包括储存容器，对储存容器中的氟气进行加压的压缩机和通过从该系统向目的地供应氟气等而压入和储存氟气的加压储存容器， 供给气体时，不需要改变气瓶等气体源。 这样，能够廉价，安全地向目的地供给氟气等。
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