摘要:
Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要:
Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要:
An engine blower includes a blower having a fan accommodated in a volute case, and an engine having a volute for generating a cooling air for self-cooling. An output shaft of the engine is provided with the fan without attaching a cooling fan for generating the cooling air. An outlet port for delivering a part of a blowing air generated by the fan is provided on the volute case.
摘要:
A slot-in type disk apparatus configured to prevent fine traverse base vibration at disk playback. A base body and a lid constitute a chassis outer sheath having a front surface formed with a disk insertion slot. The base body has a traverse base with a spindle motor, a pickup and a driving unit moving the pickup. A cam displaces the traverse base between the base body and the lid. The cam is provided on each of a main slider and a sub-slider. The main slider and the sub-slider are located sideways of the spindle motor and are connected to each other through a cam lever which is moved by the main slider, and the traverse base is displaced by moving the sub-slider. The cam lever has a resilient member which abuts against the traverse base at the time of playback of a disk.
摘要:
A gate valve includes: a valve box; a support body disposed inside a hollow portion; a valve plate including a fixed valving section, a movable valving section sliding in a direction in which a flow passage is extended, a first peripheral region; and a second peripheral region; a first biasing section disposed at the first peripheral region, allowing the movable valving section to move toward a first opening portion, allowing the movable valving section to come into contact with an inner surface, pressing the movable valving section onto the inner surface, and closing the flow passage; and a second biasing section disposed at the second peripheral region, allowing the movable valving section to move toward a second opening portion, and releasing the flow passage by separating the movable valving section from the inner surface.
摘要:
A disk apparatus comprising a chassis outer sheath having a base body 10 and a lid, in which a front surface of the chassis outer sheath is formed with a disk inserting opening 11 into which a disk is directly inserted, a lever which is operated when the disk is inserted or discharged is provided in the chassis outer sheath, the lever is provided at its movable side end with a guide 17, and the disk is guided by the guide 17, wherein the guide 17 comprises a stationary portion 101B fixed to the lever, a movable portion 101C which is displaced with respect to the stationary portion 101B, and an elastic body which biases the movable portion 101C in a direction away from the stationary portion 101B.
摘要:
A disk apparatus comprises a rotor frame 221 in which disk holding member is placed on a center of an upper surface of the rotor frame 221, a shaft 222 mounted on a center of the rotor frame 221, a bearing metal 231 which holds the shaft 222, a holder 232 which is disposed on an outer periphery of the bearing metal 231 and which holds the bearing metal 231, a stator 240 disposed on an outer periphery of the holder 232, a magnet 224 fixed to the rotor frame 221 at a location opposed to the stator 240, and a thrust cap 233 fixed to a center of a lower portion of the holder 232. An outer periphery of the lower portion of the holder 232 is swaged and fixed to a motor plate 234, and the shaft 222 is disposed between the disk holding member and the thrust cap 233.
摘要:
An electrode having a good contact between a semiconductor substrate and an electrode film is formed in a semiconductor device, and a manufacturing method therefor. On first AlGaAs of a compound semiconductor substrate, a second semiconductor layer of second AlGaAs formed with p-type impurity region is formed, a third semiconductor layer of low resistance GaAs and AlGaAs having a band gap narrower than that of the second semiconductor layer is formed thereon and, further, an electrode film is formed on the third semiconductor layer.
摘要:
A target hitting game machine includes a cover member being formed with an opening; a target having an effective hitting area on a portion of the surface thereof, the target being rotatably disposed in the cover member and partially exposed through the opening during the rotation; a drive mechanism which rotates the target; an exposure detector which detects that the effective hitting area of the target is exposed through the opening; a hit detector which senses that the target is hit by a player; and a successful hitting determinator which is in responsive to the exposure detector and the hit detector and determines a successful hitting that the effective hitting area is hit.