公开(公告)号：US5447066A

公开(公告)日：1995-09-05

申请号：US114145

申请日：1993-09-01

申请人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Toshihiko Ichinose ,  Sumitake Yoshida ,  Masami Tamura

发明人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Toshihiko Ichinose ,  Sumitake Yoshida ,  Masami Tamura

IPC分类号： G01C19/5607 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： The present invention relates to an angular velocity sensor utilized as a gyroscope and particularly, to a high-performance angular velocity sensor having a tuning-fork construction. The vibrator is formed of a metal base plate which is bent about 90 degrees along a center line defined by two opposite slits extending from their respective side edges to a central region of the metal base plate so that its two bent parts are orthogonal to each other. Two piezoelectric elements are bonded to the corresponding surfaces of the two parts of each vibrator which in turn serve as an actuator and a detector.

摘要翻译： 本发明涉及用作陀螺仪的角速度传感器，特别涉及具有音叉结构的高性能角速度传感器。 振动器由金属底板形成，该金属基板沿着由从其各自的侧边缘延伸到金属基板的中心区域的两个相对的狭缝限定的中心线弯曲约90度，使得其两个弯曲部分彼此正交 。 两个压电元件结合到每个振动器的两个部分的相应表面上，其又用作致动器和检测器。

公开(公告)号：US5723788A

公开(公告)日：1998-03-03

申请号：US760346

申请日：1996-12-04

申请人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Masami Tamura ,  Hitoshi Nishimura ,  Kikuo Kaino

发明人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Masami Tamura ,  Hitoshi Nishimura ,  Kikuo Kaino

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： A high-performance angular velocity sensor has a tuning-fork structure in which two vibrator units consisting of piezoelectric elements are coupled to each other. The angular velocity sensor comprises two metal plates, a first vibrator including a first actuator and a first detector joined orthogonally to each other, and a second vibrator including a second actuator and a second detector joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in parallel along an axis of detection. The first actuator and the first detector include piezoelectric elements bonded to the first metal surface, and the second actuator and the second detector include piezoelectric elements bonded to the second metal surface.

摘要翻译： 高性能角速度传感器具有音叉结构，其中由压电元件组成的两个振动器单元彼此耦合。 角速度传感器包括两个金属板，第一振动器，包括第一致动器和彼此正交连接的第一检测器，以及第二振动器，包括彼此正交连接的第二致动器和第二检测器，所述两个振动器通过 电极块沿着检测轴线彼此平行。 第一致动器和第一检测器包括结合到第一金属表面的压电元件，第二致动器和第二检测器包括结合到第二金属表面的压电元件。

公开(公告)号：US5445025A

公开(公告)日：1995-08-29

申请号：US92354

申请日：1993-07-15

申请人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Masami Tamura ,  Hitoshi Nishimura ,  Kikuo Kaino

发明人： Jiro Terada ,  Hiroshi Takenaka ,  Masaharu Ushihara ,  Masami Tamura ,  Hitoshi Nishimura ,  Kikuo Kaino

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： An angular velocity sensor having a tuning-fork structure comprising a first vibrator including a first actuator and a first detector each attached to a metal plate and joined orthogonally to each other, and a second vibrator including a second actuator and a second detector each attached to another metal plate and joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in a generally parallel relationship along the axis of detection of the sensor. The first and second detectors have a rectangular plate shape each holding a piezoelectric element. The rectangular plate shape has a lengthwise edge and a widthwise edge where the lengthwise edge parallel to the axis of detection of the sensor and is longer than the width wise edge. At least one of the lengthwise edges of the detectors has a beveled surface formed by removing metal at an angle from the lengthwise edge of the detector to balance the sensor.

摘要翻译： 一种具有音叉结构的角速度传感器，包括第一振动器，所述第一振动器包括第一致动器和第一检测器，每个第一振动器附接到金属板并且彼此正交连接;以及第二振动器，其包括第二致动器和第二检测器， 另一个金属板并且正交地彼此连接，两个振动器通过电极块以传感器的检测轴线大致平行的关系彼此耦合。 第一和第二检测器具有矩形板状，每个保持一个压电元件。 矩形板形状具有纵向边缘和宽度方向边缘，其中纵向边缘平行于传感器的检测轴线并且比宽度边缘长。 检测器的纵向边缘中的至少一个具有通过从检测器的纵向边缘以一定角度去除金属而形成的斜面，以平衡传感器。

公开(公告)号：US5854427A

公开(公告)日：1998-12-29

申请号：US836482

申请日：1997-05-07

申请人： Jiro Terada ,  Hiroshi Senda ,  Masami Tamura ,  Masaharu Ushihara ,  Masakazu Hatanaka

发明人： Jiro Terada ,  Hiroshi Senda ,  Masami Tamura ,  Masaharu Ushihara ,  Masakazu Hatanaka

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5607

摘要： The present invention is related to an angular velocity sensor, and intends to improve the detection characteristic through a precise measuring of an angular velocity signal. For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwiching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancel to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.

摘要翻译： PCT No.PCT / JP96 / 02538 Sec。 371日期1997年5月7日 102（e）日期1997年5月7日PCT提交1996年9月6日PCT公布。 出版物WO97 / 09585 日期1997年3月13日本发明涉及角速度传感器，并且旨在通过精确测量角速度信号来提高检测特性。 为此目的，本发明的角速度传感器包括U形第一和第二压电元件（4），（5）接合在一起夹着检测电极（6），其中在至少一个音叉臂（4a），（ 5a）第一和第二压电元件（4），（5）沿压电元件结合在一起的厚度方向极化。 在音叉臂上以对角排列设置的驱动电极（7），（12）和（8），（11）被提供有彼此反相的驱动信号。 在这种结构中，驱动信号在检测电极附近相互抵消; 结果，驱动信号不会与检测电极（6）检测的检测信号混合。 因此，提高了检测角速度信号的能力。

公开(公告)号：US06220094B1

公开(公告)日：2001-04-24

申请号：US09282532

申请日：1999-03-31

申请人： Toshihiko Ichinose ,  Takeshi Uemura ,  Jiro Terada ,  Masami Tamura ,  Kiyohito Nakazawa

发明人： Toshihiko Ichinose ,  Takeshi Uemura ,  Jiro Terada ,  Masami Tamura ,  Kiyohito Nakazawa

IPC分类号： G01P904

CPC分类号： G01C19/5607

摘要： An angular velocity sensor driving circuit includes a driving part for a vibrator, a vibration level detector, a coriolis force detector, a first amplifier for amplifying an output signal of the vibration level detector, a rectifying circuit, a variable gain amplifier, a voltage amplifier, a level judging circuit and switching means. The gain of the voltage amplifier or the gain of a variable gain amplifier is varied by a switching circuit which is controlled by the output signal of a level judging circuit which compares the output signal of the rectifying circuit and a reference voltage. By using the switching circuit rapid start up of the angular velocity sensor can be achieved.

摘要翻译： 角速度传感器驱动电路包括用于振动器的驱动部分，振动电平检测器，科里奥利力检测器，用于放大振动电平检测器的输出信号的第一放大器，整流电路，可变增益放大器，电压放大器 ，电平判断电路和开关装置。 电压放大器的增益或可变增益放大器的增益由开关电路改变，该开关电路由比较整流电路的输出信号和参考电压的电平判断电路的输出信号控制。 通过使用开关电路可以实现角速度传感器的快速启动。

公开(公告)号：US06298723B1

公开(公告)日：2001-10-09

申请号：US09503727

申请日：2000-02-15

申请人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

发明人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

IPC分类号： G01P900

CPC分类号： G01C19/5607

摘要： The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost. Being made of ceramic piezoelectric material or crystal material, the constitution comprises four parallel oscillating arms 12 to 15, or 112 to 115, and a support member 11, or 111 for supporting one end of the oscillating arms or both ends commonly, in which outer two oscillating arms 12, 15, or 112, 115 of a compound tuning fork 10, or 110 in a comb shape of which position of the inside root of two oscillating arms each on inside and outside to the support member 11, or 111 in the oscillating arm direction is matched or different are used in the driving side tuning for, while inner two oscillating arms 13, 14, or 113, 114 are used in the detecting side tuning fork so as to correspond between driving and detection.

摘要翻译： 本发明涉及一种用于移动元件或导航系统的姿态控制的角速度传感器，旨在实现较小的灵敏度，较低的偏移，较低的偏移漂移，较低的平移加速度灵敏度和更高的抗冲击性， 低成本。陶瓷压电材料或晶体材料制成的结构包括四个平行的摆动臂12至15或112至115，以及支撑构件11或111，用于一般地支撑摆动臂的一端或两端， 其中组合音叉10或110的外两个摆动臂12,15或112,115的梳形形状，其中两个摆动臂的内根的位置各自在内部和外部到支撑构件11，或 在驱动侧调谐中使用摆动臂方向上的111I，或者在检测侧音叉中使用内部两个摆动臂13,14或113,114，以对应于b 驾驶和检测。

公开(公告)号：US5824900A

公开(公告)日：1998-10-20

申请号：US750072

申请日：1997-04-14

申请人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

发明人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

IPC分类号： G01C19/56 ,  G01P9/00

CPC分类号： G01C19/5607

摘要： The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost. Being made of ceramic piezoelectric material or crystal material, the constitution comprises four parallel oscillating arms 12 to 15, or 112 to 115, and a support member 11, or 111 for supporting one end of the oscillating arms or both ends commonly, in which outer two oscillating arms 12, 15, or 112, 115 of a compound tuning fork 10, or 110 in a comb shape of which position of the inside root of two oscillating arms each on inside and outside to the support member 11, or 111 in the oscillating arm direction is matched or different are used in the driving side tuning for, while inner two oscillating arms 13, 14, or 113, 114 are used in the detecting side tuning fork so as to correspond between driving and detection.

摘要翻译： PCT No.PCT / JP96 / 00926 Sec。 371日期1997年04月14日 102（e）1997年4月14日PCT 1996年4月4日PCT PCT。 公开号WO96 / 31754 日期：1996年10月10日本发明涉及用于移动元件或导航系统的姿态控制的角速度传感器，旨在实现更高的灵敏度，更低的偏移，更低的偏移漂移，更低的平移加速度灵敏度以及更高的抗冲击性 体积小，成本低。 由陶瓷压电材料或晶体材料制成，该结构包括四个平行的摆动臂12至15或112至115，以及支撑构件11或111，用于支撑振荡臂或两端的一端，其中外部 复合音叉10或组合音叉10的两个摆动臂12,15或112,115，其梳状形状是两个摆动臂的内根的位置分别位于支撑构件11的内部和外部，或111 在驱动侧调谐中使用摆动臂方向匹配或不同，而在检测侧音叉中使用内部两个摆动臂13,14或113,114，以便在驱动和检测之间对应。

公开(公告)号：US06237415B1

公开(公告)日：2001-05-29

申请号：US09503737

申请日：2000-02-15

申请人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

发明人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

IPC分类号： G01P900

CPC分类号： G01C19/5607

摘要： The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost. Being made of ceramic piezoelectric material or crystal material, the constitution comprises four parallel oscillating arms 12 to 15, or 112 to 115, and a support member 11, or 111 for supporting one end of the oscillating arms or both ends commonly, in which outer two oscillating arms 12, 15, or 112, 115 of a compound tuning fork 10, or 110 in a comb shape of which position of the inside root of two oscillating arms each on inside and outside to the support member 11, or 111 in the oscillating arm direction is matched or different are used in the driving side tuning for, while inner two oscillating arms 13, 14, or 113, 114 are used in the detecting side tuning fork so as to correspond between driving and detection.

公开(公告)号：US06539802B1

公开(公告)日：2003-04-01

申请号：US09674565

申请日：2000-12-21

申请人： Jiro Terada ,  Masami Tamura

发明人： Jiro Terada ,  Masami Tamura

IPC分类号： C04B3500

CPC分类号： G01C19/5607

摘要： The invention provides an angular velocity sensor capable of obtaining vibration which is close to a linear-operation for a large amplitude input, and a high sensitivity at the same time. The sensor comprises a vibrator, which is made of a piezoelectric element having a perovskite crystal structure expressed as ABO3, and 0.1-1.0 wt. % of MnO2 is added to this piezoelectric element.

摘要翻译： 本发明提供一种角速度传感器，其能够获得接近大振幅输入的线性运算和同时具有高灵敏度的振动。 该传感器包括振动器，该振动器由具有以ABO 3表示的钙钛矿晶体结构的压电元件和0.1-1.0重量％ 将MnO 2的添加量添加到该压电元件。

公开(公告)号：US6119519A

公开(公告)日：2000-09-19

申请号：US126277

申请日：1998-07-30

申请人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

发明人： Masashi Konno ,  Sumio Sugawara ,  Nobuhisa Atoji ,  Jiro Terada ,  Masami Tamura

IPC分类号： G01C19/56 ,  G01P9/00

CPC分类号： G01C19/5607

摘要： The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost.Being made of ceramic piezoelectric material or crystal material, the constitution comprises four parallel oscillating arms 12 to 15, or 112 to 115, and a support member 11, or 111 for supporting one end of the oscillating arms or both ends commonly, in which outer two oscillating arms 12, 15, or 112, 115 of a compound tuning fork 10, or 110 in a comb shape of which position of the inside root of two oscillating arms each on inside and outside to the support member 11, or 111 in the oscillating arm direction is matched or different are used in the driving side tuning for, while inner two oscillating arms 13, 14, or 113, 114 are used in the detecting side tuning fork so as to correspond between driving and detection.

摘要翻译： 本发明涉及一种用于移动元件或导航系统的姿态控制的角速度传感器，旨在实现较小的灵敏度，较低的偏移，较低的偏移漂移，较低的平移加速度灵敏度和更高的抗冲击性， 低成本。 由陶瓷压电材料或晶体材料制成，该结构包括四个平行的摆动臂12至15或112至115，以及支撑构件11或111，用于支撑振荡臂或两端的一端，其中外部 复合音叉10或组合音叉10的两个摆动臂12,15或112,115，其梳状形状是两个摆动臂的内根的位置分别位于支撑构件11的内部和外部，或111 在驱动侧调谐中使用摆动臂方向匹配或不同，而在检测侧音叉中使用内部两个摆动臂13,14或113,114，以便在驱动和检测之间对应。