公开(公告)号：US20100126270A1

公开(公告)日：2010-05-27

申请号：US12593752

申请日：2008-04-09

申请人： Jirou Terada ,  Ichirou Satou ,  Takami Ishida ,  Takashi Imanaka

发明人： Jirou Terada ,  Ichirou Satou ,  Takami Ishida ,  Takashi Imanaka

IPC分类号： G01C19/56

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0817 ,  G01P2015/0842

摘要： An inertial force sensor includes a weight, a first fixing portion linked to the weight, a second fixing portion linked to the weight via the first fixing portion, a first electrode on a first surface of the weight, a second electrode facing the first electrode, and first and second elastic portions elastically deforming so as to displace the weight. The first elastic portion displaces the weight along an X-axis but not along any of a Y-axis and a Z-axis. The second elastic portion displaces the first fixing portion along the Y-axis but not along any of the X-axis and the Z-axis. This inertial force sensor detects an acceleration at high sensitivity.

摘要翻译： 惯性力传感器包括：重物，与该重物连接的第一固定部分，经由第一固定部分与重物连接的第二固定部分，在该重物的第一表面上的第一电极，面对第一电极的第二电极， 并且第一和第二弹性部分弹性变形以便取代重物。 第一弹性部分沿着X轴移动重物，但不沿Y轴和Z轴中的任一个移动。 第二弹性部分沿着Y轴移动第一固定部分，但不沿X轴和Z轴的任何一个移动。 该惯性力传感器以高灵敏度检测加速度。

公开(公告)号：US20120033279A1

公开(公告)日：2012-02-09

申请号：US13264530

申请日：2010-05-10

申请人： Shigeo Furukawa ,  Kiyomi Furukawa ,  Jirou Terada ,  Shinsuke Nakazono ,  Soichiro Hiraoka

发明人： Shigeo Furukawa ,  Kiyomi Furukawa ,  Jirou Terada ,  Shinsuke Nakazono ,  Soichiro Hiraoka

IPC分类号： G02B26/10

CPC分类号： G02B26/0833 ,  G02B27/01 ,  G02B27/017 ,  G02B2027/0147

摘要： An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. An outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion. Alternatively, an outer circumference of at least any one of the turn portions of the first oscillator and the second oscillator is deviated from a second end portion axis T2 that is parallel to the mirror portion central axis and extends along a second side parallel to the first side of the mirror portion. At least any one of these two conditions is satisfied.

摘要翻译： 光反射元件具有框形支撑体，第一振荡器和第二振荡器，每个具有曲折形状和反射镜部分。 将反射镜部分和第一振荡器之间的接合位置连接到支撑体和第一振荡器之间的接合位置的线段，以及将镜部分和第二振荡器的接合位置连接到第二振荡器的接合位置的线段 支撑体和第二振荡器穿过反射镜部分中心轴线。 第一振荡器和第二振荡器的旋转部分中的至少任一个的外圆周与第一端部轴线偏离，第一端部轴线平行于反射镜部分中心轴线并沿着反射镜部分的第一侧延伸。 或者，第一振荡器和第二振荡器的匝部中的至少任一个的外周与第二端部轴线T2偏离，第二端部轴线T2平行于反射镜部分中心轴线，并沿着与第一振荡器和第二振荡器的第一振荡器平行的第二侧延伸 侧部分。 这两个条件中至少有一个是满足的。

公开(公告)号：US20100218604A1

公开(公告)日：2010-09-02

申请号：US12377327

申请日：2007-08-07

申请人： Jirou Terada

发明人： Jirou Terada

IPC分类号： G01C19/56

CPC分类号： G01C19/5726 ,  G01C19/574 ,  H01L41/08

摘要： Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal.

摘要翻译： 公开了一种用于实现各种电子设备的小型化的角速度传感器。 为此，角速度传感器具有减法器，用于基于从第一感测电极单元和第二感测电极单元输出的两个传感器信号输出第一差分信号，用于输出第一附加信号的加法器，用于输出第一信号的另一个减法器 基于从第三感测电极单元和第四感测电极单元输出的两个传感器信号的第二差分信号，以及用于输出第二附加信号的另一个加法器。 然后，传感器从基于第一差分信号和第二差分信号获得的附加信号和基于第一附加信号和第二附加信号获得的差分信号检测角速度。

公开(公告)号：US08422109B2

公开(公告)日：2013-04-16

申请号：US12811592

申请日：2009-01-29

申请人： Jirou Terada ,  Shinsuke Nakazono ,  Shigeo Furukawa ,  Kazuki Komaki

发明人： Jirou Terada ,  Shinsuke Nakazono ,  Shigeo Furukawa ,  Kazuki Komaki

IPC分类号： G02B26/08

CPC分类号： B41J2/471 ,  G02B26/0858 ,  G02B26/105 ,  H04N1/113

摘要： An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.

摘要翻译： 光反射装置包括具有被配置为反射光的反射表面的反射镜，连接到反射镜的第一支撑梁，连接到第一支撑梁的音叉振动器，连接到音叉振动器的第二支撑梁，以及支撑件 连接到第二支撑梁。 第一支撑梁具有连接到反射镜的第一端和位于与第一端相反的一侧的第二端，并沿着中心轴线延伸。 音叉振动器包括连接到第一支撑梁的第二端的接合部分，从第一接合部分延伸并与第一中心轴分离的第一臂，以及从第一接合部分对称地延伸到第一接合部分的第一臂 围绕第一个中心轴。 第二支撑梁具有连接到音叉振动器的接合部分的第三端和位于与第三端相反的一侧的第四端，并沿第一中心轴线延伸。

公开(公告)号：US08117913B2

公开(公告)日：2012-02-21

申请号：US12377327

申请日：2007-08-07

申请人： Jirou Terada

发明人： Jirou Terada

IPC分类号： G01P9/04 ,  G01C19/56

CPC分类号： G01C19/5726 ,  G01C19/574 ,  H01L41/08

摘要： Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal.

摘要翻译： 公开了一种用于实现各种电子设备的小型化的角速度传感器。 为此，角速度传感器具有减法器，用于基于从第一感测电极单元和第二感测电极单元输出的两个传感器信号输出第一差分信号，用于输出第一附加信号的加法器，用于输出第一信号的另一个减法器 基于从第三感测电极单元和第四感测电极单元输出的两个传感器信号的第二差分信号，以及用于输出第二附加信号的另一个加法器。 然后，传感器从基于第一差分信号和第二差分信号获得的附加信号和基于第一附加信号和第二附加信号获得的差分信号检测角速度。

公开(公告)号：US20100011859A1

公开(公告)日：2010-01-21

申请号：US12438765

申请日：2007-09-19

申请人： Jirou Terada

发明人： Jirou Terada

IPC分类号： G01C19/56

CPC分类号： G01C19/5607 ,  H01L41/1132

摘要： An angular velocity sensor detects an angular velocity of an object. The angular velocity sensor includes a detecting element, and a driving unit. The detecting element includes a supporting part, a first arm extending from the supporting part and being adapted to be fixed to the object, a second arm extending from the supporting part, and a first weight connected with the second arm. The second arm has substantially a U-shape and includes a first extending part extending from the supporting part, a first facing part facing the first extending part and extending in parallel with the first extending part, and a first joint part joining the first extending part to the first facing part. The first weight is connected with the facing part of the second arm. The driving unit includes first to fourth drivers. The first driver is provided at the first extending part and extends and contracts the first extending part. The second driver is positioned at the first extending part at a more outer circumference of the U-shape of the second arm than the first driver. The second driver extends and contracts the first extending part. The third driver is positioned at the first facing part, and extends and contracts the first facing part. The fourth driver is positioned at the first facing part at a more inner circumference of the U-shape of the second arm than the third driver, and extends and contracts the first facing part. This angular velocity sensor has a small size along a rotation axis about which an angular velocity to be detected.

摘要翻译： 角速度传感器检测物体的角速度。 角速度传感器包括检测元件和驱动单元。 检测元件包括支撑部分，从支撑部分延伸并适于固定到物体的第一臂，从支撑部分延伸的第二臂和与第二臂连接的第一重物。 所述第二臂具有大致U字形状并且包括从所述支撑部延伸的第一延伸部，面向所述第一延伸部并与所述第一延伸部平行延伸的第一面对部，以及将所述第一延伸部 到第一个面对的部分。 第一重物与第二臂的面对部分连接。 驱动单元包括第一至第四驱动器。 第一驱动器设置在第一延伸部分处并且延伸并收缩第一延伸部分。 第二驱动器位于比第一驱动器在第二臂的U形的更外侧的第一延伸部处。 第二个司机扩展和收缩第一个延伸部分。 第三驱动器位于第一面对部分，并且延伸并收缩第一面对部分。 第四驱动器位于第一面对部分处，比第三驱动器在第二臂的U形的更内圆周处延伸并收缩第一相对部分。 该角速度传感器沿着旋转轴线具有小的尺寸，围绕该角度速度传感器检测角速度。

公开(公告)号：US08279508B2

公开(公告)日：2012-10-02

申请号：US13265139

申请日：2010-04-16

申请人： Shinsuke Nakazono ,  Soichiro Hiraoka ,  Jirou Terada ,  Shigeo Furukawa ,  Kiyomi Furukawa, legal representative ,  Toshiaki Horie ,  Kazuki Komaki ,  Masaki Tada ,  Yuta Yamamoto

发明人： Shinsuke Nakazono ,  Soichiro Hiraoka ,  Jirou Terada ,  Shigeo Furukawa ,  Toshiaki Horie ,  Kazuki Komaki ,  Masaki Tada ,  Yuta Yamamoto

IPC分类号： G02B26/08

CPC分类号： G02B26/0858

摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.

摘要翻译： 光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。 高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。 低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。 低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区 由于压电层到达第一监视电极的作用。 设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。

公开(公告)号：US08054523B2

公开(公告)日：2011-11-08

申请号：US12304004

申请日：2007-07-20

申请人： Jirou Terada

发明人： Jirou Terada

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B26/12

CPC分类号： G02B26/0841 ,  G02B26/0858

摘要： An optical reflection device includes a flexible substrate, an elastic portion connected with an end of the flexible substrate, an optical reflector coupled with the flexible substrate via the elastic portion, a first electrode layer provided on the flexible substrate, and a piezoelectric layer provided on the first electrode layer. The optical reflection device may have a small size.

摘要翻译： 光学反射装置包括柔性基板，与柔性基板的端部连接的弹性部分，通过弹性部分与柔性基板耦合的光学反射器，设置在柔性基板上的第一电极层和设置在柔性基板上的压电层 第一电极层。 光学反射装置可以具有小的尺寸。

公开(公告)号：US20090237628A1

公开(公告)日：2009-09-24

申请号：US12404518

申请日：2009-03-16

申请人： Shigeo Furukawa ,  Jirou Terada ,  Shinsuke Nakazono

发明人： Shigeo Furukawa ,  Jirou Terada ,  Shinsuke Nakazono

IPC分类号： G03B21/28 ,  G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101 ,  G03B21/28 ,  H04N5/7458

摘要： An optical reflection device includes a mirror adapted to reflect light thereon, a first meander vibration beam supporting the mirror rotatably about the first rotation axis, a movable frame connected to the first meander vibration beam, a second meander vibration beam supporting the movable frame rotatably about a second rotation axis, and a supporter connected to the second meander vibration beam. The first meander vibration beam meanderingly extends along a first rotation axis, and has a first end and a second end opposite to the first end. The movable frame is connected to the second end of the first meander vibration beam. The second meander vibration beam extends meanderingly along the second rotation axis perpendicular to the first rotation axis, and has a third end and a fourth end opposite to the third end. The supporter is connected to the fourth end of the second meander vibration beam. The mirror is coupled to the movable frame only via the first meander vibration beam. This optical reflection device has a large angle by which the mirror rotates about the first rotation axis.

摘要翻译： 光学反射装置包括适于反射光的反射镜，围绕第一旋转轴可旋转地支撑镜子的第一曲折振动光束，连接到第一曲折振动光束的可移动框架，支撑可移动框架的第二曲折振动光束， 第二旋转轴线和与第二曲折振动梁连接的支撑件。 第一弯曲振动束沿着第一旋转轴线弯曲地延伸，并且具有与第一端相对的第一端和第二端。 可移动框架连接到第一弯曲振动梁的第二端。 第二曲折振动梁沿垂直于第一旋转轴线的第二旋转轴线蜿蜒延伸，并且具有与第三端相对的第三端和第四端。 支撑件连接到第二曲折振动梁的第四端。 反射镜仅通过第一弯曲振动光束耦合到可动框架。 该光反射装置具有大的角度，通过该角度，反射镜绕第一旋转轴线旋转。

公开(公告)号：US08508826B2

公开(公告)日：2013-08-13

申请号：US12937299

申请日：2009-04-23

申请人： Jirou Terada ,  Shinsuke Nakazono ,  Kazuki Komaki ,  Kiyomi Furukawa

发明人： Jirou Terada ,  Shinsuke Nakazono ,  Shigeo Furukawa ,  Kazuki Komaki

IPC分类号： G02B26/08

CPC分类号： H01L41/0953 ,  G02B26/0858

摘要： A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.

摘要翻译： 曲折振荡器包括按预定方向弯曲和耦合的多个振荡板，并且按压力驱动器依次叠置在振荡板上的压电致动器各自包括下电极，压电体和上电极，并且其中压电致动器交替布置在 摆动板。 因此，即使使元件变小，也可以容易地布置电极。 结果，可以提高生产率。