公开(公告)号：US07786450B2

公开(公告)日：2010-08-31

申请号：US12232638

申请日：2008-09-22

Applicant: Joachim Zach ,  Matthias Kallenbach

Inventor： Joachim Zach ,  Matthias Kallenbach

IPC: H01J1/50

CPC classification number: H01J1/50 ,  H01F5/003 ,  H01J29/762 ,  H01J29/768 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/141 ,  H05K1/0393 ,  H05K1/165 ,  Y10T29/4902

Abstract: Multipole coils (1, 2, 3, 4, 5, 6) for influencing particle beams have at least two coils (1, 2) which concentrically enclose an imaginary axis (10), wherein a winding (7) made from a flexible circuit board (8) is formed by means of conducting paths (9) disposed thereon for each coil (1, 2, 3, 4, 5, 6) and the circuit boards (8) are rolled into at least one circuit board layer (11, 12, 13, 14). Multipole coils of this kind (1, 2, 3, 4, 5, 6) are utilized for aberration correction in particle optics, wherein the windings (7) of the multipole coils (1, 2, 3, 4, 5, 6) form windows (16) whose width in the peripheral direction is chosen in such a fashion that no secondary interfering fields occur and whose length in the axial direction corresponds at least to its width.

Abstract translation: 用于影响粒子束的多极线圈（1,2,3,4,5,6）具有至少两个同心地围绕虚轴（10）的线圈（1,2），其中由柔性电路制成的绕组（7） 板（8）通过为每个线圈（1,2,3,4,5,6）设置在其上的导电路径（9）形成，并且电路板（8）被卷入至少一个电路板层（11 ，12,13,14）。 这种多极线圈（1,2,3,4,5,6）用于粒子光学中的像差校正，其中多极线圈（1,2,3,4,5,6）的绕组（7） 选择圆周方向宽度的窗口（16），使得不产生二次干涉场，并且其在轴向上的长度至少等于其宽度。

公开(公告)号：US20090084975A1

公开(公告)日：2009-04-02

申请号：US12232638

申请日：2008-09-22

Applicant: Joachim Zach ,  Matthias Kallenbach

Inventor： Joachim Zach ,  Matthias Kallenbach

IPC: H01J3/14

CPC classification number: H01J1/50 ,  H01F5/003 ,  H01J29/762 ,  H01J29/768 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/141 ,  H05K1/0393 ,  H05K1/165 ,  Y10T29/4902

Abstract: Multipole coils (1, 2, 3, 4, 5, 6) for influencing particle beams have at least two coils (1, 2) which concentrically enclose an imaginary axis (10), wherein a winding (7) made from a flexible circuit board (8) is formed by means of conducting paths (9) disposed thereon for each coil (1, 2, 3, 4, 5, 6) and the circuit boards (8) are rolled into at least one circuit board layer (11, 12, 13, 14). Multipole coils of this kind (1, 2, 3, 4, 5, 6) are utilized for aberration correction in particle optics, wherein the windings (7) of the multipole coils (1, 2, 3, 4, 5, 6) form windows (16) whose width in the peripheral direction is chosen in such a fashion that no secondary interfering fields occur and whose length in the axial direction corresponds at least to its width.

Abstract translation: 用于影响粒子束的多极线圈（1,2,3,4,5,6）具有至少两个同心地围绕虚轴（10）的线圈（1,2），其中由柔性电路制成的绕组（7） 板（8）通过为每个线圈（1,2,3,4,5,6）设置在其上的导电路径（9）形成，并且电路板（8）被卷入至少一个电路板层（11 ，12,13,14）。 这种多极线圈（1,2,3,4,5,6）用于粒子光学中的像差校正，其中多极线圈（1,2,3,4,5,6）的绕组（7） 选择圆周方向宽度的窗口（16），使得不产生二次干涉场，并且其在轴向上的长度至少等于其宽度。

公开(公告)号：US20090079531A1

公开(公告)日：2009-03-26

申请号：US12216857

申请日：2008-07-11

Applicant: Joachim Zach ,  Matthias Kallenbach

Inventor： Joachim Zach ,  Matthias Kallenbach

IPC: H01F5/00 ,  H01F7/06 ,  H01F7/127

CPC classification number: H01J1/50 ,  H01F5/003 ,  H01J29/762 ,  H01J29/768 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/141 ,  H05K1/0393 ,  H05K1/165 ,  Y10T29/4902

Abstract: Multipole coils (1, 2, 3, 4, 5, 6) comprise at least two coils (1, 2) which are disposed to concentrically enclose an imaginary axis (10). Multipole coils (1, 2, 3, 4, 5, 6) of this type are designed in such a fashion that effective fields can be generated in the area of an imaginary axis (10) when little installation space is available, and the multipole coils can be reproducibly manufactured with high precision. This is achieved in that, for each coil (1, 2, 3, 4, 5, 6), at least one winding (7) is disposed on a flexible printed circuit board (8) through disposed strip conductors (9), and the printed circuit board (8) is rolled in at least one printed circuit board layer (11, 12, 13, 14).

Abstract translation: 多极线圈（1，2，3，4，5，6）包括至少两个线圈（1,2），其被设置成同心地包围虚轴（10）。 这种类型的多极线圈（1，2，3，4，5，6）被设计成这样一种方式，即在少的安装空间可用时，在虚轴（10）的区域中可以产生有效的场，而多极线圈 线圈可以高精度地重复制造。 这是通过对于每个线圈（1,2,3,4,5,6）实现的，至少一个绕组（7）通过设置的带状导体（9）设置在柔性印刷电路板（8）上，并且 印刷电路板（8）被卷绕在至少一个印刷电路板层（11,12,13,14）中。