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    MEMS vacuum sensor based on the friction principle
    1.
    发明授权
    MEMS vacuum sensor based on the friction principle 失效
    基于摩擦原理的MEMS真空传感器

    公开(公告)号：US08186225B2

    公开(公告)日：2012-05-29

    申请号：US12301874

    申请日：2007-05-09

    申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

    发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

    IPC分类号： G01L11/00

    CPC分类号： G01L21/22

    摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

    摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。

    MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
    2.
    发明申请
    MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE 失效
    基于摩擦原理的MEMS真空传感器

    公开(公告)号：US20100024562A1

    公开(公告)日：2010-02-04

    申请号：US12301874

    申请日：2007-05-09

    申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

    发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

    IPC分类号： G01L21/22

    CPC分类号： G01L21/22

    摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

    摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。

    Resonance scanner
    3.
    发明授权
    Resonance scanner 失效
    共振扫描仪

    公开(公告)号：US06975442B2

    公开(公告)日：2005-12-13

    申请号：US10474410

    申请日：2002-04-12

    申请人： Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

    发明人： Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

    IPC分类号： B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/113

    CPC分类号： G02B26/105 ,  B81B3/004 ,  B81B2201/047 ,  G02B26/0841

    摘要： A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes 15 or coil 24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator electrodes 15 or coil 24) applying a force only directly to the drive plate (4) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (5), which differs from the eigenfrequency of the drive plate (4).

    摘要翻译： 一种共振扫描器，其中框架（3），驱动板（4），反射镜（5）和扭转弹簧（6,7）形成致动器部分（1），所述驱动板（4）附接在框架 （3）通过两个第一扭转弹簧（6），使得驱动板（4）能够围绕两个扭转弹簧（6）的公共第一扭转轴线（8）摆动，所述反射镜（5）附接在驱动板 （4）通过两个第二扭转弹簧（7），使得所述反射镜（5）可围绕两个扭转弹簧（7）的公共第二扭转轴线（9）摆动，并且所述第一扭转轴线（8）和所述第二扭转弹簧 扭转轴（9）彼此平行; 其特征在于，只有将致动器部件（1）的框架（3）安装在箱形定子部件（2）的侧壁（10）上，驱动装置（定子电极15或线圈24） 定子部分（2）的底部（11）仅在驱动板（4）的几何表面区域和所述底部（11）的区域中具有在所述驱动板（4）的几何表面积的区域中的凹部（13） 反射镜（5），该凹部（13）的尺寸至少使得反射镜（5）的最大机械偏转不受底部（11）限制，所述驱动装置（定子电极15或线圈24）施加力 仅直接到驱动板（4）并且具有周期性功能的所述力，其周期被调谐到与驱动板（4）的本征频率不同的反射镜（5）的本征频率。

    Electrostatically actuated micro-mechanical switching device
    4.
    发明授权
    Electrostatically actuated micro-mechanical switching device 有权
    静电致动微机械开关装置

    公开(公告)号：US08610520B2

    公开(公告)日：2013-12-17

    申请号：US13155002

    申请日：2011-06-07

    申请人： Joerg Froemel ,  Thomas Gessner ,  Christian Kaufmann ,  Stefan Leidich ,  Markus Nowack ,  Steffen Kurth ,  Andreas Bertz ,  Koichi Ikeda ,  Akira Akiba

    发明人： Joerg Froemel ,  Thomas Gessner ,  Christian Kaufmann ,  Stefan Leidich ,  Markus Nowack ,  Steffen Kurth ,  Andreas Bertz ,  Koichi Ikeda ,  Akira Akiba

    IPC分类号： H01H51/22 ,  H01P1/10

    CPC分类号： H01H59/0009 ,  H01H1/20 ,  H01H2001/0078 ,  H01P1/127

    摘要： An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.

    摘要翻译： 一种静电致动的微机械开关装置，其具有形成在基板的主体中的可移动元件，用于通过可移动元件在基板的平面中的水平移动来闭合和释放至少一个欧姆接触。 开关装置具有带有固定驱动电极和可动电极的梳状电极的驱动器。 可移动推杆与可动电极机械连接，延伸穿过电极，在一侧具有可动接触元件，以及至少一个复位弹簧。 信号线有两个部分被间隙中断。 微机械开关器件处于分流配置，具有低损耗，在宽频率范围内的高隔离度，低致动电压下的低开关时间和足够的可靠性。 信号线的线路阻抗及其变化尽可能小。 开关器件处于分流配置，用于闭合和释放接地线与信号线之间的欧姆接触。 接触元件具有至少部分地与信号线相对延伸并且分别电信号和机械地连接到信号线的两个部分的可动接触梁。 接地线形成有接触杆，其通过信号线的间隙，以形成接触梁和接地线之间的欧姆接触。 接触金属化至少在信号线和接地线的接触梁的顶部和侧壁上提供。

    Micro swivel actuators and a procedure for the production of the same
    5.
    发明授权
    Micro swivel actuators and a procedure for the production of the same 失效
    微型旋转执行机构及其生产程序

    公开(公告)号：US6016217A

    公开(公告)日：2000-01-18

    申请号：US983119

    申请日：1998-07-20

    申请人： Wolfram Dotzel ,  Thomas Gessner ,  Ramon Hahn ,  Christian Kaufmann ,  Heinz-Ulrich Lowe ,  Joachim Markert ,  Manfred Rauch ,  Udo Wollmann

    发明人： Wolfram Dotzel ,  Thomas Gessner ,  Ramon Hahn ,  Christian Kaufmann ,  Heinz-Ulrich Lowe ,  Joachim Markert ,  Manfred Rauch ,  Udo Wollmann

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0841

    摘要： The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors.

    摘要翻译： PCT No.PCT / DE96 / 01177 Sec。 371日期：1998年7月20日 102（e）1998年7月20日PCT PCT 1996年6月26日PCT公布。 公开号WO97 / 02506 日期1997年1月23日本发明涉及微型旋转执行机构及其制造方法。 微型旋转执行器基本上由配备有三层的半导体晶片构成，其一方面包含具有集成的弹簧和支撑元件作为机械部件的单个反射镜，另一方面包含作为电气布置的电极，馈线和电触点。 微型旋转执行器的制造采用来自表面微机械学领域的程序步骤，因此正在应用经过验证的技术。 微型旋转致动器，特别是微机械镜阵列，特别适用于通过激光束的图示再现技术中的应用。 利用这些致动器，可以通过转动几个平行的触发的各个反射镜来引导激光束。