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    Electrically controllable integrated switch
    4.
    发明授权
    Electrically controllable integrated switch 有权
    电控集成开关

    公开(公告)号：US09355802B2

    公开(公告)日：2016-05-31

    申请号：US14286331

    申请日：2014-05-23

    申请人： STMicroelectronics (Rousset) SAS

    发明人： Christian Rivero ,  Pascal Fornara ,  Antonio di-Giacomo ,  Brice Arrazat

    IPC分类号： H01H59/00 ,  H01L27/06 ,  H01L21/822 ,  H01H1/00 ,  H01L23/522

    CPC分类号： H01H59/0009 ,  B81B2201/018 ,  B81C1/00246 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01H1/0036 ,  H01H57/00 ,  H01H2001/0068 ,  H01H2001/0078 ,  H01H2059/0054 ,  H01L21/8221 ,  H01L23/522 ,  H01L27/0617 ,  H01L27/0688 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An integrated circuit includes an interconnection part with several metallization levels. An electrically activatable switching device within the interconnection part has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.

    摘要翻译： 集成电路包括具有多个金属化级别的互连部件。 互连部件内的可电激活的开关装置具有包括由结构保持的梁的组件。 梁和结构位于相同的金属化水平内。 布置结构在梁上的固定位置，以便为梁定义位于这些固定位置之间的枢转点。 该结构在不存在电位差的情况下相对于光束和垂直于光束的平面基本对称。 在存在施加在结构的第一部分之间的第一电位差并且在存在施加在结构的第二部分之间的第二电位差的情况下在第二方向上枢转时，梁能够在第一方向上枢转。

    Method for forming normally closed micromechanical device comprising a laterally movable element
    5.
    发明授权
    Method for forming normally closed micromechanical device comprising a laterally movable element 有权
    用于形成包括横向可移动元件的常闭微机械装置的方法

    公开(公告)号：US09284183B2

    公开(公告)日：2016-03-15

    申请号：US13764424

    申请日：2013-02-11

    申请人： HT MicroAnalytical, Inc.

    发明人： Todd Richard Christenson

    IPC分类号： H01H11/00 ,  H01H65/00 ,  B81B3/00 ,  H01H50/00 ,  H01H1/00

    CPC分类号： B81B3/0054 ,  H01H50/005 ,  H01H2001/0078 ,  H01H2050/007 ,  Y10T29/49826

    摘要： A micromechanical device and a method for forming the device is disclosed, wherein the micromechanical device has a laterally movable mechanically active element that has a quiescent position in which it is in physical contact with a second structural element. The device is fabricating by disposing the mechanically active element on a first substrate and disposing the second structural element on a second substrate. After the two substrates are aligned and joined such that both the mechanically active element and the second structural element are in contact and affixed to one of the substrates, the other substrate is removed leaving all structural elements disposed on a single substrate.

    摘要翻译： 公开了一种微机械装置和用于形成装置的方法，其中微机械装置具有横向可移动的机械有源元件，该元件具有与第二结构元件物理接触的静止位置。 该装置通过将机械有源元件设置在第一基板上并将第二结构元件设置在第二基板上而制造。 在两个基板对准和接合之后，使得机械有源元件和第二结构元件都接触并固定到一个基板，除去另一个基板，留下所有结构元件设置在单个基板上。

    MICROELECTROMECHANICAL SWITCHES FOR STEERING OF RF SIGNALS
    6.
    发明申请
    MICROELECTROMECHANICAL SWITCHES FOR STEERING OF RF SIGNALS 有权
    用于转向射频信号的微电子机电开关

    公开(公告)号：US20150206686A1

    公开(公告)日：2015-07-23

    申请号：US14161784

    申请日：2014-01-23

    申请人： Harris Corporation

    发明人： JOHN E. ROGERS

    IPC分类号： H01H59/00

    CPC分类号： H01H59/0009 ,  H01H2001/0078

    摘要： A switch includes a shuttle having an elongated length resiliently supported at opposing ends thereof and configured to move along a motion axis in response to an applied voltage. A shuttle switch portion includes a plurality of shuttle contact fingers extending transversely from opposing sides of the shuttle. A common contact at a common terminal side of the shuttle includes a plurality of contact fingers respectively interdigitated with the shuttle contact fingers. First and second terminal contacts are adjacent a switched terminal side of the shuttle, and include first terminal contact fingers and second terminal contact fingers respectively interdigitated with shuttle contact fingers. The shuttle switch portion is configured to selectively connect the common contact to the first terminal contact or the second terminal contact.

    摘要翻译： 开关包括具有在其相对端处弹性地支撑并且被配置为响应于施加的电压沿运动轴线移动的细长长度的梭子。 穿梭开关部分包括从梭子的相对侧横向延伸的多个穿梭接触指状物。 在梭子的共同终端侧的公共接触件包括分别与梭接触指状物交错指示的多个接触指状物。 第一和第二端子接触件邻近梭子的切换端子侧，并且包括第一端子接触指状物和第二端子接触指状物分别与梭式接触指状物交叉指向。 穿梭开关部分被配置为选择性地将公共接触件连接到第一端子触头或第二端子触头。

    ELECTROMECHANICAL SWITCHING DEVICE WITH 2D LAYERED MATERIAL SURFACES
    7.
    发明申请
    ELECTROMECHANICAL SWITCHING DEVICE WITH 2D LAYERED MATERIAL SURFACES 有权
    具有2D层状材料表面的电动切换装置

    公开(公告)号：US20150069472A1

    公开(公告)日：2015-03-12

    申请号：US14449177

    申请日：2014-08-01

    申请人： International Business Machines Corporation

    发明人： Michel Despont ,  Urs T. Duerig ,  Daniel Grogg ,  Armin W. Knoll ,  Elad Koren

    IPC分类号： H01L27/092 ,  B81B3/00

    CPC分类号： B81B3/0021 ,  B81B1/006 ,  H01H1/0094 ,  H01H1/021 ,  H01H1/027 ,  H01H1/50 ,  H01H2001/0052 ,  H01H2001/0078 ,  H01H2001/0084

    摘要： The present invention is notably directed to an electromechanical switching device having: two electrodes, including: a first electrode, having layers of a first 2D layered material, which layers exhibit a first surface; and a second electrode, having layers of a second 2D layered material, which layers exhibit a second surface vis-à-vis said first surface; and an actuation mechanism, where: each of the first and second 2D layered materials is electrically conducting; and at least one of said two electrodes is actuatable by the actuation mechanism to modify a distance between the first surface and the second surface, such as to modify an electrical conductivity transverse to each of the first surface and the second surface and thereby enable current modulation between the first electrode and the second electrode.

    摘要翻译： 本发明特别涉及一种机电开关装置，其具有：两个电极，包括：第一电极，具有第一2D层状材料的层，所述层呈现第一表面; 以及具有第二2D层状材料层的第二电极，所述层相对于所述第一表面呈现第二表面; 以及致动机构，其中：所述第一和第二2D分层材料中的每一个都是导电的; 并且所述两个电极中的至少一个可由所述致动机构致动以修改所述第一表面和所述第二表面之间的距离，例如改变横向于所述第一表面和所述第二表面中的每一个的导电性，从而使得能够进行电流调制 在第一电极和第二电极之间。

    NORMALLY CLOSED MICROMECHANICAL DEVICE COMPRISING A LATERALLY MOVABLE ELEMENT AND METHOD FOR FORMING
    9.
    发明申请
    NORMALLY CLOSED MICROMECHANICAL DEVICE COMPRISING A LATERALLY MOVABLE ELEMENT AND METHOD FOR FORMING 有权
    包含侧向移动元件的正常封闭式微机械装置及其形成方法

    公开(公告)号：US20140048395A1

    公开(公告)日：2014-02-20

    申请号：US13764424

    申请日：2013-02-11

    申请人： HT MICROANALYTICAL, INC.

    发明人： Todd Richard Christenson

    IPC分类号： B81B3/00

    CPC分类号： B81B3/0054 ,  H01H50/005 ,  H01H2001/0078 ,  H01H2050/007 ,  Y10T29/49826

    摘要： A micromechanical device and a method for forming the device is disclosed, wherein the micromechanical device has a laterally movable mechanically active element that has a quiescent position in which it is in physical contact with a second structural element. The device is fabricating by disposing the mechanically active element on a first substrate and disposing the second structural element on a second substrate. After the two substrates are aligned and joined such that both the mechanically active element and the second structural element are in contact and affixed to one of the substrates, the other substrate is removed leaving all structural elements disposed on a single substrate.

    摘要翻译： 公开了一种微机械装置和用于形成装置的方法，其中微机械装置具有横向可移动的机械有源元件，该元件具有与第二结构元件物理接触的静止位置。 该装置通过将机械有源元件设置在第一基板上并将第二结构元件设置在第二基板上而制造。 在两个基板对准和接合之后，使得机械有源元件和第二结构元件都接触并固定到一个基板，除去另一个基板，留下所有结构元件设置在单个基板上。

    MICROMECHANICAL ACTUATOR
    10.
    发明申请
    MICROMECHANICAL ACTUATOR 审中-公开
    微电子执行器

    公开(公告)号：US20110006874A1

    公开(公告)日：2011-01-13

    申请号：US12919618

    申请日：2009-02-23

    申请人： Mike Becker ,  Dietmar Lütke-Notarp ,  Klaus Froehner

    发明人： Mike Becker ,  Dietmar Lütke-Notarp ,  Klaus Froehner

    IPC分类号： H01H37/46 ,  H01L21/302 ,  H02N10/00

    CPC分类号： H01H61/04 ,  B81B2201/014 ,  B81B2201/031 ,  B81B2203/051 ,  B81C1/00682 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A micromechanical actuator includes a movable first spring element having metal and/or silicon. The first spring element is fitted at a first point and can move freely at a second point. A second spring element connected to the first spring element has silicon and is partially arranged on an electrically insulating material which is applied to a substrate. The second spring element is arranged at a distance from the substrate above the substrate on a first plane, and the first spring element is arranged above the second spring element on a second plane which is at a distance from the first plane such that the first and second spring elements can move with respect to the substrate. The actuator has a third spring element which is mechanically coupled to the first spring element. The elastic deformation of the second spring element can be induced by a length change of the third spring element.

    摘要翻译： 微机械致动器包括具有金属和/或硅的可移动的第一弹簧元件。 第一弹簧元件安装在第一点上，并可在第二点自由移动。 连接到第一弹簧元件的第二弹簧元件具有硅并且部分地布置在施加到基板的电绝缘材料上。 第二弹簧元件在第一平面上与衬底上方的基板一定距离设置，并且第一弹簧元件布置在第二平面上方的第二平面上，第二平面与第一平面成一定距离，使得第一和 第二弹簧元件可以相对于基底移动。 致动器具有机械地联接到第一弹簧元件的第三弹簧元件。 第二弹簧元件的弹性变形可以由第三弹簧元件的长度变化引起。