公开(公告)号：US06740159B2

公开(公告)日：2004-05-25

申请号：US10230232

申请日：2002-08-28

申请人： Joerg Kandler ,  Ewald Moersen ,  Burkhard Speit ,  Harry Bauer ,  Thure Boehm ,  Eric Eva ,  Michael Thier ,  Hexin Wang ,  Frank Richter ,  Hans-Josef Paus

发明人： Joerg Kandler ,  Ewald Moersen ,  Burkhard Speit ,  Harry Bauer ,  Thure Boehm ,  Eric Eva ,  Michael Thier ,  Hexin Wang ,  Frank Richter ,  Hans-Josef Paus

IPC分类号： C30B15804

CPC分类号： G02B1/02 ,  C30B11/00 ,  C30B29/12

摘要： A method of making a fracture-resistant large-size calcium fluoride single crystal is described, which is suitable for an optical component for radiation in the far UV range. The calcium fluoride raw material for the single crystal is first melted and subsequently solidified by cooling the melt to form a single crystal. However the calcium fluoride raw material is doped with from 1 to 250, preferably 1 to 100, ppm of strontium, preferably added as strontium fluoride, and contains from 1 to 10 ppm of sodium as well as up to 100 ppm of other impurities.

摘要翻译： 描述了制造耐断裂大尺寸氟化钙单晶的方法，其适用于在远紫外范围内用于辐射的光学部件。 首先将用于单晶的氟化钙原料熔化并随后通过冷却熔体而固化形成单晶。 然而，氟化钙原料掺杂有1至250，优选1至100ppm的锶，优选以氟化锶加入，并且含有1至10ppm的钠以及至多100ppm的其它杂质。

公开(公告)号：US06667839B2

公开(公告)日：2003-12-23

申请号：US10033670

申请日：2001-12-27

申请人： Jürgen Hartmaier ,  Dietrich Klaassen ,  Thure Boehm ,  Bernhard Wergl ,  Michael Gerhard ,  Jens Spanuth ,  Ralf Kuschnereit ,  Peter Vogt ,  Harry Bauer

发明人： Jürgen Hartmaier ,  Dietrich Klaassen ,  Thure Boehm ,  Bernhard Wergl ,  Michael Gerhard ,  Jens Spanuth ,  Ralf Kuschnereit ,  Peter Vogt ,  Harry Bauer

IPC分类号： G02B702

CPC分类号： C23C14/50 ,  C23C14/505

摘要： A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.

公开(公告)号：US08795839B2

公开(公告)日：2014-08-05

申请号：US12350474

申请日：2009-01-08

申请人： Thure Boehm

发明人： Thure Boehm

IPC分类号： G02B1/10 ,  B05D3/00 ,  B05D3/06 ,  B05D3/14 ,  B05D5/06 ,  B32B17/00 ,  G02B1/02

CPC分类号： G02B1/10 ,  G02B1/02 ,  G02B1/12 ,  G02B5/0891 ,  Y10T428/263 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.

摘要翻译： 一种用于修复具有涂层的光学元件的方法，其中涂层被完全或部分地去除或留在光学元件上，抛光层设置在涂层中或被施加的抛光层，其允许简单地处理表面以实现 高几何精度和较低的表面粗糙度。 将新的涂层施加到相应的抛光层上。 还涉及了相应的光学元件，包括根据该方法再循环的光学元件。

公开(公告)号：US20070024982A1

公开(公告)日：2007-02-01

申请号：US11423820

申请日：2006-06-13

申请人： Franz Stickel ,  Thure Boehm ,  Christoph Zaczek

发明人： Franz Stickel ,  Thure Boehm ,  Christoph Zaczek

IPC分类号： G02B3/00

CPC分类号： G03F7/70933 ,  G03F7/70341 ,  G03F7/70916

摘要： The invention relates to an imaging system of a microlithographic projection exposure apparatus, proposing improvements in the protection of exterior optical surfaces against contamination. In an imaging system with a projection objective that serves to project an image of a mask which can be set in position in an object plane onto a light-sensitive coating that can be set in position in an image plane, a membrane which is substantially transparent for an operating wavelength of the projection objective is arranged in such a way in relation to an exterior optical surface of the projection objective that between said optical surface and the membrane an interstitial space is formed which is designed to receive a liquid or gaseous medium.

摘要翻译： 本发明涉及一种微光刻投影曝光装置的成像系统，提出了防止外部光学表面防止污染的改进。 在具有投影物镜的成像系统中，该投影物镜用于将可以在物平面中的位置设置的掩模的图像投影到可被设置在图像平面中的适当位置的感光涂层上，所述膜基本上是透明的 因为投影物镜的工作波长相对于投影物镜的外部光学表面被布置成在所述光学表面和膜之间形成间隙空间，该间隙被设计成接收液体或气体介质。