Mercury vapor high-pressure discharge lamp and irradiation method,
particularly for mask pattern exposure of semiconductor wafers
    1.
    发明授权
    Mercury vapor high-pressure discharge lamp and irradiation method, particularly for mask pattern exposure of semiconductor wafers 失效
    汞蒸气高压放电灯和照射方法,特别适用于半导体晶片的掩模图案曝光

    公开(公告)号:US5650630A

    公开(公告)日:1997-07-22

    申请号:US410724

    申请日:1995-03-27

    摘要: To eliminate radiation from the mercury high-pressure discharge lamp of wlengths below 365 nm, the lamp includes a discharge vessel of quartz glass which is doped with vanadium in a quantity of up to about only 250 ppm, by weight, with respect to 1 mm of wall thickness of the quartz glass. This absorbed radiation also heats the quartz glass, so that the outside wall temperature of the vessel can be maintained between about 400.degree. and 950.degree. C. The effect can be enhanced by adding, additionally, titanium and/or tin to provide metal ions to the doping substance, in an overall quantity of up to 500 ppm, by weight. Alternatively, the quartz glass can be coated with TiO.sub.2 or SnO.sub.2. Suitable wall thicknesses for the discharge vessel are between 1 and 5 mm, and the fill therein is preferably mercury in a quantity of between 0.5 and 15 mg/cm.sup.3 and xenon with a cold fill pressure of 0.1 to 2.5 bar. Electrode spacing of the lamp is preferably between 2 and 5 mm. The vanadium portion preferably is less than 200 ppm and may, most desirably, be between 20 and 150 ppm, with respect to 1 mm wall thickness of the quartz glass of the discharge vessel.

    摘要翻译: 为了消除波长低于365nm的汞高压放电灯的辐射,该灯包括石英玻璃的放电容器,该放电容器掺杂有至少约250ppm重量的钒,相对于1mm 的石英玻璃的壁厚。 这种吸收的辐射也加热了石英玻璃,使得容器的外壁温度可以保持在约400℃和950℃之间。通过添加钛和/或锡以提供金属离子可以提高效果 该掺杂物质的总量高达500ppm重量。 或者,石英玻璃可以涂覆有TiO 2或SnO 2。 放电容器的合适的壁厚在1至5mm之间,并且其中的填充物优选为0.5至15mg / cm 3的水银,氙气的冷填充压力为0.1至2.5巴。 灯的电极间距优选为2〜5mm。 相对于放电容器的石英玻璃的1mm厚度,钒部分优选小于200ppm,并且最优选地在20和150ppm之间。

    Mercury-vapor high-pressure short-arc discharge lamp, and method and
apparatus for exposure of semiconductor wafers to radiation emitted
from said lamp
    2.
    发明授权
    Mercury-vapor high-pressure short-arc discharge lamp, and method and apparatus for exposure of semiconductor wafers to radiation emitted from said lamp 失效
    汞蒸汽高压短弧放电灯,以及用于将半导体晶片暴露于从所述灯发射的辐射的方法和装置

    公开(公告)号:US5608227A

    公开(公告)日:1997-03-04

    申请号:US517594

    申请日:1995-08-22

    摘要: To essentially eliminate short ultraviolet (UV) radiation from a mercury high-pressure short-arc discharge lamp, that is, wavelengths below the radiation band of 365 nm, the lamp includes a discharge vessel of quartz glass which is coated with a selectively reflective outer coating (2a) and, at the inside, with a selectively absorbing inner coating (2b). The outer coating (2a) is formed by a multi-layer interference reflection filter which preferentially reflects wavelengths between about 240 and 300 nm with a filter cut-off, corresponding to 50% transmission, in the wavelength region between about 290 and 330 nm. The inner coating (2b) is a titanium dioxide coating which, preferentially, absorbs radiation below about 250 nm, with a 50% transmission at about 240 nm. In accordance with a preferred feature of the invention, a radiation absorbing titanium dioxide/silicon dioxide mixed-layer coating (2c) is applied at the outside over the multi-layer interference reflection filter (2a). The outer absorbing coating preferentially absorbs radiation below about 280 nm. Preferably, the multi-layer interference reflection filter is formed by at least 8 alternating ZrO.sub.2 and SiO.sub.2 individual layers; all the coating layers preferably have thicknesses between about 30 and 50 nm.

    摘要翻译: 为了基本上消除来自汞高压短弧放电灯的短波长(UV)辐射,即波长低于365nm的辐射波长的波长,该灯包括石英玻璃的放电容器,该放电容器涂覆有选择性反射外壳 涂层(2a)和在内部具有选择性吸收内涂层(2b)。 外涂层(2a)由多层干涉反射滤光片形成,多层干涉反射滤光片在约290nm与330nm之间的波长范围内优先反射约240nm至300nm之间的波长,并具有对应于50%透射率的滤光片截止。 内涂层(2b)是二氧化钛涂层,其优选地吸收低于约250nm的辐射,在约240nm处具有50%透射率。 根据本发明的优选特征,在多层干涉反射滤光器(2a)的外部施加吸收辐射的二氧化钛/二氧化硅混合层涂层(2c)。 外部吸收涂层优先吸收低于约280nm的辐射。 优选地,多层干涉反射滤光器由至少8个交替的ZrO 2和SiO 2单独层形成; 所有涂层的厚度优选在约30和50nm之间。

    Electrode support tube for high pressure discharge lamp
    3.
    发明授权
    Electrode support tube for high pressure discharge lamp 失效
    电极支撑管用于高压放电灯

    公开(公告)号:US06262535B1

    公开(公告)日:2001-07-17

    申请号:US09290497

    申请日:1999-04-12

    IPC分类号: H01J1718

    CPC分类号: H01J61/0732 H01J61/366

    摘要: The high pressure lamp has a bulb (2) to which a neck (4, 4a, 4b) is joined. The transition region (6) between the bulb and the neck is conical. A support tube (5, 20, 25) surrounds a holding rod (10) for an electrode (11) within the bulb. The support tube is melt-connected to the neck, and conical with an inner end of the support tube having an outer diameter which is smaller than the outer diameter of the outer end of the support tube. The neck, likewise, is conical, and forms a transition region to the bulb, which is free from the support tube, so that the support tube is recessed within the transition region. This recess is between 3 and 25 mm and corresponds, at the most, to twice the outer diameter of the support tube at its inner end. The ratio of the outer diameter of the outer, or remote, end of the support tube (5, 20, 25) and the outer diameter of the inner, or proximate, end of the support tube is between 1.1 and 2.5.

    摘要翻译: 高压灯具有连接颈部(4,4a,4b)的灯泡(2)。 灯泡和颈部之间的过渡区域(6)是圆锥形的。 支撑管(5,20,25)包围用于灯泡内的电极(11)的保持杆(10)。 支撑管熔融连接到颈部,并且具有支撑管的内端的圆锥形的外径小于支撑管的外端的外径。 同样,颈部是圆锥形的,并且形成到灯泡的过渡区域,该过渡区域没有支撑管,使得支撑管线在过渡区域内凹入。 该凹陷在3至25mm之间,并且在其内端处最多对应于支撑管的外径的两倍。 支撑管(5,20,25)的外部或远端的外径与支撑管的内部或近端之间的外径之比在1.1和2.5之间。

    Double-ended high-pressure discharge lamp
    4.
    发明授权
    Double-ended high-pressure discharge lamp 失效
    双端高压放电灯

    公开(公告)号:US5304892A

    公开(公告)日:1994-04-19

    申请号:US766001

    申请日:1991-09-26

    IPC分类号: H01J9/32 H01J61/36

    CPC分类号: H01J61/366

    摘要: To permit high lamp currents to be applied to lamp electrodes (5, 6) of a discharge vessel (2) from which two elongated necks (3, 4) extend via current supply leads (23, 35), the discharge vessel is first made as a generally rotation-symmetrical element, to which tubular cylindrical neck tubes (17) are sealed. A cylindrical plug element (26, 40) is placed in the neck tube adjacent the discharge vessel. A subassembly is then made of a core element, which can be constructed as a single or a composite structure of quartz glass, for example by telescopically fitting quartz glass tubes over a central core, and melt-sealing the tubes and core together. Molybdenum disks (7, 8; 22) are placed against the end faces of the core element, and a plurality, for example four, molybdenum connecting foils (11-16, 27) are secured to the circumferences of the disks, to axially connect them together. The subassembly is then introduced into the neck tube through the plug element, a further quartz glass tube is placed over the current supply lead (23) and formed with a bulbous enlargement, which is sealed to the interior of the neck portion. The basic lamp structure is now complete. neck portion, with the core element and foil-connected disks therein is then flushed. After flushing, the disks, foils, and core element are all melt-sealed together within the neck tube and the bulbous portion of the quartz tube, together with the remaining portion of the neck tube, is severed.

    摘要翻译: 为了允许高的灯电流施加到放电容器(2)的灯电极(5,6),两个细长的颈部(3,4)通过电流供应引线(23,35)延伸,放电容器首先被制成 作为大致旋转对称的元件,管状圆柱形颈管(17)被密封。 圆柱形插塞元件(26,40)被放置在颈管中,邻近放电容器。 子组件然后由核心元件制成,其可以被构造为石英玻璃的单个或复合结构,例如通过将石英玻璃管可伸缩地安装在中心芯上,并将管和芯熔化在一起。 将钼盘(7,8; 22)放置在芯元件的端面上,并且多个(例如四个)钼连接箔(11-16,27)固定到盘的圆周上,以轴向连接 他们在一起 然后通过插塞元件将子组件引入颈管中,将另外的石英玻璃管放置在电流供应引线(23)上,并形成有球状放大体,其密封到颈部部分的内部。 基本的灯具结构现已完成。 然后将其中的芯元件和箔连接的盘冲洗。 在冲洗之后,盘,箔和芯元件都在颈管内熔化密封在一起,石英管的球根部分与颈管的剩余部分一起被切断。