公开(公告)号：US20140116134A1

公开(公告)日：2014-05-01

申请号：US14061970

申请日：2013-10-24

Applicant: Johannes Classen ,  Rolf Scheben

Inventor： Johannes Classen ,  Rolf Scheben

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: Micromechanical structure, in particular a yaw rate sensor having a substrate including a main plane of extent for detecting a first yaw rate about a first direction perpendicular to the main plane, a second yaw rate about a second direction parallel to the main plane, and a third yaw rate about a third direction parallel to the main plane and perpendicular to the second direction, includes a rotational oscillating element driven to rotational oscillation about a rotational axis parallel to the first direction. The micromechanical structure includes a yaw rate sensor configuration for detecting the first yaw rate that is completely surrounded by the rotational oscillating element in a plane parallel to the main plane. The micromechanical structure includes at least one first connection of the yaw rate sensor configuration on the rotational oscillating element, and at least one second connection of the yaw rate sensor configuration on the substrate.

Abstract translation: 微机械结构，特别是具有基板的偏航率传感器，该基板包括用于检测围绕垂直于主平面的第一方向的第一横摆率的扩展主平面，与主平面平行的第二方向的第二横摆率，以及 围绕平行于主平面并垂直于第二方向的第三方向的第三偏转速度包括绕平行于第一方向的旋转轴线旋转振荡的旋转振荡元件。 该微机械结构包括用于检测在与主平面平行的平面中由旋转振动元件完全包围的第一横摆角速度的偏航率传感器构造。 微机械结构包括旋转振动元件上的横摆率传感器构造的至少一个第一连接以及基板上的横摆率传感器构造的至少一个第二连接。

公开(公告)号：US20150052999A1

公开(公告)日：2015-02-26

申请号：US14467943

申请日：2014-08-25

Applicant: Rolf Scheben ,  Christoph Gauger ,  Markus Heitz

Inventor： Rolf Scheben ,  Christoph Gauger ,  Markus Heitz

IPC: G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5747 ,  G01C19/5769 ,  Y10T29/49

Abstract: A rotational rate sensor includes a substrate and a seismic mass situated thereon, and configured for detecting a rate of rotation about a rotation axis, the seismic mass having a second mass element coupled to a first mass element, which is drivable to a drive movement along a drive direction perpendicular to the rotation axis, the first and second mass element being deflectable along a detection direction essentially perpendicular to the drive direction and to the rotation axis, the rotational rate sensor having at least one compensating arrangement to produce a compensating force acting on the second mass element, the compensating force being oriented in a compensation direction essentially parallel to the detection direction, the at least one compensating arrangement being the only compensating arrangement and being configured exclusively to produce the compensating force oriented in the compensation direction, the rotational rate sensor being configured such that a quadrature offset force acting on the second mass element is directed exclusively in a preferred direction opposite and parallel to the compensation direction.

Abstract translation: 旋转速率传感器包括基板和位于其上的地震质量块，并且被构造成用于检测围绕旋转轴线的旋转速率，所述地震质量块具有耦合到第一质量元件的第二质量元件，所述第二质量元件可驱动成驱动运动 垂直于旋转轴的驱动方向，第一质量元件和第二质量元件沿着基本上垂直于驱动方向和旋转轴线的检测方向可偏转，所述转速传感器具有至少一个补偿装置，以产生作用于 第二质量元件，补偿力在与检测方向基本平行的补偿方向上定向，所述至少一个补偿装置是唯一的补偿装置，并且被构造成专门产生在补偿方向上定向的补偿力，转速 传感器被配置成使得正交关闭 作用在第二质量元件上的力仅在与补偿方向相反并平行的优选方向上引导。

公开(公告)号：US09255801B2

公开(公告)日：2016-02-09

申请号：US13922801

申请日：2013-06-20

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01P3/44 ,  G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/56 ,  G01C19/5747

Abstract: A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.

Abstract translation: 包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动 第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度 和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。 第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

公开(公告)号：US08875575B2

公开(公告)日：2014-11-04

申请号：US13134024

申请日：2011-05-25

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56 ,  G01C19/5755

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

Abstract translation: 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。

公开(公告)号：US08844357B2

公开(公告)日：2014-09-30

申请号：US13294752

申请日：2011-11-11

Applicant: Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

Inventor： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

Abstract translation: 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US20120152019A1

公开(公告)日：2012-06-21

申请号：US13305292

申请日：2011-11-28

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Abstract translation: 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

公开(公告)号：US08997566B2

公开(公告)日：2015-04-07

申请号：US13116821

申请日：2011-05-26

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.

Abstract translation: 描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利 用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于 振动。

公开(公告)号：US08943891B2

公开(公告)日：2015-02-03

申请号：US13365740

申请日：2012-02-03

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

Abstract translation: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸， 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

公开(公告)号：US20120125099A1

公开(公告)日：2012-05-24

申请号：US13294752

申请日：2011-11-11

Applicant: Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

Inventor： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

Abstract translation: 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US08783105B2

公开(公告)日：2014-07-22

申请号：US13305292

申请日：2011-11-28

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Abstract translation: 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。