Yaw-rate sensor
    1.
    发明授权
    Yaw-rate sensor 有权
    偏光率传感器

    公开(公告)号:US08943891B2

    公开(公告)日:2015-02-03

    申请号:US13365740

    申请日:2012-02-03

    IPC分类号: G01C19/56 G01C19/5747

    CPC分类号: G01C19/5747

    摘要: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

    摘要翻译: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法,所述偏航速率传感器具有具有主平面延伸的基板,偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件,所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件,所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件,第二轴线垂直于第一轴线定位,第一和第二轴线平行于主平面延伸, 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

    Yaw rate sensor
    2.
    发明授权
    Yaw rate sensor 有权
    偏航率传感器

    公开(公告)号:US08443668B2

    公开(公告)日:2013-05-21

    申请号:US12925750

    申请日:2010-10-27

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5747

    摘要: A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.

    摘要翻译: 描述了具有基板,第一科里奥利元件和第二科里奥利元件的偏航率传感器,第一科里奥利元件可由第一激励装置激发到第一振动,第二科里奥利元件可被第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接,并且所述弹簧结构还包括至少一个摇臂结构,所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

    Yaw rate sensor
    3.
    发明申请
    Yaw rate sensor 有权
    偏航率传感器

    公开(公告)号:US20110132087A1

    公开(公告)日:2011-06-09

    申请号:US12925750

    申请日:2010-10-27

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5747

    摘要: A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.

    摘要翻译: 描述了具有基板,第一科里奥利元件和第二科里奥利元件的偏航率传感器,第一科里奥利元件可由第一激励装置激发到第一振动,第二科里奥利元件可由第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接,并且所述弹簧结构还包括至少一个摇臂结构,所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

    YAW-RATE SENSOR
    4.
    发明申请
    YAW-RATE SENSOR 有权
    YAW-RATE传感器

    公开(公告)号:US20120247206A1

    公开(公告)日:2012-10-04

    申请号:US13365740

    申请日:2012-02-03

    IPC分类号: G01C19/00

    CPC分类号: G01C19/5747

    摘要: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

    摘要翻译: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法,所述偏航速率传感器具有具有主平面延伸的基板,偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件,所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件,所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件,第二轴线垂直于第一轴线定位,第一和第二轴线平行于主平面延伸, 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

    Coupling structure for a yaw rate sensor device, yaw rate sensor device, and method for the production thereof
    5.
    发明授权
    Coupling structure for a yaw rate sensor device, yaw rate sensor device, and method for the production thereof 有权
    用于偏航率传感器装置的耦合结构,横摆率传感器装置及其制造方法

    公开(公告)号:US08875574B2

    公开(公告)日:2014-11-04

    申请号:US13120276

    申请日:2009-08-05

    IPC分类号: G01C19/56 B23P11/00

    CPC分类号: G01C19/56 Y10T29/49826

    摘要: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

    摘要翻译: 一种用于旋转速率传感器装置的联接结构,具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架,所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件,每个角度元件具有至少一个第一分支和一个第二分支,并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置,旋转速率传感器装置,用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

    COUPLING STRUCTURE FOR A YAW RATE SENSOR DEVICE, YAW RATE SENSOR DEVICE, AND METHOD FOR THE PRODUCTION THEREOF
    6.
    发明申请
    COUPLING STRUCTURE FOR A YAW RATE SENSOR DEVICE, YAW RATE SENSOR DEVICE, AND METHOD FOR THE PRODUCTION THEREOF 有权
    YAW RATE传感器装置的耦合结构,YAW RATE传感器装置及其生产方法

    公开(公告)号:US20110283794A1

    公开(公告)日:2011-11-24

    申请号:US13120276

    申请日:2009-08-05

    IPC分类号: G01C19/56 B23P11/00

    CPC分类号: G01C19/56 Y10T29/49826

    摘要: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

    摘要翻译: 一种用于旋转速率传感器装置的联接结构,具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架,所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件,每个角度元件具有至少一个第一分支和一个第二分支,并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置,旋转速率传感器装置,用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

    Rotation rate sensor and method for operating a rotation rate sensor
    7.
    发明授权
    Rotation rate sensor and method for operating a rotation rate sensor 有权
    旋转速率传感器和操作旋转速度传感器的方法

    公开(公告)号:US08375787B2

    公开(公告)日:2013-02-19

    申请号:US12637171

    申请日:2009-12-14

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5755 G01C19/574

    摘要: A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.

    摘要翻译: 旋转速率传感器包括具有主延伸面的基板和可相对于基板移动的科里奥利元件,所述科里奥利元件被设置为可激发以执行基本上平行于主延伸平面的振荡偏转; 并且科里奥利元素进一步通过作用在科里奥利元件上的科里奥利力来提供偏转,以执行垂直于主延伸平面的可检测科里奥利偏转; 并且所述旋转速率传感器还包括至少一个补偿电极,所述至少一个补偿电极用于作为所述科里奥利元件的悬浮力的至少部分补偿作为所述振荡偏转的函数。

    MICROMECHANICAL COMPONENT AND METHOD FOR OSCILLATION EXCITATION OF AN OSCILLATION ELEMENT OF A MICROMECHANICAL COMPONENT
    9.
    发明申请

    公开(公告)号:US20100264997A1

    公开(公告)日:2010-10-21

    申请号:US12733079

    申请日:2008-07-02

    申请人: Robert Sattler

    发明人: Robert Sattler

    IPC分类号: H03B5/30

    摘要: A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.

    摘要翻译: 一种微机械部件和用于提供微机械部件的振荡元件的振荡激励的方法,所述微机械部件具有框架,所述框架通过外部悬挂元件连接到载体基板,所述框架可围绕第一轴线 并且围绕垂直于所述第一轴线定位的第二轴线振荡,并且所述微机械部件具有通过内部悬挂元件连接到所述框架并且可围绕所述第二轴线倾斜的振荡元件,所述外部悬挂元件为 其尺寸设计使得围绕第二轴线的框架的第一振荡和围绕第二轴线的振荡元件的第二振荡具有最大耦合。