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    TRANSPORT APPARATUS FOR ELONGATE SUBSTRATES
    2.
    发明申请
    TRANSPORT APPARATUS FOR ELONGATE SUBSTRATES 失效
    用于基底的运输装置

    公开(公告)号：US20090095215A1

    公开(公告)日：2009-04-16

    申请号：US12247250

    申请日：2008-10-08

    申请人： Johannes STRUEMPFEL ,  Reinhardt Bauer ,  Andreas Heisig ,  Andre Ulbricht ,  Steffen Goerke ,  Heiko Richter ,  Falk Schwerdtfeger

    发明人： Johannes STRUEMPFEL ,  Reinhardt Bauer ,  Andreas Heisig ,  Andre Ulbricht ,  Steffen Goerke ,  Heiko Richter ,  Falk Schwerdtfeger

    IPC分类号： B05C13/00

    CPC分类号： C23C14/50 ,  C23C14/56 ,  F27D3/026

    摘要： In a transport device for elongated substrates, especially in hot processes, which includes an essentially rectangular frame, formed by longitudinal and transverse spars connected to each other, in which at least three transverse spars are provided between two longitudinal spars, at least one transverse spar is made from a material, whose heat expansion coefficient differs from the heat expansion coefficient of the material of the other transverse spars or/and at least one transverse spar is connected force-free to at least one transverse support or/and at least one transverse spar is formed from an open profile.

    摘要翻译： 在用于细长基材的输送装置中，特别是在热过程中，其包括基本上矩形的框架，由彼此连接的纵向和横向翼梁形成，其中至少三个横向翼梁设置在两个纵向翼梁之间，至少一个横向翼梁 由材料制成，其热膨胀系数不同于其它横向翼梁的材料的热膨胀系数或/和至少一个横向翼梁与至少一个横向支撑件或/和至少一个横向支撑件无力连接 翼梁由敞开的轮廓形成。