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公开(公告)号：US4839679A
公开(公告)日：1989-06-13
申请号：US64151
申请日：1987-06-18
CPC分类号： G03B9/60 , G03B9/08 , G03B9/14 , G03F7/7055
摘要： A dual voice coil shutter is disclosed. The shutter mechanism is utilized in a stepper system, a laser system, or other carefully channeled light device to provide for opening and closing upon an optical path. The present invention is particularly useful for controlling passage of light hitting a photoresistive wafer through a reticle in a stepper system.The present invention provides a shutter type mechanism rotatably mounted about a common axis where the mechanism includes a pair of blades having a scissors-like arrangement adapted to simultaneously open and close upon an optical path. A voice type coil means is provided for each of the blades such that when a DC electrical current is applied to the coils, a rotation of the blades is effected about a single axis of rotation in a predetermined period of time. The rotation of the coils is coplanar. The present invention provides for net torque to the system that is in effect zero, which produces little or no mechanical operation in the rest of the structure which could otherwise cause inaccuracy in the mechanical positioning or delayed process time while waiting for oscillations to die out.
摘要翻译： 公开了一种双音圈快门。 快门机构用于步进系统，激光系统或其他小心引导的光装置，以提供光路上的打开和关闭。 本发明特别可用于控制在步进系统中通过掩模版击中光致抗蚀剂晶片的光的通过。 本发明提供了一种围绕公共轴线可旋转地安装的挡板式机构，其中该机构包括一对具有适于在光路上同时打开和关闭的剪刀状布置的刀片。 为每个叶片提供声音线圈装置，使得当直流电流施加到线圈时，叶片的旋转在预定时间段内围绕单个旋转轴进行。 线圈的旋转是共面的。 本发明提供了对系统的净扭矩，其实际上为零，这在结构的其余部分中产生很少的或没有机械操作，否则可能在等待振荡消失的同时引起机械定位或延迟的处理时间的不准确性。
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公开(公告)号：US4604562A
公开(公告)日：1986-08-05
申请号：US427716
申请日：1982-09-29
CPC分类号： G05B19/39 , G05B2219/37108 , G05B2219/45027
摘要： X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.
摘要翻译： X-Y位置测量装置与反馈控制的X-Y定位装置一起使用，用于响应于指示工件台的实际位置和期望位置的信号将工件台定位在期望的X-Y坐标位置。 归一化电路被用于指示工件台的实际位置的信号的增益校正。
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公开(公告)号：US4355272A
公开(公告)日：1982-10-19
申请号：US82485
申请日：1979-10-09
申请人： Lawrence A. Wise
发明人： Lawrence A. Wise
CPC分类号： G03F7/70558 , G03B9/10 , G03B9/58
摘要： A shutter is rotatably mounted in a housing for opening and closing a shutter aperture in the housing. The shutter is coupled to a drive unit for unidirectionally rotating the shutter with the same velocity profile to open and close the shutter aperture during each exposure period. This drive unit includes a drive motor and a control circuit having a source of position and velocity reference data and a feedback control loop configurable for either position or velocity control of the shutter as determined by a control command.
摘要翻译： 快门可旋转地安装在壳体中，用于打开和关闭壳体中的快门孔。 快门联接到驱动单元，用于以相同的速度分布单向旋转快门，以在每个曝光期间打开和关闭快门孔。 该驱动单元包括驱动电动机和具有位置和速度参考数据源的控制电路以及可配置用于通过控制命令确定的快门的位置或速度控制的反馈控制回路。
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公开(公告)号：US4328941A
公开(公告)日：1982-05-11
申请号：US83770
申请日：1979-10-11
CPC分类号： G03F7/70691 , F16F15/04 , F16M7/00 , G03F7/709 , G12B5/00
摘要： A shock and vibration isolation system having a plurality of isolators supporting a utilization device is disclosed. Each isolator has two gas driven pistons, pivotally mounted in a frame and is connected to an accumulator/controller that supplies controlled amounts of pressurized gas. A sensor in each isolator senses the position of the utilization device with respect to a base sitting on the ground, and the accumulator/controller adds gas to or exhausts gas from the pistons to counteract changes in position detected by the sensor. An electronic control circuit is connected between the sensor and the accumulator/controller to supply a properly compensated signal from the sensor to control the accumulator/controller.
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