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公开(公告)号：US07557932B2
公开(公告)日：2009-07-07
申请号：US11110338
申请日：2005-04-19
申请人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
发明人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC分类号： G01B9/02
CPC分类号： G02B26/001 , G02B26/0841
摘要： The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
摘要翻译： 本发明提供一种用于使用谐振技术来评估具有可变形和可偏转构件的微机电装置的质量的方法和装置。 具体地说，利用晶片级上的光学共振映射机构来检查以可变形和可偏转元件的均匀性为特征的产品质量。
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公开(公告)号：US20060245032A1
公开(公告)日：2006-11-02
申请号：US11110338
申请日：2005-04-19
申请人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
发明人： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G02B26/0841
摘要： The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
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公开(公告)号：US07483126B2
公开(公告)日：2009-01-27
申请号：US10875760
申请日：2004-06-23
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US20050286045A1
公开(公告)日：2005-12-29
申请号：US10875760
申请日：2004-06-23
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US20090190825A1
公开(公告)日：2009-07-30
申请号：US12360083
申请日：2009-01-26
申请人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
发明人： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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