Method for the preparation of high purity aluminum nitride
    3.
    发明授权
    Method for the preparation of high purity aluminum nitride 失效
    制备高纯度氮化铝的方法

    公开(公告)号:US5573742A

    公开(公告)日:1996-11-12

    申请号:US114691

    申请日:1987-10-29

    CPC classification number: C23C16/303 C01B21/072 C01P2006/80

    Abstract: A process and apparatus for making high purity aluminum nitride from organometallic aluminum, such as an alkylaluminum compound. A gaseous alkylaluminum compound and gaseous ammonia are introduced into a heated reaction zone where the gases are mixed and high purity aluminum nitride is produced. The high purity aluminum nitride is collected in the form of a powder or deposited as a thick, dense layer on an appropriate substrate mounted in the reaction chamber. A carrier gas such as hydrogen gas, may be used to conduct the alkylaluminum compound from a suitable reservoir containing liquid alkylaluminum compound to the reaction chamber. A preferred alkylaluminum compound is triethylaluminum.

    Abstract translation: 用于从有机金属铝制备高纯度氮化铝的方法和设备,例如烷基铝化合物。 将气态烷基铝化合物和气态氨引入加热的反应区,在这些气体中混合有气体,产生高纯氮化铝。 将高纯度氮化铝以粉末的形式收集,或者作为稠密的层沉积在安装在反应室中的合适的基材上。 诸如氢气的载气可用于将烷基铝化合物从含有液体烷基铝化合物的合适储存器导入反应室。 优选的烷基铝化合物是三乙基铝。

    Preparation of a high purity aluminum nitride antenna window by
organometallic pyrolysis
    7.
    发明授权
    Preparation of a high purity aluminum nitride antenna window by organometallic pyrolysis 失效
    通过有机金属热解制备高纯氮化铝天线窗

    公开(公告)号:US5356608A

    公开(公告)日:1994-10-18

    申请号:US336453

    申请日:1989-03-16

    CPC classification number: C23C16/303 C01B21/072 C01P2006/80

    Abstract: A process and apparatus for making high purity aluminum nitride from organometallic aluminum, such as an alkylaluminum compound. A gaseous alkylaluminum compound and gaseous ammonia are introduced into a heated reaction zone where the gases are mixed and high purity aluminum nitride is produced. The high purity aluminum nitride is collected in the form of a powder or deposited as a thick, dense layer on an appropriate substrate mounted in the reaction chamber. A carrier gas such as hydrogen gas, may be used to conduct the alkylaluminum compound from a suitable reservoir containing liquid alkylaluminum compound to the reaction chamber. A preferred alkylaluminum compound is triethylaluminum.

    Abstract translation: 用于从有机金属铝制备高纯度氮化铝的方法和设备,例如烷基铝化合物。 将气态烷基铝化合物和气态氨引入加热的反应区,在这些气体中混合有气体,产生高纯氮化铝。 将高纯度氮化铝以粉末的形式收集,或者作为稠密的层沉积在安装在反应室中的合适的基材上。 诸如氢气的载气可用于将烷基铝化合物从含有液体烷基铝化合物的合适储存器导入反应室。 优选的烷基铝化合物是三乙基铝。

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