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    Automated method of controlling critical dimensions of features by controlling stepper exposure dose, and system for accomplishing same
    1.
    发明授权
    Automated method of controlling critical dimensions of features by controlling stepper exposure dose, and system for accomplishing same 有权
    通过控制步进曝光剂量控制特征的关键尺寸的自动化方法，以及完成相同的系统

    公开(公告)号：US06632692B1

    公开(公告)日：2003-10-14

    申请号：US09758765

    申请日：2001-01-11

    申请人： Joyce S. Oey Hewett ,  Alexander J Pasadyn ,  Anthony J. Toprac

    发明人： Joyce S. Oey Hewett ,  Alexander J Pasadyn ,  Anthony J. Toprac

    IPC分类号： H01L2166

    CPC分类号： G03F7/70558 ,  G03F7/70625

    摘要： The present invention is directed to an automated method of controlling critical dimensions of features by controlling the stepper exposure dose, and a system for accomplishing same. In one embodiment, the method comprises measuring a critical dimension (FICD) of a plurality of features formed in a process layer, and providing the measured critical dimensions of the features to a controller that determines, based upon the measured critical dimensions, an exposure dose of an exposure process to be performed on at least one subsequently processed wafer. In another embodiment, the method comprises measuring a critical dimension (DICD) of a plurality of features formed in a patterned layer of photoresist, providing the measured critical dimensions of the features in the patterned layer of photoresist to a controller that determines, based upon the measured critical dimensions, an exposure dose of an exposure process to be performed on at least one subsequently processed wafer. In some embodiments, both the FICD measurements and the DICD measurements are used to determine the exposure dose.

    摘要翻译： 本发明涉及通过控制步进曝光剂量来控制特征的关键尺寸的自动化方法，以及用于实现其的系统。 在一个实施例中，该方法包括测量在处理层中形成的多个特征的临界尺寸（FICD），以及将特征的测量临界尺寸提供给控制器，所述控制器基于所测量的临界尺寸确定曝光剂量 在至少一个随后处理的晶片上进行曝光处理。 在另一个实施例中，该方法包括测量在光致抗蚀剂的图案化层中形成的多个特征的临界尺寸（DICD），将光刻胶图案化层中的特征的测量临界尺寸提供给控制器，该控制器基于 测量的临界尺寸，对至少一个随后处理的晶片进行曝光处理的曝光剂量。 在一些实施例中，FICD测量和DICD测量都用于确定曝光剂量

    Method for prioritizing production lots based on grade estimates and output requirements
    2.
    发明授权
    Method for prioritizing production lots based on grade estimates and output requirements 有权
    根据年龄估计和产出要求确定生产批次的方法

    公开(公告)号：US06699727B1

    公开(公告)日：2004-03-02

    申请号：US09821675

    申请日：2001-03-29

    申请人： Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Christopher A. Bode ,  Alexander J. Pasadyn ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    发明人： Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Christopher A. Bode ,  Alexander J. Pasadyn ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    IPC分类号： G01R3126

    CPC分类号： H01L22/20 ,  G05B19/418 ,  G05B2219/32194 ,  G05B2219/32263 ,  Y02P90/02 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/22

    摘要： A method for prioritizing production flow includes processing a plurality of manufactured items in a process flow; measuring characteristics of a plurality of manufactured items in the process flow; estimating performance grades for the plurality of manufactured items based on the measured characteristics; grouping the manufactured items with like estimated performance grades; assigning priorities to groups of manufactured items with like estimated performance grades; and directing the plurality of manufactured items through the process flow based on the assigned priorities. A manufacturing system includes a plurality of processing tools adapted to process a plurality of manufactured items in a process flow, a metrology tool, and a process control server. The metrology tool is adapted to measure characteristics of a plurality of manufactured items in the process flow. The process control server is adapted to estimate performance grades for the plurality of manufactured items based on the measured characteristics, group the manufactured items with like estimated performance grades, assign priorities to groups of manufactured items with like estimated performance grades, and direct the plurality of manufactured items through the process flow based on the assigned priorities.

    摘要翻译： 一种用于确定生产流程优先级的方法包括在处理流程中处理多个制造的物品; 测量处理流程中的多个制成品的特性; 基于所测量的特性来估计所述多个制造物品的性能等级; 对具有相似估计性能等级的制成品进行分组; 将优先事项分配给具有类似估计绩效等级的制成品组; 以及基于所分配的优先级，通过所述处理流程来引导所述多个制造的物品。 制造系统包括多个处理工具，其适用于处理流程中的多个制造物品，计量工具和过程控制服务器。 计量工具适于测量处理流程中的多个制造物品的特性。 过程控制服务器适于基于测量的特性来估计多个制造物品的性能等级，将具有相似估计性能等级的制造物品分组，将具有相似估计性能等级的制造商品组的优先级分配给多个 基于分配的优先级，通过流程流程制造出的物品。

    Method and apparatus for controlling process target values based on manufacturing metrics
    5.
    发明授权
    Method and apparatus for controlling process target values based on manufacturing metrics 失效
    基于制造指标控制过程目标值的方法和装置

    公开(公告)号：US06937914B1

    公开(公告)日：2005-08-30

    申请号：US09789872

    申请日：2001-02-21

    申请人： Christopher A. Bode ,  Thomas J. Sonderman ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Michael L. Miller

    发明人： Christopher A. Bode ,  Thomas J. Sonderman ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Michael L. Miller

    IPC分类号： G05B19/418 ,  G06F19/00

    CPC分类号： G05B19/41865 ,  G05B2219/32063 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/86

    摘要： A method for controlling a tool adapted to process workpieces in accordance with an operating recipe based on a process target value is provided. The method includes collecting manufacturing characteristic data associated with the workpieces; correlating the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces; and adjusting the process target value based on the first manufacturing metric distribution. A manufacturing system includes a processing tool and a target monitor. The processing tool is adapted to process workpieces in accordance with an operating recipe based on a process target value. The target monitor is adapted to collect manufacturing characteristic data associated with the workpieces, correlate the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.

    摘要翻译： 提供了一种用于控制适于根据基于过程目标值的操作配方来处理工件的工具的方法。 该方法包括收集与工件相关联的制造特性数据; 将所述制造特征数据与第一制造度量相关联，以产生所述工件的第一制造度量分布; 以及基于所述第一制造度量分布来调整所述过程目标值。 制造系统包括处理工具和目标监视器。 处理工具适于根据基于过程目标值的操作配方来处理工件。 目标监视器适于收集与工件相关联的制造特性数据，将制造特性数据与第一制造度量相关联，以产生工件的第一制造度量分布，并且基于第一制造度量分布来调整过程目标值。

    Method and apparatus for controlling a tool using a baseline control script
    6.
    发明授权
    Method and apparatus for controlling a tool using a baseline control script 有权
    使用基线控制脚本控制工具的方法和装置

    公开(公告)号：US06615098B1

    公开(公告)日：2003-09-02

    申请号：US09789871

    申请日：2001-02-21

    申请人： Christopher A. Bode ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    发明人： Christopher A. Bode ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    IPC分类号： G06F1760

    CPC分类号： G05B19/41865 ,  G05B19/0426 ,  G05B2219/32129 ,  G05B2219/36225 ,  G05B2219/45031 ,  Y02P90/20

    摘要： A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a control routine for the selected tool based on the tool type; and executing the control routine to generate a control action for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a control routine for the selected tool based on the tool type, and execute the control routine to generate a control action for the selected tool.

    摘要翻译： 一种用于控制制造系统的方法包括：处理多个工具中的工件; 为所述多个工具的所选择的工具启动基线控制脚本; 提供基线控制脚本的上下文信息; 基于上下文信息确定工具类型; 根据刀具类型选择所选刀具的控制程序; 以及执行所述控制程序以产生所选择的工具的控制动作。 制造系统包括适于处理工件的多个工具，控制执行管理器和控制执行器。 所述控制执行管理器适于启动用于所述多个工具的所选工具的基线控制脚本并提供所述基线控制脚本的上下文信息。 控制执行器适于执行基线控制脚本，基于上下文信息确定工具类型，基于工具类型选择所选刀具的控制程序，并执行控制程序以生成所选刀具的控制动作 。

    Method and apparatus for integrating multiple process controllers
    9.
    发明授权
    Method and apparatus for integrating multiple process controllers 失效
    用于集成多个过程控制器的方法和设备

    公开(公告)号：US06801817B1

    公开(公告)日：2004-10-05

    申请号：US09789140

    申请日：2001-02-20

    申请人： Christopher A. Bode ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    发明人： Christopher A. Bode ,  Alexander J. Pasadyn ,  Anthony J. Toprac ,  Joyce S. Oey Hewett ,  Anastasia Oshelski Peterson ,  Thomas J. Sonderman ,  Michael L. Miller

    IPC分类号： G06F1900

    CPC分类号： G05B19/41865 ,  G05B19/40937 ,  Y02P90/16 ,  Y02P90/20 ,  Y02P90/265

    摘要： A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a group of control routines for the selected tool based on the tool type; determining required control routines from the group of control routines based on the context information; and executing the required control routines to generate control actions for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a group of control routines for the selected tool based on the tool type, determine required control routines from the group of control routines based on the context information, and execute the required control routines to generate control actions for the selected tool.

    摘要翻译： 一种用于控制制造系统的方法包括：处理多个工具中的工件; 为所述多个工具的所选择的工具启动基线控制脚本; 提供基线控制脚本的上下文信息; 基于上下文信息确定工具类型; 基于所述工具类型为所选择的工具选择一组控制例程; 基于所述上下文信息来确定来自所述一组控制例程的所需控制例程; 并执行所需的控制例程以产生所选择的工具的控制动作。 制造系统包括适于处理工件的多个工具，控制执行管理器和控制执行器。 所述控制执行管理器适于启动用于所述多个工具的所选工具的基线控制脚本并提供所述基线控制脚本的上下文信息。 控制执行器适于执行基线控制脚本，基于上下文信息确定工具类型，基于工具类型为所选择的工具选择一组控制例程，从基于控制例程的组中确定所需的控制例程 上下文信息，并执行所需的控制例程以生成所选择的工具的控制动作。