公开(公告)号：US07339446B2

公开(公告)日：2008-03-04

申请号：US11153998

申请日：2005-06-16

申请人： Jun Su ,  Dong S. Shim ,  Oing Ma ,  Valluri R. Rao

发明人： Jun Su ,  Dong S. Shim ,  Oing Ma ,  Valluri R. Rao

IPC分类号： H03H7/01 ,  H03H2/00 ,  H03H1/00 ,  H04B1/40

CPC分类号： H03H7/0153 ,  B81B7/02 ,  B81B2201/018 ,  B81B2201/0271 ,  H01P1/203 ,  H03H7/1758 ,  H03H7/1766 ,  H03H7/1783 ,  H03H7/1791 ,  H03H2007/006 ,  H03H2007/013 ,  H03H2210/015

摘要： According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.

摘要翻译： 根据本发明的实施例，微机电系统（MEMS）元件将谐振器调谐到频率。

公开(公告)号：US06949268B2

公开(公告)日：2005-09-27

申请号：US10185399

申请日：2002-06-28

申请人： Li-Peng Wang ,  Dong S. Shim ,  Qing Ma

发明人： Li-Peng Wang ,  Dong S. Shim ,  Qing Ma

IPC分类号： H03H3/02 ,  H03H3/04 ,  H03H9/17 ,  B05D5/12

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H2003/0428 ,  H03H2003/0435

摘要： The frequency uniformity of a film bulk acoustic resonator may be improved by controlling the thickness across a wafer of one or more layers of the film bulk acoustic resonator. One or more layers of the film bulk acoustic resonator may be deposited in a way that irregularities in the deposition process from one die to another may be controlled.

摘要翻译： 通过控制薄膜体声波谐振器的一个或多个层的晶片上的厚度可以改善膜体声波谐振器的频率均匀性。 可以以使得可以控制从一个管芯到另一个管芯的沉积工艺中的不规则性的方式来沉积薄膜体声波谐振器的一个或多个层。

公开(公告)号：US07218188B2

公开(公告)日：2007-05-15

申请号：US11037307

申请日：2005-01-18

申请人： Qing Ma ,  Dong S. Shim

发明人： Qing Ma ,  Dong S. Shim

IPC分类号： H03H9/00

CPC分类号： H03H9/0542 ,  H03H9/02779 ,  H03H9/6403

摘要： Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

摘要翻译： 公开了用于表面声波（SAW）切换的微机电系统（MEMS）装置和方法。 该装置包括具有间隔开的输入和输出SAW换能器的压电基片。 MEMS开关布置在输入和输出SAW换能器之间MEMS开关具有与形成在基板上或上方的一个或多个致动电极电磁连通的可变形构件。 可变形构件可变形以机械地接触衬底以偏转或吸收由输入SAW换能器产生的SAW。

公开(公告)号：US06933808B2

公开(公告)日：2005-08-23

申请号：US10198503

申请日：2002-07-17

申请人： Qing Ma ,  Dong S. Shim

发明人： Qing Ma ,  Dong S. Shim

IPC分类号： B81B3/00 ,  H03H9/02 ,  H03H9/05 ,  H03H9/25 ,  H03H9/00

CPC分类号： H03H9/0542 ,  H03H9/02779 ,  H03H9/6403

摘要： Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

公开(公告)号：US06787970B2

公开(公告)日：2004-09-07

申请号：US10353276

申请日：2003-01-29

申请人： Dong S. Shim ,  Jose Maiz ,  Li-Peng Wang ,  Qing Ma ,  Valluri Rao

发明人： Dong S. Shim ,  Jose Maiz ,  Li-Peng Wang ,  Qing Ma ,  Valluri Rao

IPC分类号： H01L4104

CPC分类号： H03H9/105 ,  H03H9/174 ,  H03H2009/02173 ,  H03H2009/02181

摘要： Packaged film bulk acoustic resonators may be tuned after packaging by exposing them to irradiation. In one embodiment, transparent covers may be provided so that the film bulk acoustic resonator filter may be exposed to laser irradiation to either add or remove material from the filter and to thereby adjust its frequency.

摘要翻译： 封装膜体积声共振器可以通过将其暴露于照射而在包装之后被调整。 在一个实施例中，可以提供透明盖，使得膜体声波谐振器滤波器可以暴露于激光照射以从滤波器添加或去除材料，从而调节其频率。