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公开(公告)号：US08430476B2
公开(公告)日：2013-04-30
申请号：US13456977
申请日：2012-04-26
申请人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
发明人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
CPC分类号： B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.
摘要翻译： 一种液体排出头的制造方法，该喷液头具有由氮化硅构成的层和配置在由氮化硅构成的层的上方的具有喷出口形成部件的基板的液体排出头，具有排出液体的排出口。 该方法包括将作为排出口形成部件的感光层设置在由氮化硅制成的层上方，并通过将感光层曝光于i线而形成排出口。 由氮化硅制成的层对于波长为633nm的光具有2.05以上的折射率，并且在曝光中进行i线的照射。
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公开(公告)号：US20120206535A1
公开(公告)日：2012-08-16
申请号：US13456977
申请日：2012-04-26
申请人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
发明人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
IPC分类号： B41J2/015
CPC分类号： B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.
摘要翻译： 一种液体排出头的制造方法，该喷液头具有由氮化硅构成的层和配置在由氮化硅构成的层的上方的具有喷出口形成部件的基板的液体排出头，具有排出液体的排出口。 该方法包括将作为排出口形成部件的感光层设置在由氮化硅制成的层上方，并通过将感光层曝光于i线而形成排出口。 由氮化硅制成的层对于波长为633nm的光具有2.05以上的折射率，并且在曝光中进行i线的照射。
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公开(公告)号：US08187898B2
公开(公告)日：2012-05-29
申请号：US12339047
申请日：2008-12-19
申请人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
发明人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
IPC分类号： B41J2/16
CPC分类号： B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.
摘要翻译： 一种液体排出头的制造方法，该喷液头具有由氮化硅构成的层和配置在由氮化硅构成的层的上方的具有喷出口形成部件的基板的液体排出头，具有排出液体的排出口。 该方法包括将作为排出口形成部件的感光层设置在由氮化硅制成的层上方，并通过将感光层曝光于i线而形成排出口。 由氮化硅制成的层对于波长为633nm的光具有2.05以上的折射率，并且在曝光中进行i线的照射。
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公开(公告)号：US20100003773A1
公开(公告)日：2010-01-07
申请号：US12339047
申请日：2008-12-19
申请人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
发明人： Jun Yamamuro , Masaki Ohsumi , Masahisa Watanabe , Keiji Edamatsu
IPC分类号： H01L21/30
CPC分类号： B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head provided with a substrate which has a layer made of silicon nitride and with a discharge port forming member which is disposed above the layer made of silicon nitride and has a discharge port for discharging liquid. The method includes providing a photosensitive layer that is to be the discharge port forming member above the layer made of silicon nitride, and forming the discharge port by exposing the photosensitive layer to i-line. The layer made of silicon nitride has a refractive index of 2.05 or more to light of a wavelength of 633 nm and irradiation with the i-line is performed in the exposure.
摘要翻译： 一种液体排出头的制造方法，该喷液头具有由氮化硅构成的层和配置在由氮化硅构成的层的上方的具有喷出口形成部件的基板的液体排出头，具有排出液体的排出口。 该方法包括将作为排出口形成部件的感光层设置在由氮化硅制成的层上方，并通过将感光层曝光于i线而形成排出口。 由氮化硅制成的层对于波长为633nm的光具有2.05以上的折射率，并且在曝光中进行i线的照射。
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公开(公告)号：US07300596B2
公开(公告)日：2007-11-27
申请号：US11481796
申请日：2006-07-07
申请人： Hiroyuki Murayama , Shuji Koyama , Yoshinori Tagawa , Kenji Fujii , Masaki Ohsumi , Yoshinobu Urayama , Jun Yamamuro , Tsuyoshi Takahashi , Masahisa Watanabe
发明人： Hiroyuki Murayama , Shuji Koyama , Yoshinori Tagawa , Kenji Fujii , Masaki Ohsumi , Yoshinobu Urayama , Jun Yamamuro , Tsuyoshi Takahashi , Masahisa Watanabe
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/164 , B41J2/1645
摘要： The method of manufacturing a recording head has a flow path wall forming step of forming flow path walls on a substrate having energy generating elements formed thereon, an imbedded material depositing step of depositing an imbedded material between the flow path walls and on a top of each flow path wall, a flattening step of polishing a top of the deposited imbedded material, until the top of the flow path wall is exposed, and a step of forming an orifice plate on the tops of the polished imbedded material and the exposed flow path wall. In the step of forming the flow path walls, patterning of a close contact property improvement layer is simultaneously performed to improve a close contact property between the flow path wall and the substrate.
摘要翻译： 制造记录头的方法具有流路壁形成步骤，在其上形成有能量产生元件的基板上形成流路壁，嵌入材料沉积步骤，在流路壁之间和每个顶部上沉积嵌入材料 流动路径壁，抛光沉积的嵌入材料的顶部的平坦化步骤，直到流动路径壁的顶部被暴露，以及在抛光的嵌入材料的顶部上形成孔板的步骤和暴露的流动路径壁 。 在形成流路壁的步骤中，同时进行紧密接触性改善层的图案化，以改善流路壁和基板之间的紧密接触性。
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公开(公告)号：US07891784B2
公开(公告)日：2011-02-22
申请号：US12019505
申请日：2008-01-24
申请人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
发明人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
IPC分类号： B41J2/045
CPC分类号： B41J2/14129 , B41J2202/11 , Y10T29/49401
摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.
摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。
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公开(公告)号：US08128204B2
公开(公告)日：2012-03-06
申请号：US13009709
申请日：2011-01-19
申请人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
发明人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
CPC分类号： B41J2/14129 , B41J2202/11 , Y10T29/49401
摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.
摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。
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公开(公告)号：US20110107598A1
公开(公告)日：2011-05-12
申请号：US13009709
申请日：2011-01-19
申请人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
发明人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
IPC分类号： B21D53/76
CPC分类号： B41J2/14129 , B41J2202/11 , Y10T29/49401
摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.
摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。
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公开(公告)号：US20080180486A1
公开(公告)日：2008-07-31
申请号：US12019505
申请日：2008-01-24
申请人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
发明人： Noriyasu Ozaki , Junichi Kobayashi , Shuji Koyama , Tadanobu Nagami , Yoshinori Tagawa , Kenji Fujii , Hiroyuki Murayama , Masaki Ohsumi , Jun Yamamuro , Yoshinobu Urayama , Hiroyuki Abo , Takeshi Terada , Masahisa Watanabe , Taichi Yonemoto
CPC分类号： B41J2/14129 , B41J2202/11 , Y10T29/49401
摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.
摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。
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公开(公告)号：US20070017894A1
公开(公告)日：2007-01-25
申请号：US11481796
申请日：2006-07-07
申请人： Hiroyuki Murayama , Shuji Koyama , Yoshinori Tagawa , Kenji Fujii , Masaki Ohsumi , Yoshinobu Urayama , Jun Yamamuro , Tsuyoshi Takahashi , Masahisa Watanabe
发明人： Hiroyuki Murayama , Shuji Koyama , Yoshinori Tagawa , Kenji Fujii , Masaki Ohsumi , Yoshinobu Urayama , Jun Yamamuro , Tsuyoshi Takahashi , Masahisa Watanabe
IPC分类号： G11B5/127
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/164 , B41J2/1645
摘要： The method of manufacturing a recording head has a flow path wall forming step of forming flow path walls on a substrate having energy generating elements formed thereon, an imbedded material depositing step of depositing an imbedded material between the flow path walls and on a top of each flow path wall, a flattening step of polishing a top of the deposited imbedded material, until the top of the flow path wall is exposed, and a step of forming an orifice plate on the tops of the polished imbedded material and the exposed flow path wall. In the step of forming the flow path walls, patterning of a close contact property improvement layer is simultaneously performed to improve a close contact property between the flow path wall and the substrate.
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