公开(公告)号：US07393413B2

公开(公告)日：2008-07-01

申请号：US10547368

申请日：2004-03-05

申请人： Junji Kido ,  Noritaka Ishiyama ,  Daigo Aoki ,  Norikatsu Nakamura

发明人： Junji Kido ,  Noritaka Ishiyama ,  Daigo Aoki ,  Norikatsu Nakamura

IPC分类号： B05C5/00 ,  B05C13/02 ,  B05C3/02 ,  B05B3/00 ,  H02K41/00

CPC分类号： H01L51/0004 ,  H01L51/56 ,  Y02E10/549 ,  Y02P70/521

摘要： A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

摘要翻译： 涂覆装置10包括基座11，安装在基座11上并能够固定地支撑基板1的基板支撑台单元2，安装在基座11上并能够将涂层材料固定地放置到基板1上的涂覆单元3 支撑在基板支撑台单元2上的马达单元4和用于驱动基板支撑台单元2或涂覆单元3中的至少一个以在基座11上滑动的马达单元4。 马达单元3在基座11上具有定子组件22。 定子组件22包括多个磁体31，这些磁体直线地布置成使得磁体的相反的磁极性交替变化，以及一对磁体保持构件37和38，用于从磁体的两端线性地按压磁体31。

公开(公告)号：US20060162650A1

公开(公告)日：2006-07-27

申请号：US10547368

申请日：2004-03-05

申请人： Junji Kido ,  Noritaka Ishiyama ,  Daigo Aoki ,  Norikatsu Nakamura

发明人： Junji Kido ,  Noritaka Ishiyama ,  Daigo Aoki ,  Norikatsu Nakamura

IPC分类号： B05B13/02 ,  B05C5/00 ,  B05C11/00

CPC分类号： H01L51/0004 ,  H01L51/56 ,  Y02E10/549 ,  Y02P70/521

摘要： A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

摘要翻译： 涂覆装置10包括基座11，安装在基座11上并能够固定地支撑基板1的基板支撑台单元2，安装在基座11上并能够将涂层材料固定地放置到基板1上的涂覆单元3 支撑在基板支撑台单元2上的马达单元4和用于驱动基板支撑台单元2或涂覆单元3中的至少一个以在基座11上滑动的马达单元4。 马达单元3在基座11上具有定子组件22。 定子组件22包括多个磁体31，这些磁体直线地布置成使得磁体的相反的磁极性交替变化，以及一对磁体保持构件37和38，用于从磁体的两端线性地按压磁体31。

公开(公告)号：US20070218215A1

公开(公告)日：2007-09-20

申请号：US11717617

申请日：2007-03-14

申请人： Hiroki Sakata ,  Yusuke Uno ,  Norikatsu Nakamura

发明人： Hiroki Sakata ,  Yusuke Uno ,  Norikatsu Nakamura

IPC分类号： C23C16/24

CPC分类号： G02B5/223 ,  C03C23/006

摘要： The present invention provides a plasma processing method capable of being used for manufacturing color filters which are substantially free from defects such as white spots and color mixture of inks and color filters manufactured by using the same. A plasma processing device according to the present invention comprises a stage mainly acting also as a lower electrode; and a head electrode in which an upper electrode is stored and from which plasma raw material gas is ejected. By ejecting plasma raw material gas from the head electrode, applying voltage between the stage and the head electrode by an alternate power source to induce plasma electric discharge and by scanning over a workpiece material (glass substrate) by the head electrode, the workpiece material (glass substrate) is subjected to the plasma processing. When delivering the workpiece material (glass substrate) to the next process after the plasma processing has been completed, a lifting frame contacting with the periphery of the workpiece material (glass substrate) is used.

摘要翻译： 本发明提供了一种等离子体处理方法，其能够用于制造基本上没有诸如由其使用的油墨和滤色剂的白点和混色的缺陷的滤色器。 根据本发明的等离子体处理装置包括主要还用作下电极的台阶; 以及其中存储上电极并且等离子体原料气体从其喷出的头电极。 通过从头电极喷射等离子体原料气体，通过交替的电源在台架和头电极之间施加电压以引起等离子体放电，并通过头电极在工件材料（玻璃基板）上扫描，工件材料 玻璃基板）进行等离子体处理。 在等离子体处理完成之后将工件材料（玻璃基板）输送到下一工序时，使用与工件材料（玻璃基板）的周边接触的提升框架。

公开(公告)号：US07595462B2

公开(公告)日：2009-09-29

申请号：US11680683

申请日：2007-03-01

申请人： Yusuke Uno ,  Norikatsu Nakamura ,  Hiroki Sakata

发明人： Yusuke Uno ,  Norikatsu Nakamura ,  Hiroki Sakata

IPC分类号： B23K10/00

CPC分类号： H05H1/2406 ,  H05H2001/2418

摘要： A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material disposed to be continuously connected to at least processing starting and final end sides of the object. A process gas is introduced between the first and second electrodes under a state in which the first electrode abuts on entire surfaces of the object and the solid dielectric material, and a voltage is applied between the first and second electrodes to thereby process the object by plasma discharge generated between the first and second electrodes while moving the second electrode relatively to the first electrode and the object.

摘要翻译： 通过使用等离子体处理装置进行等离子体处理，该等离子体处理装置包括第一电极和第二电极，第一电极和第二电极相对移动到第一电极，待处理对象设置在第一电极之间，并且固体电介质材料被设置成至少连续地连接 处理对象的起始端和最终端。 在第一电极邻接物体和固体电介质的整个表面的状态下，在第一和第二电极之间引入工艺气体，并且在第一和第二电极之间施加电压，从而通过等离子体处理物体 同时相对于第一电极和物体移动第二电极，在第一和第二电极之间产生放电。

公开(公告)号：US20050168140A1

公开(公告)日：2005-08-04

申请号：US10513229

申请日：2003-05-06

申请人： Norikatsu Nakamura ,  Yoshihiro Kobayashi

发明人： Norikatsu Nakamura ,  Yoshihiro Kobayashi

IPC分类号： B01J35/02 ,  C09K11/06 ,  H01L51/50 ,  H05B33/10 ,  H05B33/14 ,  H05B33/22 ,  H01J1/62 ,  H01J63/04

CPC分类号： H05B33/14 ,  C09K11/06 ,  C09K2211/1416 ,  C09K2211/1433 ,  C09K2211/1458 ,  C09K2211/182 ,  C09K2211/186 ,  H01L27/3283 ,  H05B33/22

摘要： A main object of the present invention is to provide an EL element in which an inconvenience, resulting from uneven film thickness or generation of small clearances at a boundary in between layers due to a liquid repellent treatment, is prevented. In order to achieve the object, the present invention provides an electroluminescent element comprising: a substrate having at least a first electrode layer; an insulating layer formed so as to cover an edge portion of the first electrode layer; a liquid repellent portion provided on an upper surface of the insulating layer; alight emitting layer formed in a pattern on the first electrode layer; and a second electrode layer formed on the light emitting layer.

摘要翻译： 本发明的主要目的是提供一种EL元件，其中防止了由于不均匀的膜厚度而导致的不便，或者由于防液性处理而在层之间的边界产生小的间隙。 为了实现该目的，本发明提供一种电致发光元件，其包括：具有至少第一电极层的基板; 形成为覆盖所述第一电极层的边缘部的绝缘层; 设置在所述绝缘层的上表面上的防液部分; 在第一电极层上以图案形成的发光层; 以及形成在发光层上的第二电极层。

公开(公告)号：US07183023B2

公开(公告)日：2007-02-27

申请号：US10408473

申请日：2003-04-07

申请人： Akio Sonehara ,  Hironori Kobayashi ,  Norikatsu Nakamura

发明人： Akio Sonehara ,  Hironori Kobayashi ,  Norikatsu Nakamura

IPC分类号： G02B5/20 ,  G02F1/1335 ,  B41J2/01

CPC分类号： G02B5/223 ,  G02B5/201 ,  G02F1/133516

摘要： The main object of the present invention is to provide a method for manufacturing a color filter, capable of having the surface of the pixel part flatly even in the case a pixel part is formed by an ink discharging method, and the thickness of each pixel part evenly. In order to achieve the above-mentioned object, the present invention provides a method for manufacturing a color filter comprising at least a pixel part forming process of forming a pixel part of a plurality of colors in a predetermined pattern by adhering an ink on a transparent substrate by a discharging method, and the convex pixel part is formed in the pixel part forming process, wherein a pixel part flattening process of flattening the convex pixel part is executed after the pixel part forming process.

公开(公告)号：US08084080B2

公开(公告)日：2011-12-27

申请号：US11680743

申请日：2007-03-01

申请人： Yusuke Uno ,  Norikatsu Nakamura ,  Hiroki Sakata

发明人： Yusuke Uno ,  Norikatsu Nakamura ,  Hiroki Sakata

IPC分类号： B05D5/12

CPC分类号： H01J37/32623 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2418

摘要： A plasma processing is performed by providing a first and a second electrodes to be relatively parallelly movable, disposing an object to be processed on the second electrode so as to face the first electrode and providing a blocking member to both end portions of the second electrode, so that a plasma processing space is blocked by the blocking member when the first and second electrodes are moved relatively with each other. A voltage is applied to both the first and the second electrodes and a process gas is introduced into the plasma processing space formed between the first and second electrodes, and the plasma is irradiated to the object. The blocking member is provided so as to extend from the second electrode to the first electrode, and an upper surface of the blocking member is raised higher than a surface level of the object to be processed.

摘要翻译： 通过提供相对平行移动的第一和第二电极来执行等离子体处理，将待处理物体设置在第二电极上以面对第一电极并且将阻挡构件提供给第二电极的两端部， 使得当第一和第二电极彼此相对移动时，阻挡构件阻挡等离子体处理空间。 对第一和​​第二电极施加电压，并且将处理气体引入到形成在第一和第二电极之间的等离子体处理空间中，并且等离子体被照射到物体上。 阻挡构件被设置成从第二电极延伸到第一电极，并且阻挡构件的上表面比待处理物体的表面水平高。

公开(公告)号：US07557500B2

公开(公告)日：2009-07-07

申请号：US10513229

申请日：2003-05-06

申请人： Norikatsu Nakamura ,  Yoshihiro Kobayashi

发明人： Norikatsu Nakamura ,  Yoshihiro Kobayashi

IPC分类号： H01J1/62 ,  G02F1/335 ,  H05B33/10

CPC分类号： H05B33/14 ,  C09K11/06 ,  C09K2211/1416 ,  C09K2211/1433 ,  C09K2211/1458 ,  C09K2211/182 ,  C09K2211/186 ,  H01L27/3283 ,  H05B33/22

摘要： A main object of the present invention is to provide an EL element in which an inconvenience, resulting from uneven film thickness or generation of small clearances at a boundary in between layers due to a liquid repellent treatment, is prevented.In order to achieve the object, the present invention provides an electroluminescent element comprising: a substrate having at least a first electrode layer; an insulating layer formed so as to cover an edge portion of the first electrode layer; a liquid repellent portion provided on an upper surface of the insulating layer; alight emitting layer formed in a pattern on the first electrode layer; and a second electrode layer formed on the light emitting layer.

摘要翻译： 本发明的主要目的是提供一种EL元件，其中防止了由于不均匀的膜厚度而导致的不便，或者由于防液性处理而在层之间的边界产生小的间隙。 为了实现该目的，本发明提供一种电致发光元件，其包括：具有至少第一电极层的基板; 形成为覆盖所述第一电极层的边缘部的绝缘层; 设置在所述绝缘层的上表面上的防液部分; 在第一电极层上以图案形成的发光层; 以及形成在发光层上的第二电极层。

公开(公告)号：US20070184364A1

公开(公告)日：2007-08-09

申请号：US11654856

申请日：2007-01-18

申请人： Akio Sonehara ,  Hironori Kobayashi ,  Norikatsu Nakamura

发明人： Akio Sonehara ,  Hironori Kobayashi ,  Norikatsu Nakamura

IPC分类号： G02B5/20

CPC分类号： G02B5/223 ,  G02B5/201 ,  G02F1/133516

摘要： The main object of the present invention is to provide a method for manufacturing a color filter, capable of having the surface of the pixel part flatly even in the case a pixel part is formed by an ink discharging method, and the thickness of each pixel part evenly. In order to achieve the above-mentioned object, the present invention provides a method for manufacturing a color filter comprising at least a pixel part forming process of forming a pixel part of a plurality of colors in a predetermined pattern by adhering an ink on a transparent substrate by a discharging method, and the convex pixel part is formed in the pixel part forming process, wherein a pixel part flattening process of flattening the convex pixel part is executed after the pixel part forming process.

摘要翻译： 本发明的主要目的在于提供一种制造滤色器的方法，即使在通过喷墨方法形成像素部分的情况下，也可以使像素部分的表面平坦，并且每个像素部分的厚度 均匀 为了实现上述目的，本发明提供了一种制造滤色器的方法，该方法至少包括一个像素部分形成工艺，该工艺通过将墨水粘附到透明的方式上来形成预定图案中的多种颜色的像素部分 通过放电方法形成衬底，并且在像素部分形成处理中形成凸起像素部分，其中在像素部分形成处理之后执行使凸起像素部分平坦化的像素部分平坦化处理。