公开(公告)号：US10580737B2

公开(公告)日：2020-03-03

申请号：US16399034

申请日：2019-04-30

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hisao Miyazaki ,  Tadashi Sakai ,  Yasutaka Nishida ,  Takashi Yoshida ,  Yuichi Yamazaki ,  Masayuki Katagiri ,  Naoshi Sakuma

IPC: H01L23/532 ,  H01L23/522 ,  H01L21/3205 ,  H01L21/3213 ,  H01L21/768 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L27/11582

Abstract: A graphene wiring structure of an embodiment has: an amorphous or polycrystalline insulating film; and a multilayer graphene on the insulating film. The multilayer graphene including a plurality of graphene crystals having a zigzag direction is oriented at 17 degrees or less with respect to an electric conduction direction on the insulating film.

公开(公告)号：US20190259707A1

公开(公告)日：2019-08-22

申请号：US16399034

申请日：2019-04-30

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hisao MIYAZAKI ,  Tadashi Sakai ,  Yasutaka Nishida ,  Takashi Yoshida ,  Yuichi Yamazaki ,  Masayuki Katagiri ,  Naoshi Sakuma

IPC: H01L23/532 ,  H01L21/3213 ,  H01L21/768 ,  H01L21/3205 ,  H01L23/522

Abstract: A graphene wiring structure of an embodiment has: an amorphous or polycrystalline insulating film; and a multilayer graphene on the insulating film. The multilayer graphene including a plurality of graphene crystals having a zigzag direction is oriented at 17 degrees or less with respect to an electric conduction direction on the insulating film.

公开(公告)号：US10325851B2

公开(公告)日：2019-06-18

申请号：US15691257

申请日：2017-08-30

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hisao Miyazaki ,  Tadashi Sakai ,  Yasutaka Nishida ,  Takashi Yoshida ,  Yuichi Yamazaki ,  Masayuki Katagiri ,  Naoshi Sakuma

IPC: H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L21/3205 ,  H01L21/3213 ,  H01L27/1157 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/11582

Abstract: A graphene wiring structure of an embodiment has: an amorphous or polycrystalline insulating film; and a multilayer graphene on the insulating film. The multilayer graphene including a plurality of graphene crystals having a zigzag direction is oriented at 17 degrees or less with respect to an electric conduction direction on the insulating film.

公开(公告)号：US09419152B2

公开(公告)日：2016-08-16

申请号：US13771712

申请日：2013-02-20

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Katsuyuki Naito ,  Norihiro Yoshinaga ,  Shigeru Matake ,  Yoshihiro Akasaka ,  Takashi Yoshida

IPC: H01L31/0224 ,  H01L21/02 ,  H01L31/0749 ,  H01L51/44 ,  H01L31/18

CPC classification number: H01L31/022425 ,  H01L21/02 ,  H01L31/022466 ,  H01L31/0749 ,  H01L51/442 ,  Y02E10/541 ,  Y02E10/542 ,  Y02E10/549

Abstract: A carbon electrode of an embodiment includes: a graphene having a graphene skeleton, carbon atoms in the graphene skeleton being partially substituted by a nitrogen atom, wherein the graphene contains an oxygen atom, and the carbon electrode is doped with a cation.

Abstract translation: 一个实施方案的碳电极包括：具有石墨烯骨架的石墨烯，石墨烯骨架中的碳原子被氮原子部分取代，其中所述石墨烯含有氧原子，并且所述碳电极掺杂有阳离子。

公开(公告)号：US20130255763A1

公开(公告)日：2013-10-03

申请号：US13771712

申请日：2013-02-20

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Katsuyuki Naito ,  Norihiro Yoshinaga ,  Shigeru Matake ,  Yoshihiro Akasaka ,  Takashi Yoshida

IPC: H01L31/0224 ,  H01L21/02

CPC classification number: H01L31/022425 ,  H01L21/02 ,  H01L31/022466 ,  H01L31/0749 ,  H01L51/442 ,  Y02E10/541 ,  Y02E10/542 ,  Y02E10/549

Abstract: A carbon electrode of an embodiment includes: a graphene having a graphene skeleton, carbon atoms in the graphene skeleton being partially substituted by a nitrogen atom, wherein the graphene contains an oxygen atom, and the carbon electrode is doped with a cation.

Abstract translation: 一个实施方案的碳电极包括：具有石墨烯骨架的石墨烯，石墨烯骨架中的碳原子被氮原子部分取代，其中所述石墨烯含有氧原子，并且所述碳电极掺杂有阳离子。