公开(公告)号：US20230377828A1

公开(公告)日：2023-11-23

申请号：US18168167

申请日：2023-02-13

申请人： KABUSHIKI KAISHA TOSHIBA ,  TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION

发明人： Hisao MIYAZAKI ,  Hisashi YOSHIDA ,  Shigeya KIMURA

IPC分类号： H01J37/077 ,  H01J37/32

CPC分类号： H01J37/077 ,  H01J37/3244 ,  H01J2237/06366

摘要： According to one embodiment, an electron source includes a base body and a first cathode layer. The first cathode layer includes a first diamond layer including a plurality of first polycrystalline diamonds, and a first member including a first element. At least a part of the first diamond layer is located between the base body and the first member. The first element includes at least one selected from the group consisting of Pd, Ni, Co, W, Mo, Ir and Ru.

公开(公告)号：US20220139660A1

公开(公告)日：2022-05-05

申请号：US17401823

申请日：2021-08-13

申请人： KABUSHIKI KAISHA TOSHIBA ,  TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION

发明人： Shigeya KIMURA ,  Hisashi YOSHIDA ,  Hisao MIYAZAKI ,  Hiroshi TOMITA ,  Souichi UENO ,  Takeshi HOSHI

IPC分类号： H01J1/308

摘要： According to one embodiment, an electron emitting element includes a first region, a second region, and a third region. The first region includes a semiconductor including a first element of an n-type impurity. The second region includes diamond. The diamond includes a second element including at least one selected from the group consisting of nitrogen, phosphorous, arsenic, antimony, and bismuth. The third region is provided between the first region and the second region. The third region includes Alx1Ga1-x1N (0

公开(公告)号：US20210384328A1

公开(公告)日：2021-12-09

申请号：US17142298

申请日：2021-01-06

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Hisashi YOSHIDA ,  Hisao MIYAZAKI ,  Shigeya KIMURA

IPC分类号： H01L29/73 ,  H01L29/16 ,  H01L29/20 ,  H01L27/06

摘要： According to one embodiment, a power generation element includes a first conductive layer, a second conductive layer, and a first member. The first member is provided between the first conductive layer and the second conductive layer. The first member includes a first semiconductor having polarity. A gap is between the second conductive layer and the first member. A direction of the first semiconductor is oblique to a first direction from the first conductive layer toward the second conductive layer.

公开(公告)号：US20140284800A1

公开(公告)日：2014-09-25

申请号：US14202162

申请日：2014-03-10

申请人： Kabushiki Kaisha Toshiba

发明人： Hisao MIYAZAKI ,  Tadashi SAKAI ,  Masayuki KATAGIRI ,  Yuichi YAMAZAKI ,  Naoshi SAKUMA ,  Mariko SUZUKI

IPC分类号： H01L23/532

CPC分类号： H01L23/53276 ,  H01L2924/0002 ,  H01L2924/00

摘要： A graphene wiring has a substrate, a catalyst layer on the substrate, a graphene layer on the catalyst layer, and a dopant layer on a side surface of the graphene layer. An atomic or molecular species is intercalated in the graphene layer or disposed on the graphene layer.

摘要翻译： 石墨烯布线具有衬底，衬底上的催化剂层，催化剂层上的石墨烯层和石墨烯层的侧表面上的掺杂剂层。 原子或分子物质插入在石墨烯层中或设置在石墨烯层上。

公开(公告)号：US20140284799A1

公开(公告)日：2014-09-25

申请号：US14202017

申请日：2014-03-10

申请人： Kabushiki Kaisha Toshiba

发明人： Masayuki KATAGIRI ,  Tadashi SAKAI ,  Hisao MIYAZAKI ,  Yuichi YAMAZAKI ,  Mariko SUZUKI

IPC分类号： H01L23/532 ,  H01L21/285

CPC分类号： H01L23/53276 ,  H01L21/76834 ,  H01L21/76849 ,  H01L21/76877 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device has a substrate a lower layer wiring on the substrate, an interlayer dielectric on the lower layer wiring having a contact hole, a catalyst metal layer at the bottom of the contact hole having catalyst metal particles, multi-walled carbon nanotubes on the catalyst metal layer passing through the contact hole, and an upper layer wiring on the multi-walled carbon nanotubes. The multi-walled carbon nanotubes are intercalated with an atomic or molecular species.

摘要翻译： 半导体器件具有基板，在基板上具有下层布线，下层布线上的层间电介质具有接触孔，接触孔底部的催化剂金属层具有催化剂金属颗粒，多壁碳纳米管 穿过接触孔的催化剂金属层和多壁碳纳米管上的上层布线。 多壁碳纳米管插入原子或分子种类。

公开(公告)号：US20230053887A1

公开(公告)日：2023-02-23

申请号：US17864866

申请日：2022-07-14

申请人： KABUSHIKI KAISHA TOSHIBA ,  TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION

发明人： Hisao MIYAZAKI ,  Hisashi YOSHIDA ,  Shigeya KIMURA ,  Toshiaki MATSUMOTO ,  Takaaki MURATA ,  Ryota SUGANUMA

IPC分类号： H01J17/06

摘要： According to one embodiment, a plasma source includes a container being configured to store a gas, a cathode member, and an anode member. The cathode member is provided in the container. The cathode member includes a plurality of first cathode layers. Each the cathode layers are arranged along a plurality of sides of a polygon. Each of the first cathode layers includes a first surface facing inside the polygon. The first surface is planar. The anode member is provided in the container.

公开(公告)号：US20220181112A1

公开(公告)日：2022-06-09

申请号：US17373565

申请日：2021-07-12

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Hisashi YOSHIDA ,  Hisao MIYAZAKI ,  Shigeya KIMURA

IPC分类号： H01J23/05 ,  H01J25/50

摘要： According to one embodiment, an electron-emitting electrode includes a first member, a first diamond member, and a second diamond member. A surface of the first member includes a first region and a second region. The first diamond member is provided at the first region. The first diamond member includes a first element that includes at least one of nitrogen, phosphorus, arsenic, antimony, and bismuth. The second diamond member is provided at the second region. The second diamond member includes a second element that includes at least one of boron, aluminum, gallium, and indium.

公开(公告)号：US20180012846A1

公开(公告)日：2018-01-11

申请号：US15446244

申请日：2017-03-01

申请人： Kabushiki Kaisha Toshiba

发明人： Hisao MIYAZAKI ,  Takashi YOSHIDA ,  Masayuki KATAGIRI ,  Yuichi YAMAZAKI ,  Tadashi SAKAI

IPC分类号： H01L23/532

CPC分类号： H01L23/53276 ,  H01L23/53295

摘要： A graphene structure of an embodiment includes multilayer graphene laminated with graphene sheets, and a first interlayer material being present between the graphene sheets of the multilayer graphene and containing a multimer of molybdenum oxide.

公开(公告)号：US20160086891A1

公开(公告)日：2016-03-24

申请号：US14842249

申请日：2015-09-01

申请人： Kabushiki Kaisha Toshiba

发明人： Hisao MIYAZAKI ,  Tadashi SAKAI ,  Yuichi YAMAZAKI ,  Masayuki KATAGIRI

IPC分类号： H01L23/532 ,  H01L21/3205 ,  H01L23/528

CPC分类号： H01L23/53276 ,  H01L21/76834 ,  H01L21/76838 ,  H01L2924/0002 ,  H01L2924/00

摘要： Graphene wiring of an embodiment has a graphene intercalation compound including a multilayer graphene having graphene sheets stacked therein and an interlayer substance disposed between layers of the multilayer graphene, and an interlayer cross-linked layer connected to a side surface of the multilayer graphene. The interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene.

摘要翻译： 实施例的石墨烯布线具有石墨烯插层化合物，其包括层叠有石墨烯片的多层石墨烯和设置在多层石墨烯的层之间的层间物质，以及连接到多层石墨烯的侧表面的层间交联层。 层间交联层具有包含交联多层石墨烯中所含的石墨烯片的多个键合分子的交联分子结构。

公开(公告)号：US20140284798A1

公开(公告)日：2014-09-25

申请号：US14202013

申请日：2014-03-10

申请人： Kabushiki Kaisha Toshiba

发明人： Hisao MIYAZAKI ,  Tadashi Sakai ,  Masayuki Katagiri ,  Yuichi Yamazaki ,  Mariko Suzuki

IPC分类号： H01L23/532 ,  H01L21/285

CPC分类号： H01L23/53276 ,  H01L2924/0002 ,  H01L2924/00

摘要： A graphene wiring has a substrate a catalyst layer on the substrate a first graphene sheet layer on the catalyst layer and a second graphene sheet layer on the first graphene layer. The second graphene layer comprises multilayer graphene sheets. The multilayer graphene sheets are intercalated with an atomic or molecular species.

摘要翻译： 石墨烯布线在衬底上具有催化剂层，催化剂层在催化剂层上的第一石墨烯片层和第一石墨烯层上的第二石墨烯片层。 第二石墨烯层包括多层石墨烯片。 多层石墨烯片被插入原子或分子物质。