公开(公告)号：US09612108B2

公开(公告)日：2017-04-04

申请号：US14657209

申请日：2015-03-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Toru Mikami

IPC: G01B11/16 ,  G01B11/02 ,  G01J3/44 ,  G01J3/02 ,  G01N21/95 ,  G01N21/956 ,  G01J3/28

CPC classification number: G01B11/02 ,  G01J3/0264 ,  G01J3/4412 ,  G01J2003/284 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/95615

Abstract: In accordance with an embodiment, a measurement apparatus includes a library creation unit, a spectral profile acquiring unit, and a measurement unit. The library creation unit creates a library in which a layer stack model is matched to a theoretical profile regarding a pattern of stacked layers. The spectral profile acquiring unit acquires an actual measured profile by applying light to a measurement target pattern obtained when the pattern is actually created. The measurement unit measures the sectional shape of the measurement target pattern by performing fitting of the theoretical profile to the actual measured profile. The layer stack model is created by calculating a feature value that reflects the intensity of reflected light from an interface for each of the layers, determining a priority order of analysis from the feature value, and sequentially performing fitting of the theoretical profile to the measured profile in the determined priority order.