公开(公告)号：US20250076238A1

公开(公告)日：2025-03-06

申请号：US18734045

申请日：2024-06-05

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yosuke AKIMOTO ,  Akira FUJIMOTO ,  Yoshihiko KURUI ,  Ping WANG

IPC: G01N27/18 ,  G01N27/04

Abstract: According to one embodiment, a sensor includes an element section. The element section includes a base including a first region, a second region and a third region, a first element fixed to the first region, a second element fixed to the second region, and a third element fixed to the third region. The first element includes a first fixed portion fixed to the first region, and a first film portion supported by the first fixed portion. The first film portion includes a first resistance member and a first layer including a first material. The second element includes a second fixed portion fixed to the second region, and a second film portion supported by the second fixed portion. The third element includes a third fixed portion fixed to the third region, and a third film portion supported by the third fixed portion.

公开(公告)号：US20240295514A1

公开(公告)日：2024-09-05

申请号：US18457555

申请日：2023-08-29

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yosuke AKIMOTO ,  Akira FUJIMOTO ,  Yoshihiko KURUI ,  Ping WANG ,  Hiroaki YAMAZAKI

IPC: G01N27/04

CPC classification number: G01N27/04

Abstract: According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member provided between the first resistance layer and the first conductive layer. A potential of the first conductive member is fixed. A first electrical resistance of the first resistance layer is configured to change according to a state of a detection target around the first element.

公开(公告)号：US20240410869A1

公开(公告)日：2024-12-12

申请号：US18583115

申请日：2024-02-21

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ping WANG ,  Masayuki MATSUTAKE ,  Hiroaki YAMAZAKI ,  Yoshihiko KURUI ,  Yosuke AKIMOTO

IPC: G01N33/00 ,  G01N25/18

Abstract: According to one embodiment, a sensor includes a sensor section and a circuit section. The sensor section includes a first element portion including a first resistance element and a first conductive member, and a second element portion including a second resistance element. The circuit section includes a detector and a controller, and is configured to perform a first operation. The controller controls a first power in the first operation based on a second signal corresponding to a second resistance of the second resistance element. In the first operation: the controller supplies the first power to the first conductive member to increase a first temperature of the first element section; and the detector outputs a detected value corresponding to a difference between the second signal and a first signal corresponding to a first resistance of the first resistance element in a first state in which the first temperature is raised.

公开(公告)号：US20240295516A1

公开(公告)日：2024-09-05

申请号：US18354713

申请日：2023-07-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yosuke AKIMOTO ,  Akira FUJIMOTO ,  Yoshihiko KURUI ,  Ping WANG ,  Hiroaki YAMAZAKI

IPC: G01N27/12 ,  G01N33/00

CPC classification number: G01N27/12 ,  G01N33/0027

Abstract: According to one embodiment, a sensor includes an element portion including a first base and a first element. The first element includes, a first fixed member fixed to the first base, a first resistance connecting member supported by the first fixed member, a first conductive connecting member supported by the first fixed member, and a first film portion supported by the first resistance connecting member and the first conductive connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer and a first conductive layer. The first resistance connecting member includes a first resistance wiring electrically connected to the first resistance layer. The first conductive connecting member includes a first conductive wiring electrically connected to the first conductive layer.

公开(公告)号：US20240295513A1

公开(公告)日：2024-09-05

申请号：US18354802

申请日：2023-07-19

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yosuke AKIMOTO ,  Akira FUJIMOTO ,  Yoshihiko KURUI ,  Ping WANG ,  Hiroaki YAMAZAKI

IPC: G01N27/04

CPC classification number: G01N27/04

Abstract: According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member. The first resistance layer does not overlap the first conductive layer in a first direction from the first base to the first fixed member. The first conductive member overlaps the first resistance layer and the first conductive layer in the first direction. A first electrical resistance of the first resistance layer changes according to a state of a detection target around the first element.

公开(公告)号：US20240085360A1

公开(公告)日：2024-03-14

申请号：US18173681

申请日：2023-02-23

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko KURUI ,  Hiroaki YAMAZAKI ,  Yosuke AKIMOTO ,  Ping WANG ,  Fumitaka ISHIBASHI ,  Yumi HAYASHI

IPC: G01N27/22

CPC classification number: G01N27/228

Abstract: According to one embodiment, a sensor includes a detection device and a circuit portion. The detection device includes a first detection portion and a second detection portion. The first detection portion includes a first detection element. The first detection element includes a first conductive member and a first detection member. The second detection portion includes a second detection element. The second detection element includes a second conductive member and a second detection member. The circuit portion is configured to execute a first detection portion operation for outputting a first detection result corresponding to a first detection value based on the first detection member when a first current is supplied to the first conductive member. In a case where a first evaluation value is not within a first range, the circuit portion is configured to execute a second detection portion operation by the second detection portion.

公开(公告)号：US20160272481A1

公开(公告)日：2016-09-22

申请号：US15067110

申请日：2016-03-10

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroaki YAMAZAKI ,  Yoshihiko KURUI ,  Tamio IKEHASHI

IPC: B81B3/00

CPC classification number: B81B3/0008 ,  B81B2201/0221 ,  B81B2203/04 ,  H01G5/18

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first electrode fixed on the substrate. The first electrode includes a first one end portion and a first other end portion. A capacitor insulating film is provided on the first electrode. An insulating film is provided on the substrate and located around a periphery of the first electrode. A second electrode is provided above the first electrode and movable. The second electrode includes a second one end portion corresponding to the first one end portion, and a second other end portion corresponding to the first other end portion. The second one end portion extends outside the first one end portion and includes a first bent portion bent downward.

Abstract translation: 根据一个实施例，公开了一种MEMS器件。 该装置包括基板，固定在基板上的第一电极。 第一电极包括第一端部和第一另一端部。 电容绝缘膜设置在第一电极上。 绝缘膜设置在基板上并且位于第一电极的周边周围。 第二电极设置在第一电极上方并可移动。 第二电极包括对应于第一一个端部的第二一个端部和与第一另一个端部对应的第二另一个端部。 第二一个端部在第一一个端部的外侧延伸并且包括向下弯曲的第一弯曲部分。

公开(公告)号：US20160077144A1

公开(公告)日：2016-03-17

申请号：US14643904

申请日：2015-03-10

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko KURUI ,  Tamio IKEHASHI

IPC: G01R31/02 ,  G01R19/165 ,  H03M1/38

CPC classification number: G01R31/028 ,  H01G5/16 ,  H03M1/38

Abstract: According to one embodiment, an electronic device includes a variable capacitor includes first and second electrodes, and indicating a first state in which a distance between the first and second electrodes is a first distance and a second state in which the distance between the first and second electrodes is a second distance shorter than the first distance, in accordance with a voltage applied between the first and second electrodes, a voltage applying circuit applying a voltage between the first and second electrodes, and a voltage detecting circuit detecting a first voltage based on an interelectrode voltage between the first and second electrodes. The variable capacitor, the voltage applying circuit and the voltage detecting circuit are provided in a same chip.

Abstract translation: 根据一个实施例，电子设备包括可变电容器，其包括第一和第二电极，并且指示第一状态和第二状态，其中第一和第二电极之间的距离是第一距离，第二状态中第一和第二电极之间的距离 根据施加在第一和第二电极之间的电压，施加第一和第二电极之间的电压的电压施加电路和基于第一电极检测第一电压的电压检测电路，电极比第一距离短的第二距离 第一和第二电极之间的电极间电压。 可变电容器，电压施加电路和电压检测电路设置在同一芯片中。

公开(公告)号：US20250083950A1

公开(公告)日：2025-03-13

申请号：US18760470

申请日：2024-07-01

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroaki YAMAZAKI ,  Yoshihiko KURUI

IPC: B81B7/02 ,  G01F1/684 ,  G01F1/69

Abstract: According to one embodiment, a sensor includes a sensor portion that includes a first resistance element, a first opposing resistance element, a second resistance element, a second opposing resistance element, a third resistance element, a third opposing resistance element, a fourth resistance element, a fourth opposing resistance element, and a first conductive member. A direction from the first resistance element to the first opposing resistance element and a direction from the second resistance element to the second opposing resistance element are along a first direction. A second direction from at least a part of the first resistance element to the second resistance element crosses the first direction. A third direction from the third resistance element to the third opposing resistance element crosses a plane including the first and second directions. A direction from the fourth resistance element to the fourth opposing resistance element is along the third direction.

公开(公告)号：US20250067697A1

公开(公告)日：2025-02-27

申请号：US18760501

申请日：2024-07-01

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko KURUI ,  Hiroaki YAMAZAKI

IPC: G01N27/18 ,  G01N33/00

Abstract: According to one embodiment, a sensor includes a sensor section and a circuit section. The sensor section includes an element portion including a sensor element and a conductive member. The circuit section includes a first differential circuit, a voltage holding circuit, a first switch, a second switch, a third switch, and a controller. The controller is configured to perform a first operation and a second operation. In the first operation, the controller is configured to set the third switch to a third connected state, to set the first switch to a first connected state, and to set the second switch to a second disconnected state. In the second operation, the controller is configured to set the third switch to a third disconnected state, to set the first switch to a first disconnected state, and to set the second switch to a second connected state.