公开(公告)号：US20180012789A1

公开(公告)日：2018-01-11

申请号：US15644828

申请日：2017-07-10

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroyuki HANDA ,  John D. PAYNE ,  John Charles ROGERS ,  Carl Michael TRAYNOR

IPC: H01L21/687 ,  B25J9/16 ,  B25J13/08 ,  B25J15/06

CPC classification number: H01L21/68707 ,  B25J9/042 ,  B25J9/1651 ,  B25J11/0095 ,  B25J13/088 ,  B25J15/0616 ,  B25J19/023 ,  H01L21/67742 ,  H01L21/67766

Abstract: A robotic apparatus for transporting a workpiece includes a first arm that pivots about a first axis and a second arm that is pivotably connected to the first arm. The second arm has a surface upon which the workpiece can be received. A first drive unit of the robotic apparatus drives the first arm member to pivot about the first axis. The robotic apparatus includes a controller that controls the first drive unit to move the surface of the second arm member to transport the workpiece. The control unit also controls the first drive unit such that the surface is not moved at an acceleration value that exceeds a predetermined acceleration limit during the transport of the workpiece.