公开(公告)号：US20220111539A1

公开(公告)日：2022-04-14

申请号：US17557044

申请日：2021-12-21

申请人： KABUSHIKI KAISHA YASKAWA DENKI

发明人： Go YAMAGUCHI ,  Hiromitsu AKAE ,  Kensuke ONI ,  Osamu KOMIYAJI

IPC分类号： B25J15/00 ,  B25J15/04 ,  B25J21/00 ,  B25J9/00 ,  B25J11/00

摘要： The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.

公开(公告)号：US20230312271A1

公开(公告)日：2023-10-05

申请号：US18331179

申请日：2023-06-08

申请人： KABUSHIKI KAISHA YASKAWA DENKI

发明人： Go YAMAGUCHI ,  Yoshiaki KUBOTA ,  Kensuke ONI

IPC分类号： B65G54/02 ,  B65G47/90

CPC分类号： B65G54/02 ,  B65G47/904

摘要： A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move along the transport line; a second moving body configured to support the substrate; and a non-contact force generator configured to apply a non-contact force to the second moving body from the first moving body to cause the second moving body to follow movement of the first moving body while levitating, by the non-contact force, the second moving body with respect to the first moving body.