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公开(公告)号：US20220100094A1
公开(公告)日：2022-03-31
申请号：US17423869
申请日：2020-01-17
Inventor： Henry C. Kapteyn , Bin Wang , Chen-Ting Liao , Margaret Murnane
Abstract: Apparatus and methods for coherent diffraction imaging This is accomplished by acquiring data in a CDI setup with a CMOS or similar detector. The object is illuminated with coherent light such as EUV light which may be pulsed. This generates diffraction patterns which are collected by the detector, either in frames or continuously (by recording the scan position during collection). Pixels in the CDI data are thresholded and set to zero photons if the pixel is below the threshold level. Pixels above the threshold may be set to a value indicating one photon, or multiple thresholds may be used to set pixels values to one photon, two photons, etc. In addition, multiple threshold values may be used to detect different photon energies for illumination at multiple wavelengths.
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公开(公告)号：US11209717B2
公开(公告)日：2021-12-28
申请号：US16954115
申请日：2018-12-14
Applicant: Kapteyn-Murnane Laboratories, Inc.
Inventor： Sterling J. Backus , Henry C. Kapteyn , David G. Winters
Abstract: Apparatus and methods for generating controllable, narrow-band radiation at short wavelengths, driven by two colors injected into a structured waveguide. The use of multicolor excitation with the structured waveguide allows the use of very small guided beam diameters, without damaging the waveguide. Reduced guided wave mode area combined with low intensities required to drive wave-mixing frequency conversion allow the use of very compact, high average power, moderate peak intensity femtosecond fiber laser technology to drive useful conversion efficiency of laser light into the deep-UV and vacuum-UV at MHz repetition rates.
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Patent Agency Ranking
公开(公告)号：US12085520B2
公开(公告)日：2024-09-10
申请号：US17423869
申请日：2020-01-17
Inventor： Henry C. Kapteyn , Bin Wang , Chen-Ting Liao , Margaret Murnane
IPC: G01N21/47 , G01N23/20 , G01N23/20008 , G01N23/20091 , G01N23/205 , G01N23/2055 , G03F7/00 , G03F7/20
CPC classification number: G01N23/20008 , G01N23/20 , G01N23/20091 , G01N23/205 , G01N23/2055 , G03F7/2039 , G03F7/70616 , G01N2223/1006
Abstract: Apparatus and methods for coherent diffraction imaging. This is accomplished by acquiring data in a CDI setup with a CMOS or similar detector. The object is illuminated with coherent light such as EUV light which may be pulsed. This generates diffraction patterns which are collected by the detector, either in frames or continuously (by recording the scan position during collection). Pixels in the CDI data are thresholded and set to zero photons if the pixel is below the threshold level. Pixels above the threshold may be set to a value indicating one photon, or multiple thresholds may be used to set pixels values to one photon, two photons, etc. In addition, multiple threshold values may be used to detect different photon energies for illumination at multiple wavelengths.
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公开(公告)号：US20220187679A1
公开(公告)日：2022-06-16
申请号：US17603233
申请日：2020-04-13
Applicant: KAPTEYN MURNANE LABORATORIES, INC.
Inventor： Seth Lucien Cousin , Michael Tanksalvala , Henry C. Kapteyn
Abstract: Apparatus and methods for improved HHG of ultrashort pulse laser beams. A HHG assembly includes a gas distribution block and a waveguide cartridge having a HHG hollow core waveguide. The waveguide cartridge is attached to the gas distribution block and may be removed and replaced, while the gas distribution block remains affixed within the apparatus. The gas distribution block is configured to maintain a pressure profile within the hollow core fiber. The system also includes two operating beam sensors and two actuatable mirrors. The operating beam sensors are fixed with respect to the HHG assembly. The system is aligned before operation by adjusting the actuatable mirrors to optimize a sample beam through the waveguide and recording the position of the beam on the operating beam sensors. In operation, the mirrors are actuated to maintain the same positions of the input beam on the operating beam sensors.
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5.发明申请公开(公告)号：US20200292393A1
公开(公告)日：2020-09-17
申请号：US16820645
申请日：2020-03-16
Applicant: Kapteyn Murnane Laboratories, Inc.
Inventor： Henry C. Kapteyn , Daniel E. Adams , Seth L. Cousin
IPC: G01J11/00
Abstract: Apparatus and methods of full spatio-temporal characterization of ultrashort pulses from an input pulse-beam source. An interferometer system generates a first, second, third, and fourth replica of the input pulse-beam such that the second replica has a varying delay with respect to the first replica and the fourth replica has a varying delay with respect to the third replica. A reference plane is imaged onto a nonlinear spectral measurement device based upon the first and second replicas, and the reference plane is also imaged onto a wavefront sensitive (WFS) imaging element based on the third and fourth replicas. The signals from the WFS imaging element and the spectral signal are used to compute a pulse temporal spectral profile of the input pulse-beam.
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6.发明授权公开(公告)号：US11150139B2
公开(公告)日：2021-10-19
申请号：US16820645
申请日：2020-03-16
Applicant: Kapteyn Murnane Laboratories, Inc.
Inventor： Henry C. Kapteyn , Daniel E. Adams , Seth L. Cousin
IPC: G01J11/00
Abstract: Apparatus and methods of full spatio-temporal characterization of ultrashort pulses from an input pulse-beam source. An interferometer system generates a first, second, third, and fourth replica of the input pulse-beam such that the second replica has a varying delay with respect to the first replica and the fourth replica has a varying delay with respect to the third replica. A reference plane is imaged onto a nonlinear spectral measurement device based upon the first and second replicas, and the reference plane is also imaged onto a wavefront sensitive (WFS) imaging element based on the third and fourth replicas. The signals from the WFS imaging element and the spectral signal are used to compute a pulse temporal spectral profile of the input pulse-beam.
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公开(公告)号：US20210018816A1
公开(公告)日：2021-01-21
申请号：US16954115
申请日：2018-12-14
Applicant: Kapteyn-Murnane Laboratories, Inc.
Inventor： Sterling J. Backus , Henry C. Kapteyn , David G. Winters
Abstract: Apparatus and methods for generating controllable, narrow-band radiation at short wavelengths, driven by two colors injected into a structured waveguide. The use of multicolor excitation with the structured waveguide allows the use of very small guided beam diameters, without damaging the waveguide. Reduced guided wave mode area combined with low intensities required to drive wave-mixing frequency conversion allow the use of very compact, high average power, moderate peak intensity femtosecond fiber laser technology to drive useful conversion efficiency of laser light into the deep-UV and vacuum-UV at MHz repetition rates.
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