Energy-dispersive X-ray diffraction analyser comprising a substantially X-ray transparent member having an improved reflection geometry

    公开(公告)号:US11614414B2

    公开(公告)日:2023-03-28

    申请号:US17285226

    申请日:2019-10-15

    摘要: An on-line energy dispersive X-ray diffraction (EDXRD) analyser for mineralogical analysis of material in a process stream or a sample is disclosed. The analyser includes a collimated X-ray source to produce a diverging beam of polychromatic X-rays, and an energy resolving X-ray detector, and a substantially X-ray transparent member having the form of a solid of revolution which is circularly symmetric about a central axis between the collimated X-ray source and the energy resolving X-ray detector, an outer surface of the X-ray transparent member positionable adjacent the material to be analysed. A primary beam collimator is disposed adjacent to or within the substantially X-ray transparent member to substantially prevent direct transmission of polychromatic X-rays emitted from the source to the detector. The analyser is configured such that the diverging beam of polychromatic X-rays are directed towards the substantially X-ray transparent member, and where the energy resolving X-ray detector collects a portion of the beam of X-rays diffracted by the material and outputs a signal containing energy information of the collected, diffracted X-rays.

    Methods for aligning a spectrometer

    公开(公告)号:US10962490B2

    公开(公告)日:2021-03-30

    申请号:US16066500

    申请日:2016-12-28

    摘要: An example method for aligning a spectrometer is described herein. The spectrometer includes a radiation source, a crystal analyzer, and a detector that are all positioned on an instrument plane. The method includes rotating the crystal analyzer about an axis that is within the instrument plane and perpendicular to a rotation plane such that (i) a reciprocal lattice vector of the crystal analyzer is within the instrument plane or (ii) a component of the reciprocal lattice vector within the rotation plane is perpendicular to the instrument plane. An origin of the reciprocal lattice vector is located on the axis. The method further includes tilting the crystal analyzer or translating the detector such that the reciprocal lattice vector bisects a line segment that is bounded by the detector and the radiation source. Example spectrometers related to the example method are also disclosed.

    Set-up and method for spatially resolved measurement with a wavelength-dispersive X-ray spectrometer

    公开(公告)号:US10794845B2

    公开(公告)日:2020-10-06

    申请号:US16216384

    申请日:2018-12-11

    申请人: Bruker AXS GmbH

    摘要: X-ray spectrometer comprising an X-ray source emitting X-ray radiation onto a sample, a collimator arrangement for collimating X-ray radiation that has passed through a diaphragm arrangement, the collimator arrangement comprising a modified Soller slit with mutually parallel lamellae forming a plurality of slit-shaped passages, at least a portion of the slit-shaped passages having partition walls aligned substantially perpendicularly to the slit-shaped passages, the partition walls being non-transmissive to X-ray radiation and restricting the transverse divergence of the X-ray radiation passing through the collimator arrangement in a direction transversely with respect to the diffraction plane of the X-ray radiation coming from the sample. Significantly faster spatially resolved measurements can thus be carried out.

    Analyzing a rock sample
    7.
    发明授权

    公开(公告)号:US10739326B2

    公开(公告)日:2020-08-11

    申请号:US15977496

    申请日:2018-05-11

    摘要: An example method includes analyzing rock from an image of a sample region of the rock. The example method includes accessing element maps of the sample region in a database, with each element map including an array of pixels, and with each pixel having a value that represents how closely the pixel correlates to a chemical element; accessing a database storing threshold values for multiple chemical elements including the chemical element; determining a presence of a substance in a portion of the sample region corresponding to the pixel by determining whether a value of the pixel in each of the element maps is greater than, or less than, a threshold value for a corresponding chemical element; labeling the pixel based on the presence of the substance in the pixel; and outputting data representing the substance map for rendering on a graphical interface.

    Wafer alignment for small-angle X-ray scatterometry

    公开(公告)号:US20190323976A1

    公开(公告)日:2019-10-24

    申请号:US16386359

    申请日:2019-04-17

    摘要: An X-ray apparatus includes a mount, an X-ray source, a detector, an optical gauge and a motor. The mount is configured to hold a planar sample having a first side, which is smooth, and a second side, which is opposite the first side and on which a pattern has been formed. The X-ray source is configured to direct a first beam of X-rays toward the first side of the sample. The detector is positioned on the second side of the sample so as to receive at least a part of the X-rays that have been transmitted through the sample and scattered from the pattern. The optical gauge is configured to direct a second beam of optical radiation toward the first side of the sample, to sense the optical radiation that is reflected from the first side of the sample, and to output a signal, in response to the sensed optical radiation, that is indicative of a position of the sample. The motor is configured to adjust an alignment between the detector and the sample in response to the signal.

    X-RAY SPECTROMETER AND METHODS FOR USE
    10.
    发明申请

    公开(公告)号:US20190257774A1

    公开(公告)日:2019-08-22

    申请号:US16333405

    申请日:2017-09-15

    摘要: A spectrometer includes a crystal analyzer having a radius of curvature that defines a Rowland circle, a sample stage configured to support a sample such that the sample is offset from the Rowland circle, an x-ray source configured to emit unfocused x-rays toward the sample stage, and a position-sensitive detector that is tangent to the Rowland circle. A method performed via a spectrometer includes emitting, via an x-ray source, unfocused x-rays toward a sample that is mounted on a sample stage such that the sample is offset from the Rowland Circle, thereby causing the sample to emit x-rays that impinge on the crystal analyzer or transmit a portion of the unfocused x-rays to impinge on the crystal analyzer; scattering, via the crystal analyzer, the x-rays that impinge on the crystal analyzer; and detecting the scattered x-rays via a position-sensitive detector that is tangent to the Rowland circle.