公开(公告)号：US20240342825A1

公开(公告)日：2024-10-17

申请号：US18292112

申请日：2022-06-09

Applicant: KATAOKA CORPORATION

Inventor： Masami SUZUKI ,  Shoichi IMURA ,  Shinichi NAKASHIBA

IPC: B23K26/042 ,  B23K26/08

CPC classification number: B23K26/042 ,  B23K26/0876

Abstract: In order to implement a stage device for an optical instrument capable of accurately directing the optical instrument to a desired target position on an object supported by a moving stage, a stage device 2 for an optical instrument includes a table 22 configured to support an object and to move together with the object to cause an optical instrument 1 to be directed to any portion of the object; and a detection mechanism configured to detect a deviation between a target position to which the optical instrument 1 is to be directed on the object supported by the table 22 and a position to which the optical instrument 1 is actually directed.