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公开(公告)号：US20210229266A1
公开(公告)日：2021-07-29
申请号：US15734642
申请日：2019-06-06
发明人： Takeshi SHIBATA , Yukimasa YAMADA , Yuya MUROI
摘要： A horizontal articulated robot is provided, which includes a first connecting part disposed between two of the arms and rotatably connecting the other arm to one arm, a second connecting part disposed between a pedestal and the arm and rotatably connecting the arm to the pedestal, and a ring member disposed between the first connecting part and the arm and formed so that, as compared with one of end part sides in an extending direction of the arms, a height dimension thereof becomes larger at the other end part side.
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公开(公告)号：US20240116171A1
公开(公告)日：2024-04-11
申请号：US18554009
申请日：2022-04-06
发明人： Takeshi SHIBATA
CPC分类号： B25J9/0093 , B25J9/06 , B25J9/106
摘要： A substrate conveyor robot includes a guide rail cover arranged on a lateral side of the guide rail to cover an upper part of a guide rail that is exposed when an up-and-down mover moves downward. The base link includes the guide rail cover.
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公开(公告)号：US20240051158A1
公开(公告)日：2024-02-15
申请号：US18283930
申请日：2022-03-16
发明人： Takeshi SHIBATA , Ryota ONO
IPC分类号： B25J19/00
CPC分类号： B25J19/0062
摘要： An automatic lubrication robot includes a robot, a grease hose, and a delivery unit. The robot includes a lifting and lowering unit that moves linearly and an arm coupled to the lifting and lowering unit, and the robot is arranged in a clean room to perform an operation. Grease for lubricating the robot passes through the grease hose. In response to the linear movement of the lifting and lowering unit, the delivery unit delivers the grease to the robot via the grease hose.
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公开(公告)号：US20210233796A1
公开(公告)日：2021-07-29
申请号：US17059492
申请日：2019-05-28
发明人： Takeshi SHIBATA , Yuya MUROI
IPC分类号： H01L21/687 , H01L21/677 , B65G47/90
摘要： A robot system includes a first and second placing part where a workpiece is placed, and a transfer device disposed between the first and second placing part, the transfer device including a transfer-device interior space, a part of the periphery thereof being defined by a first wall provided to the first placing part side and a second wall provided to the second placing part side so as to oppose to the first wall, and a robot configured to transfer the workpiece between the first placing part and the second placing part. The first placing part is separated from the first wall by a first distance in a first direction connecting the first wall and the second wall. The second placing part is separated from the second wall by a second distance farther than the first distance in the first direction, and the robot is disposed closer to the second wall.
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公开(公告)号：US20160218031A1
公开(公告)日：2016-07-28
申请号：US14917699
申请日：2014-09-04
IPC分类号： H01L21/687 , B25J19/00
CPC分类号： H01L21/68707 , B25J9/0021 , B25J19/0079 , F16C29/02 , F16C29/088 , H01L21/67766
摘要： A seal belt includes inner and outer belt sections. The inner belt section revolves according to the movable member movement. The outer belt section includes, between the inner belt section and an opening, a first portion in which a first end is retained at a movable member inside section portion, the portion being closer to the opening lower end, and the remaining portion extends along the opening and is retained at a third space position, and a second portion in which a first end is retained at an inside section portion, the portion being closer to the lower end, and the remaining portion extends to a fourth space position along the opening and is retained at the fourth space position. The first portion and second portions lengths are changed in a complementary manner according to the movable member movement. The drive mechanism is surrounded by the inner belt section.
摘要翻译： 密封带包括内部和外部带部分。 内带部分根据活动件的运动而旋转。 所述外带部分包括在所述内带部分和开口之间的第一部分，其中第一端保持在可移动部件内部部分中，所述部分更靠近所述开口下端，并且所述其余部分沿着 并且被保持在第三空间位置，第二部分中第一端保持在内部部分，该部分更靠近下端，并且其余部分沿着开口延伸到第四空间位置， 被保留在第四空间位置。 第一部分和第二部分长度根据可移动部件的移动以互补的方式改变。 驱动机构被内带部分包围。
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公开(公告)号：US20160111312A1
公开(公告)日：2016-04-21
申请号：US14758362
申请日：2013-12-25
发明人： Tetsuya YOSHIDA , Takeshi SHIBATA
IPC分类号： H01L21/68 , B25J15/00 , H01L21/687
CPC分类号： H01L21/681 , B25J15/0014 , H01L21/67259 , H01L21/67265 , H01L21/68707
摘要： An end effector according to the present invention includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.
摘要翻译： 根据本发明的末端执行器包括：手; 设置在手上的基板保持架; 设置在前端部分和手部的映射检测器; 发光器，其设置有手并且被配置为产生检测光; 手提供的光接收器，其被配置为接收检测光并将检测光转换成电输出; 以及形成为使得从发光体发射的检测光通过光路入射到光接收器上的光路; 光路被形成为使得检测光被由映射检测器在盒中检测到的基板阻挡，并且使得检测光被被基板保持器保持的基板阻挡。
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公开(公告)号：US20240198514A1
公开(公告)日：2024-06-20
申请号：US18287218
申请日：2022-04-06
发明人： Takeshi SHIBATA
CPC分类号： B25J9/06 , B25J9/0093 , B25J9/043 , B25J15/0019
摘要： In a substrate conveyor robot, a rotation center of a base link is spaced away from a guide rail cover so that the shortest distance between the guide rail cover and the rotation center of the base link is greater than the maximum turn radius of the base link.
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公开(公告)号：US20230182326A1
公开(公告)日：2023-06-15
申请号：US17923611
申请日：2021-05-07
发明人： Takeshi SHIBATA , Hitoshi KUDO
CPC分类号： B25J17/0283 , B25J9/102
摘要： A wrist device includes a first element coupled to an arm to be rotatable about a fifth axis, and a second element coupled to the first element to be rotatable about a sixth axis. There is a fifth motor to rotationally drive the first element, and a sixth motor to rotationally drive the second element. A fifth transmission mechanism transmits a driving force of the fifth motor to the first element and a sixth transmission mechanism transmits a driving force of the sixth motor to the second element. The sixth transmission mechanism includes a first gear rotatably supported by the arm and a second gear rotatably supported by the first element and to mesh with the first gear, and reduces a rotation speed of a driving force in a component group including the first driving gear and components after the first driving gear.
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公开(公告)号：US20190148210A1
公开(公告)日：2019-05-16
申请号：US16088389
申请日：2017-03-01
发明人： Takeshi SHIBATA
IPC分类号： H01L21/687 , B25J15/00 , H01L21/677
摘要： A substrate transfer hand has a casing; blade; front guide provided at a blade tip end portion with first and second support parts being different in height from the blade; first rear guide at the blade base end portion, and having a portion with a height from the blade that is equal to a height from the blade, of the first support part of the front guide; second rear guide at a base end side of the blade, and having a portion with a height from the blade that is equal to a height from the blade, of the second support part of the front guide; and driving device inside the casing with an advanceable and retractable output end and moves the second rear guide coupled to the output end within a region where the second rear guide does not overlap the blade in a blade normal direction.
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公开(公告)号：US20240326248A1
公开(公告)日：2024-10-03
申请号：US18622015
申请日：2024-03-29
发明人： Takeshi SHIBATA , Yuya MUROI
CPC分类号： B25J9/1666 , B25J9/042 , B25J9/102 , B25J9/1612
摘要： A robot according to this disclosure includes a controller configured to control operations of a hand(s) and a robot arm to convey a workpiece(s) with distances between a center(s) of the hand(s) and end surfaces of the workpiece(s) being uneven so as to prevent interference of the workpiece with a wall.
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