公开(公告)号：US20230369001A1

公开(公告)日：2023-11-16

申请号：US18316194

申请日：2023-05-11

Applicant: KETEK GmbH Halbleiter-und Reinraumtechnik

Inventor： Michael Bachmann ,  Andreas Schels ,  Florian Herdl ,  Stefan Zimmermann ,  Simon Edler ,  Erik Bunert

IPC: H01J1/312 ,  C23C16/26 ,  C23C16/34

CPC classification number: H01J1/312 ,  C23C16/26 ,  C23C16/342 ,  H01J2201/3125 ,  H01L21/02527

Abstract: In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.

公开(公告)号：US12272512B2

公开(公告)日：2025-04-08

申请号：US18316194

申请日：2023-05-11

Applicant: KETEK GmbH Halbleiter-und Reinraumtechnik

Inventor： Michael Bachmann ,  Andreas Schels ,  Florian Herdl ,  Stefan Zimmermann ,  Simon Edler ,  Erik Bunert

IPC: H01J1/312 ,  C23C16/26 ,  C23C16/34 ,  H01L21/02

Abstract: In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.