公开(公告)号：US20240425997A1

公开(公告)日：2024-12-26

申请号：US18749040

申请日：2024-06-20

Applicant: KETEK GmbH Halbleiter- und Reinraumtechnik ,  Universiteit Twente

Inventor： Michael Bachmann ,  Simon Edler ,  Dirk Jonker ,  J.G.E. Gardeniers

IPC: C25B9/15 ,  C25B3/26 ,  C25B11/043 ,  C25B15/021 ,  C25B15/025 ,  C25B15/08

Abstract: In an embodiment a reactor includes an electron source having a first gate-insulator-substrate electron-emission structure (GIS-EE) and configured to inject electrons into a fluid and a transportation system for the fluid configured to adjust a velocity of the fluid when passing the electron source, wherein the electron source is configured to provide the electrons to be injected into the fluid in an interior of the electron source and distant from the fluid, wherein the injected electrons are to initiate at least one chemical reaction in the fluid, wherein, when reaching the fluid, at least part of the injected electrons has a kinetic energy of at most 50 eV, wherein the electrons are propagatable only in solid matter from the interior until emission into the fluid, and wherein the GIS-EE includes an electrically conductive substrate, a transfer layer of a material with a band gap of at least 4 eV on the substrate, a gate electrode of a further electrically conductive material directly on the transfer layer, a first electrical connection structure on the substrate, and a second electrical connection structure on the gate electrode.

公开(公告)号：US20230369001A1

公开(公告)日：2023-11-16

申请号：US18316194

申请日：2023-05-11

Applicant: KETEK GmbH Halbleiter-und Reinraumtechnik

Inventor： Michael Bachmann ,  Andreas Schels ,  Florian Herdl ,  Stefan Zimmermann ,  Simon Edler ,  Erik Bunert

IPC: H01J1/312 ,  C23C16/26 ,  C23C16/34

CPC classification number: H01J1/312 ,  C23C16/26 ,  C23C16/342 ,  H01J2201/3125 ,  H01L21/02527

Abstract: In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.

公开(公告)号：US12272512B2

公开(公告)日：2025-04-08

申请号：US18316194

申请日：2023-05-11

Applicant: KETEK GmbH Halbleiter-und Reinraumtechnik

Inventor： Michael Bachmann ,  Andreas Schels ,  Florian Herdl ,  Stefan Zimmermann ,  Simon Edler ,  Erik Bunert

IPC: H01J1/312 ,  C23C16/26 ,  C23C16/34 ,  H01L21/02

Abstract: In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.