公开(公告)号：US20210140841A1

公开(公告)日：2021-05-13

申请号：US16625521

申请日：2018-06-15

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Amal HAJJAJ ,  Md Abdullah Al HAFIZ ,  Mohammad Ibrahim YOUNIS

IPC: G01L9/00

Abstract: An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

公开(公告)号：US20220196603A1

公开(公告)日：2022-06-23

申请号：US17441939

申请日：2019-04-18

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Nizar Riyad Khaled JABER ,  Amal HAJJAJ ,  Nouha ALCHEIKH ,  Mohammad Ibrahim YOUNIS

IPC: G01N29/036 ,  G01N33/00

Abstract: A gas sensor includes a microbeam configured to vibrate when driven by a driving electrode; a vibrometer configured to measure a frequency associated with a vibration of the microbeam; a power source configured to apply a first voltage (V1) to the microbeam to heat the microbeam; and a controller configured to control the power source and to receive the frequency measured by the vibrometer. The controller controls the power source to heat the microbeam so that the microbeam is at a buckling point, and the controller determines at least one characteristic of a gas present around the microbeam, based on the frequency received from the vibrometer.

公开(公告)号：US20220163418A1

公开(公告)日：2022-05-26

申请号：US17441941

申请日：2020-04-15

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Nouha ALCHEIKH ,  Amal HAJJAJ ,  Mohammad Ibrahim YOUNIS

IPC: G01L9/00

Abstract: A device for measuring pressure includes a curved microbeam having opposing ends, a length extending between the pair of opposing ends, and a plurality of resonant frequencies, an actuating electrode extending along the length of the curved microbeam and spaced from the curved microbeam, an AC power source in communication with one of the opposing ends and the actuating electrode to deliver an AC signal at a first symmetric resonant frequency and a second symmetric resonant frequency selected from the plurality of resonant frequencies to the curved microbeam, a DC power source in communication with the opposing ends to pass an electrothermal voltage along a length of the curved microbeam, and a frequency monitoring device to monitor changes in the first symmetric resonant frequency and the second symmetric resonant frequency caused by an ambient pressure surrounding the curved microbeam.