ELECTROMECHANICAL PRESSURE SENSOR

    公开(公告)号:US20210140841A1

    公开(公告)日:2021-05-13

    申请号:US16625521

    申请日:2018-06-15

    Abstract: An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

    MULTIFUNCTIONAL LOGIC DEVICE AND METHOD

    公开(公告)号:US20210242858A1

    公开(公告)日:2021-08-05

    申请号:US17165567

    申请日:2021-02-02

    Abstract: A logic system includes a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape; an input electrode facing the second side beam; a selector electrode facing the second side beam; a first output electrode facing the first side beam; and a second output electrode facing the arch beam.

    COMBINED VAPOR AND/OR GAS CONCENTRATION SENSOR AND SWITCH

    公开(公告)号:US20210025851A1

    公开(公告)日:2021-01-28

    申请号:US17040099

    申请日:2019-05-06

    Abstract: A combined vapor and/or gas concentration sensor and switch includes a resonating structure having a first side with a functionalized surface and a second side opposite the first side, a first resonant frequency of a first vibration mode, and a third resonant frequency of a third vibration mode. A direct current bias source is coupled to the resonating structure. A first AC voltage source is coupled to the drive electrode and provides the resonating structure, via the drive electrode, with a first voltage having an amplitude causing the first vibration mode of the resonating structure to exhibit a pull-in band and having a frequency adjacent the pull-in band of the first mode. A second AC voltage source is coupled to the drive electrode and provides the resonating structure, via the drive electrode, with a second voltage having a frequency corresponding to the third resonant frequency. A read-out circuit is coupled to the sensing electrode and is configured to determine a vapor and/or gas concentration based on a difference between the frequency of the second voltage supplied by the second AC voltage source and a frequency obtained by the read-out circuit.

    CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

    公开(公告)号:US20220069824A1

    公开(公告)日:2022-03-03

    申请号:US17411698

    申请日:2021-08-25

    Abstract: A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight beam, at a first joint, and with a second end to a second end of the second straight beam, at a second joint, so that both the first and second ends of the first arch beam are suspended above the substrate; and a second arch beam, which is also curved, and is attached with a first end to the second joint, and a second end is anchored to the substrate.

    MULTIMODE EXCITATION RESONANT GAS SENSOR AND METHOD

    公开(公告)号:US20220196603A1

    公开(公告)日:2022-06-23

    申请号:US17441939

    申请日:2019-04-18

    Abstract: A gas sensor includes a microbeam configured to vibrate when driven by a driving electrode; a vibrometer configured to measure a frequency associated with a vibration of the microbeam; a power source configured to apply a first voltage (V1) to the microbeam to heat the microbeam; and a controller configured to control the power source and to receive the frequency measured by the vibrometer. The controller controls the power source to heat the microbeam so that the microbeam is at a buckling point, and the controller determines at least one characteristic of a gas present around the microbeam, based on the frequency received from the vibrometer.

    DUAL ELECTRO-MECHANICAL OSCILLATOR FOR DYNAMICALLY REPROGRAMMABLE LOGIC GATE

    公开(公告)号:US20210111723A1

    公开(公告)日:2021-04-15

    申请号:US16606436

    申请日:2018-04-17

    Abstract: Embodiments include a logic gate system comprising a first micro-cantilever beam arranged in parallel to a second micro-cantilever beam in which a length of the first micro-cantilever beam is shorter than a length of the second micro-cantilever beam. The first micro-cantilever beam is adjacent to the second micro-cantilever beam and the first micro-cantilever beam is coupled to an input DC bias voltage source to the logic gate system. The second micro-cantilever beam is coupled to an input AC voltage signal that dynamically sets a logic operation of the logic gate system by at least changing an operating resonance frequency for one or more of the first micro-cantilever beam and the second micro-cantilever beam.

    WIDE RANGE HIGHLY SENSITIVE PRESSURE SENSOR BASED ON HEATED MICROMACHINED ARCH BEAM

    公开(公告)号:US20220163418A1

    公开(公告)日:2022-05-26

    申请号:US17441941

    申请日:2020-04-15

    Abstract: A device for measuring pressure includes a curved microbeam having opposing ends, a length extending between the pair of opposing ends, and a plurality of resonant frequencies, an actuating electrode extending along the length of the curved microbeam and spaced from the curved microbeam, an AC power source in communication with one of the opposing ends and the actuating electrode to deliver an AC signal at a first symmetric resonant frequency and a second symmetric resonant frequency selected from the plurality of resonant frequencies to the curved microbeam, a DC power source in communication with the opposing ends to pass an electrothermal voltage along a length of the curved microbeam, and a frequency monitoring device to monitor changes in the first symmetric resonant frequency and the second symmetric resonant frequency caused by an ambient pressure surrounding the curved microbeam.

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