公开(公告)号：US20220196603A1

公开(公告)日：2022-06-23

申请号：US17441939

申请日：2019-04-18

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Nizar Riyad Khaled JABER ,  Amal HAJJAJ ,  Nouha ALCHEIKH ,  Mohammad Ibrahim YOUNIS

IPC: G01N29/036 ,  G01N33/00

Abstract: A gas sensor includes a microbeam configured to vibrate when driven by a driving electrode; a vibrometer configured to measure a frequency associated with a vibration of the microbeam; a power source configured to apply a first voltage (V1) to the microbeam to heat the microbeam; and a controller configured to control the power source and to receive the frequency measured by the vibrometer. The controller controls the power source to heat the microbeam so that the microbeam is at a buckling point, and the controller determines at least one characteristic of a gas present around the microbeam, based on the frequency received from the vibrometer.