CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

    公开(公告)号:US20220069824A1

    公开(公告)日:2022-03-03

    申请号:US17411698

    申请日:2021-08-25

    Abstract: A cascadable resonator logic system includes a substrate; a first straight beam anchored with a first end to the substrate; a second straight beam anchored with a first end to the substrate; a first arch beam, which is curved, and is attached with a first end to a second end of the first straight beam, at a first joint, and with a second end to a second end of the second straight beam, at a second joint, so that both the first and second ends of the first arch beam are suspended above the substrate; and a second arch beam, which is also curved, and is attached with a first end to the second joint, and a second end is anchored to the substrate.

    MULTIFUNCTIONAL LOGIC DEVICE AND METHOD

    公开(公告)号:US20210242858A1

    公开(公告)日:2021-08-05

    申请号:US17165567

    申请日:2021-02-02

    Abstract: A logic system includes a microelectromechanical system, MEMS, resonator having an arch beam and first and second side beams, wherein the first side beam is attached with a first end to a first end of the arch beam and the second side beam is attached with a first end to a second end of the arch beam to form a U-shape; an input electrode facing the second side beam; a selector electrode facing the second side beam; a first output electrode facing the first side beam; and a second output electrode facing the arch beam.

Patent Agency Ranking