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公开(公告)号:US20220059570A1
公开(公告)日:2022-02-24
申请号:US17189197
申请日:2021-03-01
Applicant: KIOXIA CORPORATION
Inventor: Yusuke TANAKA , Masumi SAITOH , Kensuke OTA
IPC: H01L27/11597 , H01L27/1159 , H01L29/24 , H01L29/51
Abstract: According to one embodiment, a semiconductor memory device includes a ferroelectric layer and a first semiconductor layer. The first semiconductor layer is electrically connected to a first electrode and a second electrode and includes an n-type oxide semiconductor. A third electrode is opposite the first semiconductor layer. The ferroelectric layer is between the third electrode and the first semiconductor layer. A second semiconductor layer includes at least one of a Group IV semiconductor material or a p-type oxide semiconductor material. The first semiconductor layer is between the ferroelectric layer and the second semiconductor layer.