公开(公告)号：US10705026B2

公开(公告)日：2020-07-07

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Andrew Zeng ,  Xuan Wang ,  Steve Xu

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/14 ,  G02B27/30

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

公开(公告)号：US11017520B2

公开(公告)日：2021-05-25

申请号：US16551155

申请日：2019-08-26

Applicant: KLA Corporation

Inventor： Andrew Zeng ,  Helen Heng Liu

IPC: G06T7/00 ,  G01N21/88

Abstract: An inspection system may include a controller coupled to a differential interference contrast imaging tool for generating images of a sample based on illumination with two sheared illumination beams. The controller may determine a first defect-induced phase shift based on a first set of images of a defect on the sample with a first selected illumination spectrum and two or more selected induced phase differences between the two sheared illumination beams, determine a second defect-induced phase shift based a second set of images of the defect with a second selected illumination spectrum and two or more selected induced phase differences between the two sheared illumination beams, and classify the defect as a metal or a non-metal based on a comparison of the first phase shift to the second phase shift.

公开(公告)号：US20200074617A1

公开(公告)日：2020-03-05

申请号：US16551155

申请日：2019-08-26

Applicant: KLA Corporation

Inventor： Andrew Zeng ,  Helen Heng Liu

IPC: G06T7/00 ,  G01N21/88

Abstract: An inspection system may include a controller coupled to a differential interference contrast imaging tool for generating images of a sample based on illumination with two sheared illumination beams. The controller may determine a first defect-induced phase shift based on a first set of images of a defect on the sample with a first selected illumination spectrum and two or more selected induced phase differences between the two sheared illumination beams, determine a second defect-induced phase shift based a second set of images of the defect with a second selected illumination spectrum and two or more selected induced phase differences between the two sheared illumination beams, and classify the defect as a metal or a non-metal based on a comparison of the first phase shift to the second phase shift.

公开(公告)号：US20200132608A1

公开(公告)日：2020-04-30

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Raymond Chu ,  Andrew Zeng ,  Donald Pettibone ,  Chunsheng Huang ,  Bret Whiteside ,  Fabrice Paccoret ,  Xuan Wang ,  Chuanyong Huang ,  Steve Xu ,  Anatoly Romanovsky

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/30 ,  G02B27/14

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.