公开(公告)号：US20200033117A1

公开(公告)日：2020-01-30

申请号：US16517153

申请日：2019-07-19

Applicant: KLA Corporation

Inventor： Chunsheng Huang

IPC: G01B11/24 ,  H01L21/66

Abstract: An interferometer system may include a stage assembly configured to receive and secure a sample, an illumination source configured to generate an illumination beam, a half-wave plate, one or more shearing prisms to shear the illumination beam into two beamlets along a shearing direction, a reference flat disposed proximate to the sample, a detector assembly, and a controller. The controller may cause the illumination source to generate an illumination beam and sweep the illumination beam across a plurality of wavelengths, and determine both a surface height measurement and a surface slope measurement of the sample based on the illumination received by the detector assembly.

公开(公告)号：US10809055B2

公开(公告)日：2020-10-20

申请号：US16517153

申请日：2019-07-19

Applicant: KLA Corporation

Inventor： Chunsheng Huang

IPC: G01B11/24 ,  H01L21/66

Abstract: An interferometer system may include a stage assembly configured to receive and secure a sample, an illumination source configured to generate an illumination beam, a half-wave plate, one or more shearing prisms to shear the illumination beam into two beamlets along a shearing direction, a reference flat disposed proximate to the sample, a detector assembly, and a controller. The controller may cause the illumination source to generate an illumination beam and sweep the illumination beam across a plurality of wavelengths, and determine both a surface height measurement and a surface slope measurement of the sample based on the illumination received by the detector assembly.

公开(公告)号：US20200132608A1

公开(公告)日：2020-04-30

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Raymond Chu ,  Andrew Zeng ,  Donald Pettibone ,  Chunsheng Huang ,  Bret Whiteside ,  Fabrice Paccoret ,  Xuan Wang ,  Chuanyong Huang ,  Steve Xu ,  Anatoly Romanovsky

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/30 ,  G02B27/14

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.