公开(公告)号：US11415725B2

公开(公告)日：2022-08-16

申请号：US17175141

申请日：2021-02-12

Applicant: KLA Corporation

Inventor： Ivan Maleev ,  Donald Pettibone

IPC: G02B1/02 ,  G02B5/30 ,  G02B27/28 ,  G01N21/88 ,  G01N21/95

Abstract: An optical system for controlling polarization may include an illumination source to illuminate a surface of a sample, a set of collection optics to collect illumination from the surface of a sample, and a wave plate having a spatially-varying surface profile along a thickness direction positioned at a pupil plane of the set of collection optics, where the spatially-varying surface profile of the wave plate is configured to control polarization rotation as a continuous function of transverse position, and where the spatially-varying surface profile is selected to rotate light scattered from a surface of a sample to a selected polarization angle. The system may further include a linear polarizer oriented to block light with the selected polarization angle, and a sensor to detect illumination transmitted through the linear polarizer.

公开(公告)号：US20210173122A1

公开(公告)日：2021-06-10

申请号：US17175141

申请日：2021-02-12

Applicant: KLA Corporation

Inventor： Ivan Maleev ,  Donald Pettibone

IPC: G02B1/02 ,  G02B5/30 ,  G02B27/28 ,  G01N21/88 ,  G01N21/95

Abstract: An optical system for controlling polarization may include an illumination source to illuminate a surface of a sample, a set of collection optics to collect illumination from the surface of a sample, and a wave plate having a spatially-varying surface profile along a thickness direction positioned at a pupil plane of the set of collection optics, where the spatially-varying surface profile of the wave plate is configured to control polarization rotation as a continuous function of transverse position, and where the spatially-varying surface profile is selected to rotate light scattered from a surface of a sample to a selected polarization angle. The system may further include a linear polarizer oriented to block light with the selected polarization angle, and a sensor to detect illumination transmitted through the linear polarizer.

公开(公告)号：US20200132608A1

公开(公告)日：2020-04-30

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Raymond Chu ,  Andrew Zeng ,  Donald Pettibone ,  Chunsheng Huang ,  Bret Whiteside ,  Fabrice Paccoret ,  Xuan Wang ,  Chuanyong Huang ,  Steve Xu ,  Anatoly Romanovsky

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/30 ,  G02B27/14

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.