公开(公告)号：US20210048756A1

公开(公告)日：2021-02-18

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US11156926B2

公开(公告)日：2021-10-26

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.