公开(公告)号：US12092814B2

公开(公告)日：2024-09-17

申请号：US17574157

申请日：2022-01-12

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Rui-Fang Shi ,  Joseph Walsh ,  Mitchell Lindsay ,  Eric Vella

IPC: G02B27/00 ,  G02B27/58

CPC classification number: G02B27/0068 ,  G02B27/58

Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.

公开(公告)号：US20210041689A1

公开(公告)日：2021-02-11

申请号：US16533366

申请日：2019-08-06

Applicant: KLA Corporation

Inventor： David Jalil Zare ,  Eduardo Soto ,  I-Fan Wu ,  Joseph Walsh ,  Kent McKernan ,  Joseph Armstrong ,  Christopher Davis ,  Garry Rose ,  Damon Kvamme ,  Bernd Burfeindt ,  Ali Ehsani

IPC: G02B27/00

Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

公开(公告)号：US20220244530A1

公开(公告)日：2022-08-04

申请号：US17574157

申请日：2022-01-12

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Rui-Fang Shi ,  Joseph Walsh ,  Mitchell Lindsay ,  Eric Vella

IPC: G02B27/00 ,  G02B27/58

Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.

公开(公告)号：US11624904B2

公开(公告)日：2023-04-11

申请号：US16533366

申请日：2019-08-06

Applicant: KLA Corporation

Inventor： David Jalil Zare ,  Eduardo Soto ,  I-Fan Wu ,  Joseph Walsh ,  Kent McKernan ,  Joseph Armstrong ,  Christopher Davis ,  Garry Rose ,  Damon Kvamme ,  Bernd Burfeindt ,  Ali Ehsani

IPC: G02B27/00 ,  H01S3/036 ,  G01N21/15 ,  H01L21/66

Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

公开(公告)号：US20210048756A1

公开(公告)日：2021-02-18

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US12092183B2

公开(公告)日：2024-09-17

申请号：US17816103

申请日：2022-07-29

Applicant: KLA Corporation

Inventor： Meier Brender ,  Joseph Walsh

IPC: F16F1/12 ,  F16F15/067 ,  F16M13/02

CPC classification number: F16F15/067 ,  F16M13/02 ,  F16F1/128

Abstract: An apparatus includes an upper member, a lower member disposed beneath the upper member, and a spring disposed between the upper member and the lower member. The upper member has a pin extending downward therefrom. The lower member has a seat configured to receive a free end of the pin. The spring surrounds the pin, and has a free length that is less than the length of the pin. In an unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member. When the lower member carries a load in a loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.

公开(公告)号：US20230052496A1

公开(公告)日：2023-02-16

申请号：US17816103

申请日：2022-07-29

Applicant: KLA Corporation

Inventor： Meier Brender ,  Joseph Walsh

IPC: F16F15/067 ,  F16M13/02

Abstract: An apparatus includes an upper member, a lower member disposed beneath the upper member, and a spring disposed between the upper member and the lower member. The upper member has a pin extending downward therefrom. The lower member has a seat configured to receive a free end of the pin. The spring surrounds the pin, and has a free length that is less than the length of the pin. In an unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member. When the lower member carries a load in a loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.

公开(公告)号：US11156926B2

公开(公告)日：2021-10-26

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.