公开(公告)号：US20210048756A1

公开(公告)日：2021-02-18

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US20240271996A1

公开(公告)日：2024-08-15

申请号：US18408395

申请日：2024-01-09

Applicant: KLA Corporation

Inventor： Matthew Hoffman ,  Florian Melsheimer ,  Alon Rosenthal

IPC: G01J1/42 ,  G01N21/88 ,  G03F7/00 ,  G03F7/20

CPC classification number: G01J1/4257 ,  G01J1/429 ,  G01N21/8806 ,  G03F7/2039 ,  G03F7/70033 ,  G03F7/7055 ,  G03F7/706 ,  G03F7/706851

Abstract: Methods and systems for determining one or more characteristics of light in an optical system are provided. One system includes a detector positioned in a path of light between a light source in the optical system and a specimen for which the optical system performs a process. The detector includes a center cut-out configured to allow only a first portion of the light from the light source to pass therethrough and four or more detector segments positioned around the center cut-out and in a path of only a second portion of the light from the light source. The four or more detector segments are configured to separately generate output responsive to the light incident thereon. The system also includes a control subsystem configured for determining one or more characteristics of the light from the light source based on the output separately generated by the four or more detector segments.

公开(公告)号：US11156926B2

公开(公告)日：2021-10-26

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US20250164408A1

公开(公告)日：2025-05-22

申请号：US18941459

申请日：2024-11-08

Applicant: KLA CORPORATION

Inventor： Florian Melsheimer ,  Lauren Wilson ,  Alon Rosenthal ,  Matthew Hoffman

IPC: G01N21/88 ,  G01J1/44 ,  G01N21/01 ,  G02B26/08 ,  G05D3/12

Abstract: An assembly is in a path of a beam of light, which has a first and second spectral components at different wavelengths. A first spectral component and a second spectral component of the beam of light are projected through an aperture. A sensor is disposed around the aperture to only receive a second spectral component of the beam of light. A position of the beam of light relative to the aperture can be determined using information from the sensor.