公开(公告)号：US11733172B2

公开(公告)日：2023-08-22

申请号：US17313703

申请日：2021-05-06

Applicant: KLA Corporation

Inventor： Anatoly Romanovsky ,  Jenn-Kuen Leong ,  Daniel Kavaldjiev ,  Chunhai Wang ,  Bret Whiteside ,  Zhiwei Xu

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N2021/8822 ,  G01N2201/063

Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.

公开(公告)号：US20240230555A9

公开(公告)日：2024-07-11

申请号：US18452457

申请日：2023-08-18

Applicant: KLA Corporation

Inventor： Chunhai Wang ,  Guoheng Zhao ,  Anatoly Romanovsky ,  Yihua Hao ,  Monica Ji

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/0233

Abstract: Methods and systems for inspecting a specimen are provided. One system includes an inspection subsystem configured for directing light to an area on the specimen and for generating output responsive to light from the area on the specimen. The system also includes a first gas flow subsystem configured for replacing a gas in a first local volume surrounding the area on the specimen with a first medium that scatters less of the light than the gas. In addition, the system includes a second gas flow subsystem configured for replacing the gas in a second local volume proximate the first local volume with a second medium different than the first medium. The system further includes a computer subsystem configured for detecting abnormalities on the specimen based on the output.

公开(公告)号：US20240133825A1

公开(公告)日：2024-04-25

申请号：US18452457

申请日：2023-08-17

Applicant: KLA Corporation

Inventor： Chunhai Wang ,  Guoheng Zhao ,  Anatoly Romanovsky ,  Yihua Hao ,  Monica Ji

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/0233

Abstract: Methods and systems for inspecting a specimen are provided. One system includes an inspection subsystem configured for directing light to an area on the specimen and for generating output responsive to light from the area on the specimen. The system also includes a first gas flow subsystem configured for replacing a gas in a first local volume surrounding the area on the specimen with a first medium that scatters less of the light than the gas. In addition, the system includes a second gas flow subsystem configured for replacing the gas in a second local volume proximate the first local volume with a second medium different than the first medium. The system further includes a computer subsystem configured for detecting abnormalities on the specimen based on the output.

公开(公告)号：US20210356406A1

公开(公告)日：2021-11-18

申请号：US17313703

申请日：2021-05-06

Applicant: KLA Corporation

Inventor： Anatoly Romanovsky ,  Jenn-Kuen Leong ,  Daniel Kavaldjiev ,  Chunhai Wang ,  Bret Whiteside ,  Steve Xu

IPC: G01N21/88

Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.