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公开(公告)号：US20240230555A9
公开(公告)日：2024-07-11
申请号：US18452457
申请日：2023-08-18
Applicant: KLA Corporation
Inventor： Chunhai Wang , Guoheng Zhao , Anatoly Romanovsky , Yihua Hao , Monica Ji
IPC: G01N21/95
CPC classification number: G01N21/9501 , G01N2201/0233
Abstract: Methods and systems for inspecting a specimen are provided. One system includes an inspection subsystem configured for directing light to an area on the specimen and for generating output responsive to light from the area on the specimen. The system also includes a first gas flow subsystem configured for replacing a gas in a first local volume surrounding the area on the specimen with a first medium that scatters less of the light than the gas. In addition, the system includes a second gas flow subsystem configured for replacing the gas in a second local volume proximate the first local volume with a second medium different than the first medium. The system further includes a computer subsystem configured for detecting abnormalities on the specimen based on the output.
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公开(公告)号：US20240133825A1
公开(公告)日：2024-04-25
申请号：US18452457
申请日：2023-08-17
Applicant: KLA Corporation
Inventor： Chunhai Wang , Guoheng Zhao , Anatoly Romanovsky , Yihua Hao , Monica Ji
IPC: G01N21/95
CPC classification number: G01N21/9501 , G01N2201/0233
Abstract: Methods and systems for inspecting a specimen are provided. One system includes an inspection subsystem configured for directing light to an area on the specimen and for generating output responsive to light from the area on the specimen. The system also includes a first gas flow subsystem configured for replacing a gas in a first local volume surrounding the area on the specimen with a first medium that scatters less of the light than the gas. In addition, the system includes a second gas flow subsystem configured for replacing the gas in a second local volume proximate the first local volume with a second medium different than the first medium. The system further includes a computer subsystem configured for detecting abnormalities on the specimen based on the output.
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公开(公告)号：US4755054A
公开(公告)日：1988-07-05
申请号：US861413
申请日：1986-05-07
Applicant: Mark B. Ferree
Inventor： Mark B. Ferree
CPC classification number: G01J3/42 , G01J3/02 , G01J3/0208 , G01J3/0213 , G01J3/0218 , G01J3/0232 , G01J3/0256 , G01N21/255 , G01N21/474 , G02B26/02 , G02B6/264 , G01J2001/4242 , G01J2003/1226 , G01J2003/2866 , G01N2021/4709 , G01N2021/4742 , G01N2201/0233 , G01N2201/084
Abstract: An optical-fiber-based spectrometer utilizes a compact, P-C-board-mountable optical multiplexer which permits multiple channels of reference and measurement data from remote and hostile environments to be analyzed in rapid sequence utilizing synchronized computer data-storage and comparison to give rapid-fire answers to the question of the presence or absence of species of interest in a sample or process being analyzed, the relative light level in the reference and data channels being balanced by an optical attenuator having only an air path, attenuation being effected by controlled misalignment of optical fiber ends.
Abstract translation: 基于光纤的光谱仪使用紧凑的PC板安装光复用器，其允许使用同步的计算机数据存储和比较来快速分析来自远程和敌对环境的多个参考信道和测量数据， 对被分析的样品或过程中存在或不存在感兴趣物质的问题进行回答，参考和数据通道中的相对光级由仅具有空气路径的光衰减器平衡，衰减由受控的未对准 的光纤端。
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公开(公告)号：US12007330B2
公开(公告)日：2024-06-11
申请号：US17419462
申请日：2019-11-06
Applicant: Dow Global Technologies LLC
Inventor： James D. Tate , Paul J. Cammarata , R. Spencer Behling
CPC classification number: G01N21/8507 , G01N21/05 , G01N2021/0389 , G01N2021/052 , G01N2021/8578 , G01N2201/0233 , G01N2201/062
Abstract: A probe body (12) in a optical probe (10) including a measurement tube (14) having a plurality of probe vents (16) adapted to allow process fluid to flow there through; two or more purge rings, each including a process window, a purge gas inlet, and a plurality of purge gas outlet openings adapted to direct purge gas toward or adjacent to the process window; and a measurement region defined by a portion of the measurement tube and two or more of the purge rings.
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5.发明申请Device and method for spectroscopically measuring a gas concentration by determining a single absorption line 审中-公开通过确定单个吸收线来光谱测量气体浓度的装置和方法公开(公告)号：US20050128486A1
公开(公告)日：2005-06-16
申请号：US10996037
申请日：2004-11-24
Applicant: Andreas Dietrich , Peter Kasperson , Karl Haugholt
Inventor： Andreas Dietrich , Peter Kasperson , Karl Haugholt
CPC classification number: G01N21/39 , G01N21/09 , G01N21/3504 , G01N2021/151 , G01N2021/3133 , G01N2021/396 , G01N2201/0233
Abstract: A device and a method for measuring a concentration of at least one component of a process gas by means of a laser is provided. The beam path of the laser penetrates a volume containing the process gas. One section of the beam path penetrates the process gas in a free manner while another section thereof is shielded from the process gas. Only the section of the beam path, which penetrates the process gas in a free manner, is designated as the section to be measured and is used for measuring the concentration by means of laser spectroscopy, exactly one absorption line being determined for said measurement.
Abstract translation: 提供一种用于通过激光测量处理气体的至少一种组分的浓度的装置和方法。 激光束的光束通过包含处理气体的体积。 光束路径的一个部分以自由方式穿透处理气体，同时其另一部分与处理气体隔绝。 只有以自由方式穿透处理气体的光束路径的部分被指定为待测量的部分，并且用于通过激光光谱测量浓度，正好为所述测量确定了一条吸收线。
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Patent Agency Ranking
公开(公告)号：US4657390A
公开(公告)日：1987-04-14
申请号：US703762
申请日：1985-02-21
Applicant: Walter M. Doyle
Inventor： Walter M. Doyle
CPC classification number: G01N21/253 , G01J3/453 , G01N2021/0339 , G01N21/552 , G01N2201/0233 , G01N2201/024 , G01N2201/0415
Abstract: A spectrometer system is disclosed in which the sample-containing chamber is a separately constructed, enclosed modular unit which is readily attachable to, and detachable from, one wall of a housing which constitutes the basic unit of the spectrometer, and which contains an interferometer, one or more detectors, and other portions of the system. Various examples of the essentially unlimited types of sampling modules are disclosed. Also, automatic sample loading and unloading devices are disclosed, which are feasible because of the modular construction. And means of loading and unloading samples without purge loss are disclosed, which are feasible because of the modular construction.
Abstract translation: 公开了一种光谱仪系统，其中样品容纳室是单独构造的封闭的模块化单元，其容易地附接到构成所述光谱仪的基本单元的壳体的一个壁上并可拆卸，并且其包含干涉仪， 一个或多个检测器和系统的其它部分。 公开了基本上无限类型的采样模块的各种示例。 此外，公开了自动样品装载和卸载装置，这是因为模块化结构是可行的。 并且公开了无吹扫损失的装载和卸载样品，这是因为模块化构造是可行的。
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7.发明申请METHOD AND APPARATUS FOR MEASURING APPEARANCE AND DISAPPEARANCE TEMPERATURES OF WAX FOR TRANSPARENT, TRANSLUCENT AND OPAQUE OILS 有权用于测量透明，透明和无油油的WAX外观和不适宜温度的方法和装置公开(公告)号：US20160097717A1
公开(公告)日：2016-04-07
申请号：US14507979
申请日：2014-10-07
Applicant: Vivain Hoi Nga Yuen , Edmun K.H. Woo , Gordon S.Y. Chiu
Inventor： Vivain Hoi Nga Yuen , Edmun K.H. Woo , Gordon S.Y. Chiu
CPC classification number: G01N21/51 , G01N15/1434 , G01N15/1463 , G01N21/0332 , G01N21/15 , G01N21/84 , G01N25/02 , G01N33/2811 , G01N2015/0092 , G01N2021/151 , G01N2021/1761 , G01N2021/513 , G01N2201/0231 , G01N2201/0233
Abstract: An apparatus and method for the measurement of wax appearance temperature and wax disappearance temperature. The apparatus includes the following. The sample receptacle having a receptacle opening, including a bottom, at least one side and an open top. The sample receptacle including an inlet and an outlet for sample insertion and removal. The at least one side about the receptacle opening being light absorbing. The sample receptacle including a transparent cover mounted over the open top. The bottom of the receptacle opening having a reflective upper surface. A thermo device temperature change of the sample. A thermometer to register current temperature of the sample. A viewing chamber above the transparent cover, where the viewing chamber is surrounded by material that is light absorbing. A light emitting device to project light through the viewing chamber and the transparent cover.
Abstract translation: 用于测量蜡外观温度和蜡消失温度的装置和方法。 该装置包括以下装置。 样品容器具有容器开口，包括底部，至少一侧和敞开的顶部。 样品容器包括用于样品插入和取出的入口和出口。 围绕容器开口的至少一侧是光吸收。 样品容器包括安装在开口顶部上的透明盖。 容器开口的底部具有反射的上表面。 样品的热敏元件温度变化。 用于记录样品当前温度的温度计。 在透明盖上方的观察室，其中观察室由吸光材料包围。 一种用于通过观察室和透明盖突出光的发光装置。
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8.发明申请Method for Monitoring by Absorption Spectroscopy During the Forming of Flat Glass and Monitoring Device 失效平板玻璃和监测装置成型过程中吸收光谱监测方法公开(公告)号：US20100162766A1
公开(公告)日：2010-07-01
申请号：US12063311
申请日：2006-08-09
Applicant: Nicolas Docquier
Inventor： Nicolas Docquier
CPC classification number: G01N21/3504 , C03B18/20 , C03B18/22 , G01N21/15 , G01N2021/151 , G01N2021/3513 , G01N2201/0231 , G01N2201/0233
Abstract: The invention relates to a method for controlling flat glass forming by flowing a molten glass over a liquid tin layer contained in a forming vat wherein a forming characteristic quantity is measured above the glass surface during forming by means of beams generated by at least one absorption spectroscopy-based analyser, wherein the light beams generated by said analyser form a net above the glass surface. A device for carrying out the inventive method comprising an arm for supporting a vessel which comprises a retroreflecting means for receiving a light beam and transmitting it in an opposite direction parallel to an incident optical path is also disclosed.
Abstract translation: 本发明涉及一种用于通过使熔融玻璃流过包含在成形槽中的液体锡层上来控制平板玻璃形成的方法，其中在成形期间通过至少一个吸收光谱产生的光束在玻璃表面上测量成形特征量 其中由所述分析器产生的光束在玻璃表面上形成网。 还公开了一种用于实施本发明的方法的装置，其包括用于支撑容器的臂，该臂包括用于接收光束并沿与入射光路平行的相反方向透射的后向反射装置。
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公开(公告)号：US20060185440A1
公开(公告)日：2006-08-24
申请号：US11410686
申请日：2006-04-24
Applicant: Paul Hayford , David Long
Inventor： Paul Hayford , David Long
IPC: G01L1/24
CPC classification number: G01N21/01 , G01N3/02 , G01N2201/0233 , G01N2203/0017 , G01N2203/0025 , G01N2203/0238 , G01N2203/0242 , G01N2203/0647
Abstract: A method of monitoring the surface of a sample under test is provided and the method comprises the steps of: illuminating the surface with light (20) polarised in a first direction; viewing light reflected from the surface through a polarising filter (27) arranged at 90° to the first direction, wherein the surface of the sample under test is provided with a marked area where diffuse reflection of the incident polarised light will occur in order to improve the contrast between the marked area and the surface of the sample under text.
Abstract translation: 提供了一种监测待测样品表面的方法，该方法包括以下步骤：用在第一方向上极化的光（20）照射该表面; 从通过与第一方向成90°的偏振滤光器（27）从表面反射的光，其中被测试样品的表面设置有突出的区域，其中将出现入射偏振光的漫反射以便改善 文字标记区域与样品表面之间的对比度。
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10.发明申请公开(公告)号：US20180372607A1
公开(公告)日：2018-12-27
申请号：US15527710
申请日：2015-11-19
Applicant: HACH LANGE GMBH
Inventor： MANFRED BATTEFELD , HANS-JOACHIM KUMPCH , AXEL LEYER , BAS DE HEIJ , CLEMENS HANSCHKE , MICHAEL KUEPPERS , ANDREAS JONAK , ELK FRICKE , HEINZ RUDDE , MARKUS HAHN , MARKUS LENHARD , ROLF UTHEMANN , SEBASTIAN MINKE , ANDREAS GOLITZ , BERND GASSNER , FRANK STEINHAUER , LOTHAR HEIDEMANNS , ANDREAS MITREITER
CPC classification number: G01N15/06 , G01N21/15 , G01N21/51 , G01N21/53 , G01N2015/0693 , G01N2021/157 , G01N2021/158 , G01N2201/0233 , G01N2201/0235 , G01N2201/0238
Abstract: A nephelometric turbidimeter for measuring a turbidity of a liquid sample in a transparent sample cuvette. The nephelometric turbidimeter includes a cuvette chamber housing with a cuvette chamber having the transparent sample cuvette arranged therein, and a drying apparatus. The drying apparatus includes a cuvette chamber inlet opening which vents the cuvette chamber, a cuvette chamber outlet opening which de-vents the cuvette chamber, an air circulator which circulates air from the cuvette chamber outlet opening to the cuvette chamber inlet opening, and a drying body. The drying body is provided as a container of a hygroscopic agent defined by a drying substance which is arranged in a drying path between the cuvette chamber outlet opening and the cuvette chamber inlet opening so that air flows through the drying body.
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