公开(公告)号：US20200132608A1

公开(公告)日：2020-04-30

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Raymond Chu ,  Andrew Zeng ,  Donald Pettibone ,  Chunsheng Huang ,  Bret Whiteside ,  Fabrice Paccoret ,  Xuan Wang ,  Chuanyong Huang ,  Steve Xu ,  Anatoly Romanovsky

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/30 ,  G02B27/14

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

公开(公告)号：US10705026B2

公开(公告)日：2020-07-07

申请号：US16584370

申请日：2019-09-26

Applicant: KLA CORPORATION

Inventor： Andrew Zeng ,  Xuan Wang ,  Steve Xu

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/14 ,  G02B27/30

Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

公开(公告)号：US20210356406A1

公开(公告)日：2021-11-18

申请号：US17313703

申请日：2021-05-06

Applicant: KLA Corporation

Inventor： Anatoly Romanovsky ,  Jenn-Kuen Leong ,  Daniel Kavaldjiev ,  Chunhai Wang ,  Bret Whiteside ,  Steve Xu

IPC: G01N21/88

Abstract: A dark-field optical system may include a rotational objective lens assembly with a dark-field objective lens to collect light from a sample within a collection numerical aperture, where the dark-field objective lens includes an entrance aperture and an exit aperture at symmetrically-opposed azimuth angles with respect to an optical axis, a rotational bearing to allow rotation of at least a part of the dark-field objective lens including the entrance aperture and the exit aperture around the optical axis, and a rotational driver to control a rotational angle of the entrance aperture. The system may also include a multi-angle illumination sub-system to illuminate the sample with an illumination beam through the entrance aperture at two or more illumination azimuth angles, where an azimuth angle of the illumination beam on the sample is selectable by rotating the objective lens to any of the two or more illumination azimuth angles.