公开(公告)号：US20210098222A1

公开(公告)日：2021-04-01

申请号：US17020277

申请日：2020-09-14

Applicant: KLA Corporation

Inventor： Edgardo Garcia Berrios ,  J. Joseph Armstrong ,  Yinying Xiao-Li ,  John Fielden ,  Yung-Ho Alex Chuang

IPC: H01J1/304 ,  H01J37/073 ,  H01J3/02 ,  H01J37/317 ,  H01J37/28 ,  H01J35/06

Abstract: A light modulated electron source utilizes a photon-beam source to modulate the emission current of an electron beam emitted from a silicon-based field emitter. The field emitter's cathode includes a protrusion fabricated on a silicon substrate and having an emission tip covered by a coating layer. An extractor generates an electric field that attracts free electrons toward the emission tip for emission as part of the electron beam. The photon-beam source generates a photon beam including photons having an energy greater than the bandgap of silicon, and includes optics that direct the photon beam onto the emission tip, whereby each absorbed photon creates a photo-electron that combines with the free electrons to enhance the electron beam's emission current. A controller modulates the emission current by controlling the intensity of the photon beam applied to the emission tip. A monitor measures the electron beam and provides feedback to the controller.

公开(公告)号：US10943760B2

公开(公告)日：2021-03-09

申请号：US16568110

申请日：2019-09-11

Applicant: KLA Corporation ,  National Institute of Advanced Industrial Science and Technology

Inventor： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Edgardo Garcia Berrios ,  John Fielden ,  Masayoshi Nagao

IPC: H01J37/073 ,  H01J37/28 ,  H01J37/317

Abstract: An electron gun for an electron microscope or similar device includes a field emitter cathode having a field emitter protrusion extending from the output surface of a monocrystalline silicon substrate, and electrodes configured to enhance the emission of electrons from a tip portion of the field emitter protrusion to generate a primary electron beam. A thin, contiguous SiC layer is disposed directly on at least the tip portion of the field emitter protrusion using a process that minimizes oxidation and defects in the SiC layer. Optional gate layers may be placed at, slightly lower than or slightly higher than the height of the field emitter tip portion to achieve high emission current and fast and accurate control of the primary emission beam. The field emitter can be p-type doped and configured to operate in a reverse bias mode, or the field emitter can be n-type doped.

公开(公告)号：US11715615B2

公开(公告)日：2023-08-01

申请号：US17858943

申请日：2022-07-06

Applicant: KLA Corporation

Inventor： Edgardo Garcia Berrios ,  J. Joseph Armstrong ,  Yinying Xiao-Li ,  John Fielden ,  Yung-Ho Alex Chuang

IPC: H01J1/304 ,  H01J3/02 ,  H01J37/073 ,  H01J35/06 ,  H01J37/28 ,  H01J37/317

CPC classification number: H01J1/3044 ,  H01J3/022 ,  H01J37/073 ,  H01J35/065 ,  H01J37/28 ,  H01J37/3174

Abstract: A light modulated electron source utilizes a photon-beam source to modulate the emission current of an electron beam emitted from a silicon-based field emitter. The field emitter's cathode includes a protrusion fabricated on a silicon substrate and having an emission tip covered by a coating layer. An extractor generates an electric field that attracts free electrons toward the emission tip for emission as part of the electron beam. The photon-beam source generates a photon beam including photons having an energy greater than the bandgap of silicon, and includes optics that direct the photon beam onto the emission tip, whereby each absorbed photon creates a photo-electron that combines with the free electrons to enhance the electron beam's emission current. A controller modulates the emission current by controlling the intensity of the photon beam applied to the emission tip. A monitor measures the electron beam and provides feedback to the controller.

公开(公告)号：US20220336180A1

公开(公告)日：2022-10-20

申请号：US17858943

申请日：2022-07-06

Applicant: KLA Corporation

Inventor： Edgardo Garcia Berrios ,  J. Joseph Armstrong ,  Yinying Xiao-Li ,  John Fielden ,  Yung-Ho Alex Chuang

IPC: H01J1/304 ,  H01J3/02 ,  H01J37/073

Abstract: A light modulated electron source utilizes a photon-beam source to modulate the emission current of an electron beam emitted from a silicon-based field emitter. The field emitter's cathode includes a protrusion fabricated on a silicon substrate and having an emission tip covered by a coating layer. An extractor generates an electric field that attracts free electrons toward the emission tip for emission as part of the electron beam. The photon-beam source generates a photon beam including photons having an energy greater than the bandgap of silicon, and includes optics that direct the photon beam onto the emission tip, whereby each absorbed photon creates a photo-electron that combines with the free electrons to enhance the electron beam's emission current. A controller modulates the emission current by controlling the intensity of the photon beam applied to the emission tip. A monitor measures the electron beam and provides feedback to the controller.

公开(公告)号：US11417492B2

公开(公告)日：2022-08-16

申请号：US17020277

申请日：2020-09-14

Applicant: KLA Corporation

Inventor： Edgardo Garcia Berrios ,  J. Joseph Armstrong ,  Yinying Xiao-Li ,  John Fielden ,  Yung-Ho Alex Chuang

IPC: H01J1/304 ,  H01J3/02 ,  H01J37/073 ,  H01J35/06 ,  H01J37/28 ,  H01J37/317

Abstract: A light modulated electron source utilizes a photon-beam source to modulate the emission current of an electron beam emitted from a silicon-based field emitter. The field emitter's cathode includes a protrusion fabricated on a silicon substrate and having an emission tip covered by a coating layer. An extractor generates an electric field that attracts free electrons toward the emission tip for emission as part of the electron beam. The photon-beam source generates a photon beam including photons having an energy greater than the bandgap of silicon, and includes optics that direct the photon beam onto the emission tip, whereby each absorbed photon creates a photo-electron that combines with the free electrons to enhance the electron beam's emission current. A controller modulates the emission current by controlling the intensity of the photon beam applied to the emission tip. A monitor measures the electron beam and provides feedback to the controller.